Apparatus and method for operating an apparatus

Patent metadata

Field	Value
Publication number	US-10838307-B2
Application number	US-201916520047-A
Country	US
Kind code	B2
Filing date	Jul 23, 2019
Priority date	Feb 1, 2017
Publication date	Nov 17, 2020
Grant date	Nov 17, 2020

Abstract

An apparatus, for example a lithography apparatus or a multi-mirror system, includes comprises a radiation source for generating radiation, a plurality of optical components for guiding the radiation in the apparatus, a plurality of actuator/sensor devices for the optical components, and a drive device for driving the actuator/sensor devices.

First claim

What is claimed is:

1. An apparatus, comprising:
a vacuum housing;
a plurality of optical components configured to guide radiation in the apparatus;
a number N1 of arrays, each array comprising an actuator/sensor device assigned to one of the optical components;
a number N2 of local drive units configured to drive the N1 arrays;
a number N3 of central drive units configured to drive the N2 local drive units, the N3 central drive units comprising an internal interface device; and
an external interface device configured to provide data exchange and/or voltage supply through the vacuum housing,
wherein:
N2≥2;
the N1 arrays, the N2 local drive units, and the N3 central drive units are in the vacuum housing;
the external interface device is coupled to the internal interface device so that the N2 local drive units are visible with respect to the external interface device as a single drive unit independently of their number N2; and
the N3 central drive units and the N2 local drive units are connected in a ring structure.

2. The apparatus of claim 1 , wherein each of the N2 local drive units is coupled to each of the N3 central drive units so that each of the N2 local drive units is drivable by each of the N3 central drive units.

3. The apparatus of claim 1 , wherein each of the N2 local drive units is connected to at least two of the N1 arrays, and N2≤N1.

4. The apparatus of claim 1 , wherein, where N1≥2, and each of the N2 local drive units is connected via a respective connection to each actuator/sensor device of a specific one of the N1 arrays.

5. The apparatus of claim 1 , wherein:
each of the N1 arrays is connected via a primary connection to one of the N2 local drive units; and
each of the N1 arrays is connected via a secondary connection to: i) a further one of the N2 local drive units; or ii) one of the N3 central drive units.

6. The apparatus of claim 1 , wherein:
the actuator/sensor device comprises an actuator device configured to displace its optical component;
the actuator/sensor device comprises a sensor device configured to determine a position of its optical component; or
the actuator/sensor device comprises an actuator and a sensor device configured to displace the optical component and to determine a position of its optical component.

7. The apparatus of claim 1 , wherein the apparatus comprises a multi-mirror system.

8. The apparatus of claim 1 , wherein the apparatus comprises a lithography apparatus.

9. The apparatus of claim 1 , wherein the apparatus comprises an EUV lithography apparatus.

10. The apparatus of claim 1 , wherein each of the plurality of optical components comprises a mirror.

11. The apparatus of claim 1 , wherein:
where N3=1; and
the central drive unit, the N2 local drive units and the N1 arrays are connected in a tree structure.

12. The apparatus of claim 1 , wherein:
the N2 local drive units comprise a first subset of active local drive units and a second subset of inactive local drive units, which are switchable into an active state in a fault situation; and
the N3 central drive units comprise a first subset of active central drive units and a second sub-set of inactive central drive units, which are switchable into an active state in a fault situation.

13. The apparatus of claim 1 , wherein:
a subset of the N2 local drive units comprises both active resources and redundant resources, which are inactive in a fault-free situation and which are switchable into an active state in a fault situation; and
a subset of the N3 central drive units comprises both active resources and redundant resources, which are inactive in a fault-free situation and which are switchable into an active state in a fault situation.

14. The apparatus of claim 1 , wherein:
each of the N2 local drive units is coupled to each of the N3 central drive units so that each of the N2 local drive units is drivable by each of the N3 central drive units;
N1≥2; and
each of the N2 local drive units is connected via a respective connection to each actuator/sensor device of a specific one of the N1 arrays.

15. An apparatus, comprising:
a vacuum housing;
a plurality of optical components configured to guide radiation in the apparatus;
a number N1 of arrays, each array comprising an actuator/sensor device assigned to one of the optical components;
a number N2 of local drive units configured to drive the N1 arrays;
a number N3 of central drive units configured to drive the N2 local drive units, the N3 central drive units comprising an internal interface device; and
an external interface device configured to provide data exchange and/or voltage supply through the vacuum housing,
wherein:
N2≥2;
the N1 arrays, the N2 local drive units, and the N3 central drive units are in the vacuum housing;
the external interface device is coupled to the internal interface device so that the N2 local drive units are visible with respect to the external interface device as a single drive unit independently of their number N2;
a subset of the N2 local drive units is reconfigurable or reprogrammable in a fault situation; and
a subset of the N3 central drive units is reconfigurable or reprogrammable in a fault situation.

16. The apparatus of claim 15 , wherein the N2 local drive units comprise a first subset of active local drive units and a second subset of redundant local drive units, which are activatable even in a fault-free situation, so that the active local drive units and the redundant local drive units are designed for fault masking.

17. The apparatus of claim 15 , wherein:
where N3=1; and
the central drive unit, the N2 local drive units and the N1 arrays are connected in a tree structure.

18. An apparatus, comprising:
a vacuum housing;
a plurality of optical components configured to guide radiation in the apparatus;
a number N1 of arrays, each array comprising an actuator/sensor device assigned to one of the optical components;
a number N2 of local drive units configured to drive the N1 arrays;
a number N3 of central drive units configured to drive the N2 local drive units, the N3 central drive units comprising an internal interface device; and
an external interface device configured to provide data exchange and/or voltage supply through the vacuum housing,
wherein:
N2≥2;
the N1 arrays, the N2 local drive units, and the N3 central drive units are in the vacuum housing;
the external interface device is coupled to the internal interface device so that the N2 local drive units are visible with respect to the external interface device as a single drive unit independently of their number N2;
each of the N2 local drive units is coupled to each of the N3 central drive units so that each of the N2 local drive units is drivable by each of the N3 central drive units;
each of the N2 local drive units is connected to at least two of the N1 arrays; and
N2≤N1.

19. The apparatus of claim 18 , wherein, where N1≥2, and each of the N2 local drive units is connected via a respective connection to each actuator/sensor device of a specific one of the N1 arrays.

20. The apparatus of claim 18 , wherein:
where N3=1; and
the central drive unit, the N2 local drive units and the N1 arrays are connected in a tree structure.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Holz Markus
• Bihr Ulrich

Classifications

• G03F7/70258 Primary

  Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system · CPC title

• G03F7/70141

  Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system · CPC title

• G03F7/70308 Primary

  Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift · CPC title

• G03F7/70491

  Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes · CPC title