Apparatus for processing a wafer-shaped article
US-12538752-B2 · Jan 27, 2026 · US
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Brugger Michael patents
Brugger Michael is listed as an inventor on 24 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Brugger Michael |
| Total patents | 24 |
| First publication | Jan 20, 2015 |
| Latest publication | Jan 27, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus for processing a wafer-shaped article
US-2024304489-A1 · Sep 12, 2024 · US
Apparatus for processing a wafer
US-2023360952-A1 · Nov 9, 2023 · US
Apparatus for processing a wafer-shaped article
US-2023298928-A1 · Sep 21, 2023 · US
Ion implantation method, ion implantation apparatus and semiconductor device
US-11195695-B2 · Dec 7, 2021 · US
Ion Implantation Method, Ion Implantation Apparatus and Semiconductor Device
US-2019066977-A1 · Feb 28, 2019 · US
Method for implanting ions into a semiconductor substrate and an implantation system
US-10037887-B2 · Jul 31, 2018 · US
Method and apparatus for wafer wet processing
US-9997379-B2 · Jun 12, 2018 · US
Apparatus for liquid treatment of wafer shaped articles
US-9972514-B2 · May 15, 2018 · US
Spin chuck including edge ring
US-2018096879-A1 · Apr 5, 2018 · US
Recent patents
Latest publications not already listed above.
Apparatus for processing wafer-shaped articles
US-2018040502-A1 · Feb 8, 2018 · US
Apparatus for treating surfaces of wafer-shaped articles
US-9887120-B2 · Feb 6, 2018 · US
Apparatus for liquid treatment of wafer shaped articles
US-2017256433-A1 · Sep 7, 2017 · US
Method for Implanting Ions into a Semiconductor Substrate and an Implantation System
US-2017243747-A1 · Aug 24, 2017 · US
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
US-9685358-B2 · Jun 20, 2017 · US
Apparatus for treating surfaces of wafer-shaped articles
US-2017125281-A1 · May 4, 2017 · US
Method and apparatus for liquid treatment of wafer shaped articles
US-9536770-B2 · Jan 3, 2017 · US
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
US-2016118278-A1 · Apr 28, 2016 · US
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
US-9245777-B2 · Jan 26, 2016 · US
Grounded chuck
US-9190310-B2 · Nov 17, 2015 · US
Method and apparatus for liquid treatment of wafer shaped articles
US-9093482-B2 · Jul 28, 2015 · US
Method and apparatus for liquid treatment of wafer shaped articles
US-2015200123-A1 · Jul 16, 2015 · US
Device and method for treating wafer-shaped articles
US-8974632-B2 · Mar 10, 2015 · US
Device and method for wet treating plate-like-articles
US-8936832-B2 · Jan 20, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Ag | 20 |
| Brugger Michael | 4 |
| Infineon Technologies Ag | 4 |
| Tschinderle Ulrich | 1 |
| Gleissner Andreas | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7608 | 15 |
| H01L21/68728 | 11 |
| H10P72/0436 | 11 |
| H01L21/67115 | 10 |
| H10P72/0414 | 10 |