Molecular layer deposition process for making organic or organic-inorganic polymers

Patent metadata

Field	Value
Publication number	US-10092927-B2
Application number	US-51383107-A
Country	US
Kind code	B2
Filing date	Nov 13, 2007
Priority date	Nov 13, 2006
Publication date	Oct 9, 2018
Grant date	Oct 9, 2018

Abstract

Ultrathin layers of organic polymers or organic-inorganic hybrid polymers are deposited onto a substrate using molecular layer deposition methods. The process uses vapor phase materials which contain a first functional group and react only monofunctionally at the surface to add a unit to the polymer chain. The vapor phase reactant in addition has a second functional group, which is different from the first functional group, or a blocked, masked or protected functional group, or else has a precursor to such a functional group.

First claim

What is claimed is:

1. A molecular layer deposition process for forming, under appropriate reaction conditions, a layer of an organic polymer or organic-inorganic polymer onto a first hydroxyl-functionalized surface while preventing chain termination and cross-linking, comprising:
reacting a cyclic azasilane comprising 2,2-dimethoxy-1,6-diaza-2-silacyclooctane with a surface hydroxyl on the first hydroxyl-functionalized surface;
allowing a ring of the 2,2-dimethoxy-1,6-diaza-2-silacyclooctane to open and form a silicon-oxygen bond to the first hydroxyl-functionalized surface;
allowing the opened ring of the 2,2-dimethoxy-1,6-diaza-2-silacyclooctane to unfold, thereby leaving a primary amine surface species;
allowing ethylene carbonate to react with the primary amine surface species to generate a urethane linkage to the primary amine surface species, and unfold, thereby forming the layer of the organic polymer or organic-inorganic polymer having a second hydroxyl-functionalized surface.

2. The molecular layer deposition process of claim 1 , wherein the first hydroxyl-functionalized surface and the second hydroxyl-functionalized surface comprise silica.

3. A molecular layer deposition process for forming a layer of an organic polymer or organic-inorganic polymer onto a first hydroxyl-functionalized surface while preventing chain termination, comprising, under appropriate reaction conditions the steps of:
allowing trimethylaluminum in the vapor phase to react with hydroxyl surface groups on the first hydroxyl-functionalized surface, thereby forming an Al—CH 3 surface species;
allowing ethanolamine in the vapor phase to react with the Al—CH 3 surface species, thereby forming an Al—O—CH 2 CH 2 —NH 2 surface species; and
allowing maleic anhydride in the vapor phase to react with the amine, —NH 2 , groups on the Al—O—CH 2 CH 2 —NH 2 surface species, thereby forming the layer of the organic polymer or organic-inorganic polymer having a second hydroxyl-functionalized surface.

4. A molecular layer deposition process for forming a layer of an organic polymer or organic-inorganic polymer onto a first hydroxyl-functionalized surface while preventing chain termination and cross-linking, comprising, under appropriate reaction conditions the steps of:
contacting the first hydroxyl-functionalized surface with 3(1,3-dimethylbutylidene)aminopropyltriethoxysilane (PS) wherein a protecting group hides the —NH 2 functionality;
allowing the PS to form a siloxane linkage to the hydroxylated surface;
contacting the PS surface with water;
allowing the water to react with the imine moiety on the PS, thereby removing the protecting group, releasing 4-methyl-2-pentanone, and forming a surface terminated with primary amine groups;
exposing the surface to an acid chloride or an acid chloride precursor, which bonds to the surface with an amide linkage, the amide linkage producing a nitrobenzyl-protected surface wherein the surface nitrobenzyl-protection group hides an underlying hydroxyl group; and
exposing the surface nitrobenzyl-protection group to ultra-violet light at an appropriate wavelength and for a sufficient period of time to remove the nitrobenzyl-protection group and unmask the underlying hydroxyl group, thereby forming the layer of an organic polymer or organic-inorganic polymer having a second hydroxyl-functionalized surface.

Assignees

• George Steven M
• Dameron Arrelaine Allen
• Keaner Nicole Marie Adamczyk
• Yoon Byunghoon
• Univ Colorado Regents

Inventors

• George Steven M
• Dameron Arrelaine Allen
• Keaner Nicole Marie Adamczyk
• Yoon Byunghoon

Classifications

• B05D1/60 Primary

  Deposition of organic layers from vapour phase (vapour phase deposition in general C23C14/00, C23C16/00) · CPC title

• B05D7/52

  Two layers · CPC title

• B05D7/24 Primary

  for applying particular liquids or other fluent materials · CPC title