Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system

Patent metadata

Field	Value
Publication number	US-2018188656-A1
Application number	US-201815878041-A
Country	US
Kind code	A1
Filing date	Jan 23, 2018
Priority date	Aug 27, 2015
Publication date	Jul 5, 2018
Grant date	—

Abstract

The disclosure provides a sensor arrangement for sensing a position of an optical element in a lithography system. The sensor arrangement includes: a first capacitive sensor device having a position-dependent variable first sensor capacitance that can be sensed using a first excitation signal; a second capacitive sensor device having a position-dependent variable second sensor capacitance that can be sensed using a second excitation signal; and a control device configured to produce the first and second excitation signals so that charges present on a parasitic capacitance associable with the first sensor device are at least partially compensated for by charges that are present on a parasitic capacitance associable with the second sensor device via a signal path outside the first and/or the second excitation signal path.

First claim

What is claimed is:

1 . A sensor arrangement, comprising:
a first capacitive sensor device comprising a position-dependent variable first sensor capacitance configured to be sensed via a first excitation signal; a second capacitive sensor device comprising a position-dependent variable second sensor capacitance configured to be sensed using a second excitation signal; a first reading device associated with the first sensor device; a second reading device associated with the second sensor device; and a control device configured to produce the first and second excitation signals so that charges present on a parasitic capacitance associable with the first sensor device are at least partially compensated for by charges that are present on a parasitic capacitance associable with the second sensor device via a signal path outside of at least one signal path selected from the group consisting of the first excitation signal path and the second excitation signal path.

2 . The sensor arrangement of claim 1 , wherein the first excitation signal is an inverse of the second excitation signal.

3 . The sensor arrangement of claim 1 , wherein the first excitation signal is an inverse of the second excitation signal with regard to an offset potential.

4 . The sensor arrangement of claim 1 , wherein at least one signal selected from the group consisting of the first excitation signal and the second excitation signal is an AC voltage signal.

5 . The sensor arrangement of claim 1 , wherein at least one signal selected from the group consisting of the first excitation signal and the second excitation signal is a square-wave signal.

6 . The sensor arrangement of claim 1 , wherein at least one signal selected from the group consisting of the first excitation signal and the second excitation signal is a voltage signal comprising a prescribed nominal voltage characteristic over a prescribed excitation period.

7 . The sensor arrangement of claim 6 , wherein an amplitude of the voltage signal in a first excitation section of the excitation period is greater than a nominal amplitude corresponding to a nominal voltage characteristic.

8 . The sensor arrangement of claim 7 , wherein the amplitude of the voltage signal in a second excitation section corresponds to the nominal amplitude and the excitation period is defined by the first and second excitation sections.

9 . The sensor arrangement of claim 6 , wherein at least one signal selected from the group consisting of the first excitation signal and the second excitation signal corresponds to a reference potential between successive excitation periods over a prescribed pause period.

10 . The sensor arrangement of claim 1 , wherein an amplitude of the first and second excitation signals is settabled based on sensed parasitic capacitances.

11 . The sensor arrangement of claim 1 , further comprising:
a base element; a structural element configured to retain the optical element; and a bearing element configured to movably support the structural element on the base element.

12 . The sensor arrangement of claim 1 , wherein at least one sensor device selected from the group consisting of the first sensor device and the second sensor device comprises:
first and second capacitor elements fixed relative to one another; and a third capacitor element movable relative to the first and second capacitor elements, wherein the sensor capacitance appears between the first and second capacitor elements based on a position of the capacitor elements relative to each other, and the sensor capacitance is sensible via the excitation signal which is coupleable to the first and second capacitor elements via supply lines.

13 . The sensor arrangement of claim 12 , wherein the first and second capacitor elements are arranged on the base element, and the third capacitor element is arranged on the structural element.

14 . The sensor arrangement of claim 12 , wherein the first and second sensor devices are arranged in differential fashion, and the first and second sensor devices are arranged to sense two different tilt movements.

15 . The sensor arrangement of claim 12 , further comprising a fourth capacitor element, wherein:
the fourth capacitor element is movable relative to the first and second capacitor elements; the first and second capacitor elements are individually contactable via supply lines in or on the base element; and the sensor arrangement comprises a fourth the third capacitor element electrically coupled to one another via the structural element.

16 . The sensor arrangement of claim 12 , further comprising a fourth capacitor element wherein:
the first and second capacitor elements are arranged on the base element; the third capacitor element is arranged on the structural element; the first and second sensor devices are arranged in differential fashion; the first and second sensor devices are arranged to sense two different tilt movements; the fourth capacitor element is movable relative to the first and second capacitor elements; the first and second capacitor elements are individually contactable via supply lines in or on the base element; and the sensor arrangement comprises a fourth the third capacitor element electrically coupled to one another via the structural element.

17 . The sensor arrangement of claim 1 , wherein the signal path is outside the first excitation signal path.

18 . The sensor arrangement of claim 1 , wherein the signal path is outside the second excitation signal path.

19 . A system, comprising:
an optical element; and a sensor arrangement according to claim 1 , wherein the sensor arrangement is configured to position the optical element, and the system is a lithography system.

20 . A method, comprising:
providing a lithography system comprising an optical element and a sensor arrangement configured to position the optical element, and the sensor arrangement comprising a sensor arrangement according to claim 1 ; and producing the first and second excitation signals so that charges present on the parasitic capacitance associable with the first sensor device are at least partially compensated for by charges that are present on the parasitic capacitance associable with the second sensor device via a signal path outside at least one path selected from the group consisting of the excitation signal path first and the second excitation signal path; sensing the first and second sensor capacitances; and determining an inclination or position of the optical element based on the sensed first and second sensor capacitances.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Bihr Ulrich
• Holz Markus
• Horn Jan

Classifications

• G02B26/0841

  the reflecting element being moved or deformed by electrostatic means · CPC title

• G03F7/7085 Primary

  Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load · CPC title

• G03F7/70116

  Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets · CPC title

• G01D5/24

  by varying capacitance · CPC title