Mirror device

Patent metadata

Field	Value
Publication number	US-10101507-B2
Application number	US-201715621555-A
Country	US
Kind code	B2
Filing date	Jun 13, 2017
Priority date	Dec 17, 2014
Publication date	Oct 16, 2018
Grant date	Oct 16, 2018

Abstract

A mirror device includes at least one electrically conductive shielding element, which forms a mechanism for producing an electric field in a region adjacent to at least one side surface and/or a rear side of a mirror body.

First claim

What is claimed is:

1. A mirror device, comprising:
a mirror comprising a mirror body, the mirror body comprising a front side, a rear side and a side surface;
a first electrically conductive shielding element; and
a second electrically conductive shielding element which is separate from the first electrically conductive shielding element,
wherein the mirror device is configured so that, during use, a voltage applied to the first electrically conductive shielding element is different from a voltage applied to the second electrically conductive shielding element so that the first and second electrically conductive shielding elements produce an electric field in a region adjacent to at least one member selected from the group consisting of the side surface of the mirror body and the rear side of the mirror body.

2. The mirror device of claim 1 , wherein the first electrically conductive shielding element is in a region of the side surface of the mirror body.

3. The mirror device of claim 1 , wherein the first electrically conductive shielding element is in a region on or behind the rear side of the mirror body.

4. The mirror device of claim 1 , further comprising a voltage source configured to apply electrical voltage to at least one member selected from the group consisting of the first electrically conductive shielding element and the second electrically conductive shielding element.

5. The mirror device of claim 4 , further comprising a control device configured to control the electrical voltage.

6. The mirror device of claim 1 , further comprising a control device configured to control the voltage applied to the first electrically conductive shielding element and the voltage applied to the second electrically conductive shielding element.

7. The mirror device of claim 1 , further comprising electrical supply lines configured to apply voltages to the first and second electrically conductive shielding element.

8. The mirror device of claim 1 , wherein the mirror body comprises electrical supply lines configured to apply voltages to the first and second electrically conductive shielding element.

9. The mirror device of claim 1 , wherein the first electrically conductive shielding element is on a first side of the mirror body, the second electrically conductive shielding element is on a second side of the mirror body, and the first side is different from the second side.

10. The mirror device of claim 1 , wherein the first electrically conductive shielding element is in a first side of the mirror body, the second electrically conductive shielding element is in a second side of the mirror body, and the first side is different from the second side.

11. The mirror device of claim 1 , wherein:
the mirror device comprises a plurality of mirrors;
each mirror comprises:
a mirror comprising a mirror body, the mirror body comprising a front side, a rear side and a side surface;
a first electrically conductive shielding element; and
a second electrically conductive shielding element which is separate from the first electrically conductive shielding element; and

each mirror device is configured so that, during use, a voltage applied to its first electrically conductive shielding element is different from a voltage applied to its second electrically conductive shielding element so that its first and second electrically conductive shielding elements produce an electric field in a region adjacent to at least one member selected from the group consisting of the side surface of the mirror body and the rear side of the mirror body.

12. The mirror device of claim 11 , wherein an electrically conductive shielding element is in a region behind an interspace between two adjacent mirrors.

13. The mirror device of claim 11 , wherein two electrically conductive shielding elements are arranged in pairs in a region of mutually opposite side surfaces of adjacent mirrors.

14. A unit, comprising:
a mirror device according to claim 1 ,
wherein the unit is a projection exposure lithography illumination optical unit.

15. A system, comprising:
a radiation source; and
an illumination optical unit,
wherein:
the illumination optical unit comprises a mirror device according to claim 1 ; and
the system is a projection exposure lithography illumination system.

16. An apparatus, comprising:
an illumination optical unit configured to illuminate an object field; and
a projection optical unit configured to project the illumination radiation from the object field into an image field,
wherein:
the illumination optical unit comprises a mirror device according to claim 1 ; and
the apparatus is a microlithographic projection exposure apparatus.

17. A method of using an apparatus comprising an illumination optical unit and a projection optical unit, the method comprising:
using the illumination optical unit to illuminate an object in an object field; and
using the projection optical unit to project the illumination radiation from the object field into an image field,
wherein the illumination optical unit comprises a mirror device according to claim 1 .

18. A mirror device, comprising:
a mirror comprising a mirror body;
a first electrically conductive shielding element; and
a second electrically conductive shielding element which is separate from the first electrically conductive shielding element,
wherein:
the mirror body comprises a first side, a second side different from the first side, and a third side different from both the first and second sides; and
the mirror device is configured so that, during use, a voltage applied to the first electrically conductive shielding element is different from a voltage applied to the second electrically conductive shielding element so that the first and second electrically conductive shielding elements produce an electric field in a region adjacent to at least one member selected from the group consisting of the second side of the mirror body and the third side of the mirror body.

19. The mirror device of claim 18 , wherein the third side of the mirror body supports a surface configured to reflect EUV radiation.

20. A mirror device, comprising:
a mirror comprising a mirror body;
a first electrically conductive shielding element; and
a second electrically conductive shielding element which is separate from the first electrically conductive shielding element,
wherein:
the mirror body comprises first, second and third sides;
the first side of the mirror body supports a surface configured to reflect EUV radiation;
the second side of the mirror body is opposite the first side of the mirror body;
the third side of the mirror body connects the first and second sides of the mirror body;
the second side of the mirror body supports the first electrically conductive shielding element;
the third side of the mirror body supports the second electrically conductive shielding element; and
the mirror device is configured so that, during use, a voltage applied to the first electrically conductive shielding element is different from a voltage applied to the second electrically conductive shielding element so that the first and second electrically conductive shielding elements produce an electric field in a region adjacent to at least one member selected from the group consisting of the second side of the mirror body and the third side of the mirror body.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Sarov Yanko
• Holz Markus
• Haacker Fabian
• Wengler Mark Christof
• Hauf Markus

Classifications

• G03F7/702 Primary

  Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems · CPC title

• G02B5/08

  Mirrors {(vehicle mirrors involving special optical features B60R1/08)} · CPC title

• G03F7/70116

  Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets · CPC title

• G02B5/09 Primary

  Multifaceted or polygonal mirrors {, e.g. polygonal scanning mirrors; Fresnel mirrors} · CPC title

• G03F7/70908

  Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus · CPC title