Method and apparatus for wafer wet processing
US-9997379-B2 · Jun 12, 2018 · US
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Brugger Michael patents
Brugger Michael holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Jan 20, 2015 |
| Latest publication | Jun 12, 2018 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Grounded chuck
US-9190310-B2 · Nov 17, 2015 · US
Device and method for treating wafer-shaped articles
US-8974632-B2 · Mar 10, 2015 · US
Device and method for wet treating plate-like-articles
US-8936832-B2 · Jan 20, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method and apparatus for wafer wet processing
US-9997379-B2 · Jun 12, 2018 · US
Grounded chuck
US-9190310-B2 · Nov 17, 2015 · US
Device and method for treating wafer-shaped articles
US-8974632-B2 · Mar 10, 2015 · US
Device and method for wet treating plate-like-articles
US-8936832-B2 · Jan 20, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P72/0414 | 3 |
| H01L21/67051 | 3 |
| H10P72/70 | 2 |
| H10P72/0424 | 2 |
| H01L21/6708 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 4 |
| Chemistry & Metallurgy | 1 |
| Physics | 1 |
| Cross-Sectional Technologies | 1 |