Overlayer films and methods for etching silicon-containing materials using a low temperature dry chemical etch process
US-2026026273-A1 · Jan 22, 2026 · US
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George Steven M patents
George Steven M is listed as an inventor on 20 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | George Steven M |
| Total patents | 20 |
| First publication | Jun 18, 2015 |
| Latest publication | Jan 22, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Smoothing Surface Roughness Using Atomic Layer Deposition
US-2025179631-A1 · Jun 5, 2025 · US
Smoothing surface roughness using atomic layer deposition
US-12215419-B2 · Feb 4, 2025 · US
Smoothing Surface Roughness Using Atomic Layer Deposition
US-2023349042-A1 · Nov 2, 2023 · US
Atomic layer etching on microdevices and nanodevices
US-11565936-B2 · Jan 31, 2023 · US
Removal of stray ruthenium metal nuclei for selective ruthenium metal layer formation
US-2022254683-A1 · Aug 11, 2022 · US
Method for using ultra-thin etch stop layers in selective atomic layer etching
US-2021242031-A1 · Aug 5, 2021 · US
Atomic layer etching on microdevices and nanodevices
US-2020316645-A1 · Oct 8, 2020 · US
Methods of atomic layer etching (ALE) using sequential, self-limiting thermal reactions
US-10381227-B2 · Aug 13, 2019 · US
Methods of growing thin films at low temperatures using electron stimulated desorption (ESD)
US-10283354-B2 · May 7, 2019 · US
Recent patents
Latest publications not already listed above.
Atomic layer etching processes using sequential, self-limiting thermal reactions comprising oxidation and fluorination
US-10208383-B2 · Feb 19, 2019 · US
Corrosion-resistant catalyst
US-10164265-B2 · Dec 25, 2018 · US
Molecular layer deposition process for making organic or organic-inorganic polymers
US-10092927-B2 · Oct 9, 2018 · US
Atomic layer etching processes using sequential, self-limiting thermal reactions comprising oxidation and fluorination
US-2018223437-A1 · Aug 9, 2018 · US
Conformal thin film of precious metal on a support
US-9979028-B2 · May 22, 2018 · US
Corrosion-resistant catalyst
US-2017117556-A1 · Apr 27, 2017 · US
Supercapacitor devices formed by depositing metal oxide materials onto carbon substrates
US-9406449-B2 · Aug 2, 2016 · US
Methods of growing thin films at low temperatures using electron stimulated desorption (esd)
US-2016218004-A1 · Jul 28, 2016 · US
Method of depositing an inorganic film on an organic polymer
US-9376750-B2 · Jun 28, 2016 · US
Conformal thin film of precious metal on a support
US-2015171433-A1 · Jun 18, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Univ Colorado Regents | 15 |
| Univ Of Colorado Boulder | 4 |
| Tokyo Electron Ltd | 3 |
| Eagle Tech Llc | 3 |
| Gm Global Tech Operations Llc | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/403 | 8 |
| C23C16/405 | 6 |
| C23C16/45555 | 6 |
| C23F1/12 | 5 |
| H10P50/285 | 5 |