Plasma erosion resistant rare-earth oxide based thin film coatings

Patent metadata

Field	Value
Publication number	US-10119188-B2
Application number	US-201715814597-A
Country	US
Kind code	B2
Filing date	Nov 16, 2017
Priority date	Jun 20, 2013
Publication date	Nov 6, 2018
Grant date	Nov 6, 2018

Abstract

An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y 3 Al 5 O 12 , Y 4 Al 2 O 9 , Er 2 O 3 , Gd 2 O 3 , Er 3 Al 5 O 12 , Gd 3 Al 5 O 12 and a ceramic compound comprising Y 4 Al 2 O 9 and a solid-solution of Y 2 O 3 —ZrO 2 .

First claim

What is claimed is:

1. An article comprising:
a body; and
a first conformal protective layer on at least one surface of the body, wherein the first conformal protective layer is a thin film having a thickness of approximately 0.5-20 microns that comprises a first ceramic selected from a group consisting of
Y 3 Al 5 O 12 having a hardness of approximately 8.5 GPa,
Er 2 O 3 having a hardness of approximately 5 GPa,
Er 3 Al 5 O 12 having a hardness of approximately 9 GPa, and
a ceramic compound comprising Y 4 Al 2 O 9 and a solid-solution of Y 2 O 3 —ZrO 2 having a hardness of approximately 7.825 GPa.

2. The article of claim 1 , wherein the first conformal protective layer comprises Er 2 O 3 , the first conformal protective layer having a crystalline structure with vertical cracks, a hardness of approximately 5 GPa, a surface roughness that matches an underlying surface roughness of the at least one surface, and a hermiticity of around 5.5E-9 cm 3 /s.

3. The article of claim 1 , wherein the first conformal protective layer comprises Er 3 Al 5 O 12 , the first conformal protective layer having an amorphous structure, a hardness of approximately 9 GPa, a surface roughness that matches an underlying surface roughness of the at least one surface, and a hermiticity of around 9.5E-10 cm 3 /s.

4. The article of claim 1 , wherein:
the article comprises a chamber component selected from a group consisting of a chamber lid, a nozzle, a showerhead base, a showerhead gas distribution plate (GDP), a chamber viewport, a process kit ring, a shield, a plasma screen, a flow equalizer, a chamber wall and a liner kit.

5. The article of claim 1 , further comprising:
a conformal protective layer stack on the at least one surface of the body, the conformal protective layer stack comprising at least the first conformal protective layer and a second conformal protective layer covering the first conformal protective layer, wherein the second conformal protective layer has a thickness of less than approximately 20 microns and comprises a second ceramic different from the first ceramic, the second ceramic selected from the group consisting of: Y 3 Al 5 O 12 , Y 4 Al 2 O 9 , Er 2 O 3 , Er 3 Al 5 O 12 , and a ceramic compound comprising Y 4 Al 2 O 9 and a solid-solution of Y 2 O 3 —ZrO 2 .

6. The article of claim 5 , wherein:
the first conformal protective layer in the conformal protective layer stack has an amorphous structure and comprises Y 3 Al 5 O 12 or Er 3 Al 5 O 12 ; and
the second conformal protective layer in the conformal protective layer stack has a crystalline or nano-crystalline structure and comprises Er 2 O 3 or the ceramic compound comprising Y 4 Al 2 O 9 and a solid-solution of Y 2 O 3 —ZrO 2 .

7. The article of claim 5 , wherein the body has a first coefficient of thermal expansion value, the first conformal protective layer has a second coefficient of thermal expansion value, and the second conformal protective layer has a third coefficient of thermal expansion value, wherein the second coefficient of thermal expansion value is between the first coefficient of thermal expansion value and the third coefficient of thermal expansion value.

8. The article of claim 1 , wherein the first conformal protective layer comprises a plurality of surface features that are not on the at least one surface, the plurality of surface features comprising at least one of a mesa, a channel, or a seal ring.

9. The article of claim 1 , wherein the first conformal protective layer comprises the ceramic compound comprising Y 4 Al 2 O 9 and a solid-solution of Y 2 O 3 —ZrO 2 , and wherein the first conformal protective layer has an erosion rate of about 3 nm per hour of exposure to a CH 4 /C 12 plasma chemistry and an erosion rate of about 35 nm per hour of exposure to an H 2 /NF 3 plasma chemistry.

10. The article of claim 1 , wherein the article comprises a viewport of quartz or sapphire, and wherein the viewport and the first conformal protective layer are transparent to optical signals transmitted through the viewport.

11. The article of claim 1 , wherein the first conformal protective layer has a thickness of 0.5-7.0 microns.

12. The article of claim 1 , wherein the body has a diameter of at least 12 inches, and wherein the at least one surface of the body has a curvature of less than about 50 microns over the body due to film stress associated with the first conformal protective layer.

13. The article of claim 1 , wherein the at least one surface comprises one or more first surface features that are also in the first conformal protective layer, and wherein the first conformal protective layer comprises one or more additional surface features that are not on the at least one surface.

14. The article of claim 1 , wherein the body comprises one or more holes, and wherein the first conformal protective layer does not plug the one or more holes.

15. The article of claim 1 , wherein the first conformal protective layer comprises Er 2 O 3 and the body comprises Al 2 O 3 , the article further comprising:
a transition layer between the conformal protective layer and the body, wherein the transition layer comprises Er 3 Al 5 O 12 .

16. The article of claim 1 , wherein the body comprises at least one of Al 2 O 3 , AlN, Al, anodized Al, Titanium, stainless steel, quartz, sapphire, Si or SiC.

17. The article of claim 1 , further comprising:
a second protective layer on the at least one surface of the body, wherein the second protective layer is a thick film having a thickness of greater than approximately 100 microns that comprises a second ceramic selected from a group consisting of Y 3 Al 5 O 12 , Y Al 2 O 9 , Y 2 O 3 , and the ceramic compound comprising Y 4 Al 2 O 9 and a solid-solution of Y 2 O 3 —ZrO 2 , wherein the first conformal protective layer covers the second protective layer.

18. The article of claim 1 , wherein a first roughness of the first conformal protective layer is approximately the same as a second roughness of the body.

19. The article of claim 1 , wherein the first conformal protective layer has an erosion resistance property that will cause it to change in average surface roughness (Ra) by not more than approximately 8 μin after 100 hours of exposure to CH 4 /C 12 plasma chemistry.

20. The article of claim 1 , wherein the term “approximately” with respect to the hardness of the first conformal protective layer means±less than 30%.

Assignees

• Applied Materials Inc

Inventors

• Sun Jennifer Y
• Kanungo Biraja P
• Firouzdor Vahid
• Cho Tom

Classifications

• C23C14/34

  Sputtering · CPC title

• C23C14/228

  Gas flow assisted PVD deposition · CPC title

• Y10T428/24355

  Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.] · CPC title

• Y10T428/24975

  No layer or component greater than 5 mils thick · CPC title

• C23C14/083

  of refractory metals or yttrium · CPC title