Aerosol deposition coating for semiconductor chamber components

Patent metadata

Field	Value
Publication number	US-10418229-B2
Application number	US-201715620700-A
Country	US
Kind code	B2
Filing date	Jun 12, 2017
Priority date	May 24, 2013
Publication date	Sep 17, 2019
Grant date	Sep 17, 2019

Abstract

An component of a processing chamber comprises an aerosol deposited coating on the component, the aerosol deposited coating comprising a first type of metal oxide nanoparticle and a second type of metal oxide nanoparticle.

First claim

What is claimed is:

1. An article comprising:
a body, wherein the body has a surface roughness of less than about 0.2 microinch; and
a coating on the body, the coating comprising a first particle of a first rare earth metal oxide, a second particle of a second rare earth metal oxide, and a third particle of a third metal oxide, wherein the coating has a particle crystal structure and wherein:
the first rare earth metal oxide is Y 2 O 3 and the coating comprises the Y 2 O 3 in a range of 40 mol % to less than 100 mol %;
the second rare earth metal oxide is ZrO 2 and the coating comprises the ZrO 2 in a range of greater than 0 mol % to less than 60 mol %; and
the third metal oxide is Al 2 O 3 and the coating comprises the Al 2 O 3 at a range of greater than 0 mol % to 40 mol %.

2. The article of claim 1 , wherein the body comprises Aluminum, quartz, bulk alumina, silicon, bulk Yttria, a bulk ceramic compound of Y 4 Al 2 O 9 and a solid-solution of Y 2 O 3 —ZrO 2 , plasma sprayed Yttria, or silicon carbide.

3. A component of a processing chamber, the component comprising a coating that was deposited on the component by a process comprising:
loading the component into a deposition chamber, the component having a surface roughness of less than about 0.2 microinch;
reducing a pressure of the deposition chamber below atmospheric pressure; and
depositing the coating on the component by spraying an aerosol of ceramic particles comprising a mixture of a first rare earth metal oxide, a second rare earth metal oxide, and a third metal oxide onto the component at approximately room temperature, wherein the coating has a particle crystal structure and wherein:
the first rare earth metal oxide is Y 2 O 3 and the mixture comprises the Y 2 O 3 in a range of 40 mol % to less than 100 mol %;
the second rare earth metal oxide is ZrO 2 and the mixture comprises the ZrO 2 in a range of greater than 0 mol % to less than 60 mol %; and
the third metal oxide is Al 2 O 3 and the mixture comprises the Al 2 O 3 at a range of greater than 0 mol % to 40 mol %.

4. The component of claim 3 , wherein the component further comprises a barrier layer that was formed by a process comprising:
heating the component to a temperature in a range from about 1200 degrees C. to about 1600 degrees C. for a time in a range from about 30 minutes to about 6 hours after deposition of the coating, wherein the heating causes the barrier layer to form between the component and the coating.

5. The component of claim 3 , wherein:
the mixture comprises the Y 2 O 3 in a range of 50-75 mol %;
the mixture comprises the ZrO 2 in a range of 10-30 mol %; and
the mixture comprises the Al 2 O 3 in a range of 10-30 mol %.

6. The component of claim 3 , wherein:
the mixture comprises the Y 2 O 3 in a range of 40 mol % to less than 100 mol %;
the mixture comprises the ZrO 2 in a range of greater than 0 mol % to less than 60 mol %; and
the mixture comprises the Al 2 O 3 in a range of greater than 0 mol % to less than 10 mol %.

7. The component of claim 3 , wherein:
the mixture comprises the Y 2 O 3 in a range of 40-60 mol %;
the mixture comprises the ZrO 2 in a range of greater than 30 mol % to 50 mol %; and
the mixture comprises the Al 2 O 3 in a range of 10-20 mol %.

8. The article of claim 1 , wherein:
the coating comprises the Y 2 O 3 in a range of 50-75 mol %;
the coating comprises the ZrO 2 in a range of 10-30 mol %; and
the coating comprises the Al 2 O 3 in a range of 10-30 mol %.

9. The article of claim 1 , wherein:
the coating comprises the Y 2 O 3 in a range of 40 mol % to less than 100 mol %;
the coating comprises the ZrO 2 in a range of greater than 0 mol % to less than 60 mol %; and
the coating comprises the Al 2 O 3 in a range of greater than 0 mol % to less than 10 mol %.

10. The article of claim 1 , wherein:
the coating comprises the Y 2 O 3 in a range of 40-60 mol %;
the coating comprises the ZrO 2 in a range of greater than 30 mol % to 50 mol %; and
the coating comprises the Al 2 O 3 in a range of 10-20 mol %.

11. The article of claim 1 , wherein:
the coating comprises the Y 2 O 3 in a range of 40 mol % to less than 50 mol %;
the coating comprises the ZrO 2 in a range of 20-40 mol %; and
the coating comprises the Al 2 O 3 in a range of 20-40 mol %.

12. The article of claim 1 , wherein:
the coating comprises the Y 2 O 3 in a range of greater than 70 mol % to 90 mol %;
the coating comprises the ZrO 2 in a range of greater than 0 mol % to 20 mol %; and
the coating comprises the Al 2 O 3 in a range of 10-20 mol %.

13. The article of claim 1 , wherein:
the coating comprises the Y 2 O 3 in a range of 60-80 mol %;
the coating comprises the ZrO 2 in a range of greater than 0 mol % to 10 mol %; and
the coating comprises the Al 2 O 3 in a range of 20-40 mol %.

14. The article of claim 1 , wherein:
the coating comprises the Y 2 O 3 in a range of 40-60 mol %;
the coating comprises the ZrO 2 in a range of greater than 0 mol % to 20 mol %; and
the coating comprises the Al 2 O 3 in a range of greater than 30 mol % to 40 mol %.

15. The article of claim 1 , further comprising:
an additional coating on the body.

16. The article of claim 1 , wherein the coating is an aerosol deposited coating, wherein the first particle is a first nanoparticle, the second particle is a second nanoparticle, and the third particle is a third nanoparticle.

17. An article comprising:
a component of a processing chamber; and
a coating on the component, the coating comprising a first rare earth metal oxide and a second metal oxide, wherein the coating has a particle crystal structure and wherein:
the first rare earth metal oxide is Er 2 O 3 ; and
the second metal oxide is Al 2 O 3 .

18. The article of claim 17 , wherein the component has a surface roughness of less than about 0.2 microinch.

19. The article of claim 17 , wherein the coating is an aerosol deposited coating, and wherein the coating comprises nanoparticles the first rare earth metal oxide and nanoparticles of the second metal oxide.

20. The component of claim 3 , wherein the ceramic particles comprise ceramic nanoparticles.

Assignees

• Applied Materials Inc

Inventors

• Sun Jennifer Y
• Kanungo Biraja
• Cho Tom
• Zhang Ying

Classifications

• C23C24/04

  Impact or kinetic deposition of particles · CPC title

• Y10T428/24413

  Metal or metal compound · CPC title

• H01J37/3244 Primary

  Gas supply means · CPC title

• H01J37/32807 Primary

  Construction (includes replacing parts of the apparatus) · CPC title