Substrate processing method and substrate processing system
US-2025226228-A1 · Jul 10, 2025 · US
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Fujita Keiichi patents
Fujita Keiichi is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Fujita Keiichi |
| Total patents | 10 |
| First publication | Jun 15, 2017 |
| Latest publication | Jul 10, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate liquid processing method, and recording medium
US-2024213090-A1 · Jun 27, 2024 · US
Substrate liquid processing apparatus, substrate liquid processing method and recording medium
US-11795546-B2 · Oct 24, 2023 · US
Substrate processing method
US-10903081-B2 · Jan 26, 2021 · US
Substrate liquid processing apparatus, substrate liquid processing method and recording medium
US-2021002770-A1 · Jan 7, 2021 · US
Metal wiring layer forming method, metal wiring layer forming apparatus and recording medium
US-10755973-B2 · Aug 25, 2020 · US
Metal wiring layer forming method, metal wiring layer forming apparatus and recording medium
US-2019229016-A1 · Jul 25, 2019 · US
Substrate processing method
US-2018122641-A1 · May 3, 2018 · US
Substrate processing apparatus, substrate processing method and recording medium
US-2017170021-A1 · Jun 15, 2017 · US
Substrate processing apparatus, substrate processing method and recording medium
US-2017167029-A1 · Jun 15, 2017 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 10 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10W20/057 | 10 |
| H10W20/044 | 8 |
| H10P14/46 | 8 |
| H01L21/288 | 7 |
| C23C18/1619 | 6 |