Monolithic gas distribution assembly for process chambers
US-2025316502-A1 · Oct 9, 2025 · US
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Cho Tom patents
Cho Tom is listed as an inventor on 20 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Cho Tom |
| Total patents | 20 |
| First publication | Sep 24, 2015 |
| Latest publication | Oct 9, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Alloy microstructure formation for chamber components
US-2025242406-A1 · Jul 31, 2025 · US
Gas delivery system
US-2025207679-A1 · Jun 26, 2025 · US
Alloy composition for corrosion resistance
US-2025092491-A1 · Mar 20, 2025 · US
Plasma erosion resistant rare-earth oxide based thin film coatings
US-11680308-B2 · Jun 20, 2023 · US
Plasma erosion resistant rare-earth oxide based thin film coatings
US-2021317563-A1 · Oct 14, 2021 · US
Plasma erosion resistant rare-earth oxide based thin film coatings
US-11053581-B2 · Jul 6, 2021 · US
Rare-earth oxide based erosion resistant coatings for semiconductor application
US-10734202-B2 · Aug 4, 2020 · US
Plasma erosion resistant rare-earth oxide based thin film coatings
US-2020087776-A1 · Mar 19, 2020 · US
Plasma erosion resistant rare-earth oxide based thin film coatings
US-10501843-B2 · Dec 10, 2019 · US
Recent patents
Latest publications not already listed above.
Aerosol deposition coating for semiconductor chamber components
US-10418229-B2 · Sep 17, 2019 · US
Plasma erosion resistant rare-earth oxide based thin film coatings
US-10119188-B2 · Nov 6, 2018 · US
Rare-earth oxide based erosion resistant coatings for semiconductor application
US-2018102237-A1 · Apr 12, 2018 · US
Plasma erosion resistant rare-earth oxide based thin film coatings
US-2018087144-A1 · Mar 29, 2018 · US
Plasma erosion resistant rare-earth oxide based thin film coatings
US-2018073125-A1 · Mar 15, 2018 · US
Rare-earth oxide based erosion resistant coatings for semiconductor application
US-9865434-B2 · Jan 9, 2018 · US
Plasma erosion resistant rare-earth oxide based thin film coatings
US-9850568-B2 · Dec 26, 2017 · US
Aerosol deposition coating for semiconductor chamber components
US-2017287683-A1 · Oct 5, 2017 · US
Aerosol deposition coating for semiconductor chamber components
US-9708713-B2 · Jul 18, 2017 · US
Rare-earth oxide based erosion resistant coatings for semiconductor application
US-2015270108-A1 · Sep 24, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 20 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32495 | 13 |
| H10W74/01 | 13 |
| H01J37/32477 | 10 |
| C23C14/22 | 9 |
| Y10T428/265 | 9 |