Rare-earth oxide based erosion resistant coatings for semiconductor application

Patent metadata

Field	Value
Publication number	US-9865434-B2
Application number	US-201313954808-A
Country	US
Kind code	B2
Filing date	Jul 30, 2013
Priority date	Jun 5, 2013
Publication date	Jan 9, 2018
Grant date	Jan 9, 2018

Abstract

An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y 2 O 3 in a range between about 45 mol % to about 99 mol %, ZrO 2 in a range between about 0 mol % to about 55 mol %, and Al 2 O 3 in range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively inculde Y 2 O 3 in a range between about 30 mol % to about 60 mol %, ZrO 2 in a range between about 0 mol % to about 20 mol %, and Al 2 O 3 in a range between about 30 mol % to about 60 mol %.

First claim

What is claimed is:

1. A method of manufacturing a chamber component for a processing chamber comprising:
applying a first mask to a surface of the chamber component, wherein the first mask exposes a first surface region and covers a second surface region;
bead blasting the chamber component to roughen the first region of the surface to a roughness of about 120-240 μin, wherein the second region of the surface is not roughened;
removing the first mask from the surface of the chamber component;
applying a second mask to the surface of the chamber component, wherein the second mask exposes the first surface region and covers the second surface region;
performing plasma spraying to coat the second mask and the first region of the surface of the chamber component with a ceramic coating comprising Y 2 O 3 in a range between about 30 mol % to about 60 mol %, ZrO 2 in a range of above 0 mol % to below 9 mol %, and Al 2 O 3 in a range between about 35 mol % to about 63 mol %, wherein the ceramic coating is not formed on the second region;
removing the second mask;
polishing the ceramic coating to a surface roughness of about 6-12 μin; and
trimming the ceramic coating at an interface between the first surface region and the second surface region, wherein the ceramic coating comprises at least one of a tapered edge or a chamfered edge at the interface between the first surface region and the second surface region.

2. The method of claim 1 , wherein the ceramic coating is polished to a thickness between about 5 mil and about 25 mil.

3. The method of claim 1 , wherein the chamber component is a showerhead comprising an anodized Al base bonded to a SiC faceplate.

4. A chamber component for a manufacturing chamber comprising:
a body of the chamber component, the body comprising a surface comprising an unroughened surface region and a roughened surface region on the surface, the roughened surface region having a first surface roughness of about 120-240 μin and the unroughened surface region having a second surface roughness that is lower than the first surface roughness; and
a ceramic coating on the roughened surface region of the surface of the body and not on the unroughened surface region of the surface of the body, wherein the ceramic coating is a plasma sprayed coating that comprises Y 2 O 3 in a range between about 30 mol % to about 60 mol %, ZrO 2 in a range of above 0 mol % to below 9 mol %, and Al 2 O 3 in a range between about 35 mol % to about 63 mol %, the plasma resistant ceramic coating comprising a surface roughness of about 6-12 μin, wherein the plasma resistant ceramic coating comprises at least one of a tapered edge or a chamfered edge at an interface between the roughened surface region and the unroughened surface region.

5. The chamber component of claim 4 , wherein the ceramic coating has a thickness between about 5 mil and about 25 mil and a porosity of about 1.2-1.7%.

6. The chamber component of claim 4 , wherein the chamber component is selected from a group consisting of: a lid, a showerhead, a chamber liner, and a nozzle.

7. The chamber component of claim 4 , wherein the body comprises a metal portion that consists of at least one of aluminum, copper, or magnesium.

8. The chamber component of claim 4 , wherein the body comprises a ceramic selected from a group consisting of Y 2 O 3 (yttria), Y 4 Al 2 O 9 (YAM), Al 2 O 3 (alumina), Y 3 Al 5 O 12 (YAG), Quartz, YAlO 3 (YAP), SiC (silicon carbide), Si 3 N 4 (silicon nitride), AlN (aluminum nitride), ZrO 2 (zirconia), Al 2 O 3 (alumina), AlON (aluminum oxynitride), TiO 2 (titania), TiC (titanium carbide), ZrC (zirconium carbide), TiN (titanium nitride), TiCN (titanium carbon nitride), and Y 2 O 3 stabilized ZrO 2 (YSZ).

9. The chamber component of claim 4 , wherein the ceramic coating comprises Y 2 O 3 in a range between about 30 mol % to about 45 mol %, ZrO 2 in a range of above 0 mol % to below 9 mol %, and Al 2 O 3 in a range between about 42 mol % to about 63 mol %.

10. The method of claim 1 , further comprising:
heating the chamber component to a temperature of about 70-200 ° C. prior to performing the plasma spraying.

11. The method of claim 1 , further comprising performing the following prior to performing the plasma spraying:
cleaning the chamber component for up to 10 minutes using a deionized water bath that is ultrasonically agitated at a power of about 20 kW; and
subsequently cleaning the chamber component for up to 10 minutes using an acetone bath; and
subsequently cleaning the chamber component using the deionized water bath.

12. The method of claim 1 , further comprising:
mixing raw ceramic powders of the Y 2 O 3 , the Al 2 O 3 and the ZrO 2 , wherein the raw ceramic powders have a powder size of approximately 0.5-5.0 μm; and
calcinating the raw ceramic powders at a temperature of approximately 1200-1600 ° C. to form a calcinated ceramic powder, wherein the calcinated ceramic powder has a median size of about 15-25 μm.

13. The method of claim 1 , wherein the ceramic coating has a porosity of about 1.2-1.7%, has an adhesion strength of about 27-28 MPa, and comprises a cubic structure.

14. The method of claim 1 , wherein the ceramic coating has an erosion rate under an N 2 /H 2 chemistry of about 15-21 nm/hr, an erosion rate under an CH 3 /CF 4 chemistry of about 0.35-0.43 nm/hr, and an erosion rate under an CH 4 /Cl 2 chemistry of about 0.24-0.25 nm/hr.

15. The method of claim 1 , wherein the ceramic coating has a thermal shock resistance of about 8-20 MPa and a hardness of about 3-8 GPa.

16. The method of claim 11 , wherein the acetone bath is ultrasonically agitated at a power of up to about 20 kW.

17. The chamber component of claim 4 , wherein the ceramic coating has a breakdown voltage of about 680 V/mil.

18. The chamber component of claim 4 , wherein the ceramic coating has a cubic, minor amorphous, structure.

Assignees

• Applied Materials Inc

Inventors

• Sun Jennifer Y
• Kanungo Biraja P
• Cho Tom

Classifications

• C23C4/134

  Plasma spraying · CPC title

• Y10T428/131

  Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.] · CPC title

• C23C16/4404

  Coatings or surface treatment on the inside of the reaction chamber or on parts thereof · CPC title

• C04B41/5045

  Rare-earth oxides · CPC title

• Y10T428/26

  Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension · CPC title