Ion source with coaxial gas conduit
US-2026066211-A1 · Mar 5, 2026 · US
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Becker Klaus patents
Becker Klaus is listed as an inventor on 28 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Becker Klaus |
| Total patents | 28 |
| First publication | Apr 27, 2017 |
| Latest publication | Mar 5, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Heterogeous negative ion source based upon hydrogen plasma
US-2025316448-A1 · Oct 9, 2025 · US
Thermoelectric control for a crucible for use with an ion source
US-2025259815-A1 · Aug 14, 2025 · US
Cyclotron having continuously variable energy output
US-12106925-B2 · Oct 1, 2024 · US
Drift tube electrode arrangement having direct current optics
US-12096548-B2 · Sep 17, 2024 · US
Shield for filament in an ion source
US-12046443-B2 · Jul 23, 2024 · US
Drift tube electrode arrangement having direct current optics
US-2024098871-A1 · Mar 21, 2024 · US
Cyclotron having continuously variable energy output
US-2023207247-A1 · Jun 29, 2023 · US
Shield For Filament In An Ion Source
US-2023162941-A1 · May 25, 2023 · US
Advanced sputter targets for ion generation
US-11542594-B2 · Jan 3, 2023 · US
Recent patents
Latest publications not already listed above.
Insertable target holder for solid dopant materials
US-11404254-B2 · Aug 2, 2022 · US
Advanced Sputter Targets For Ion Generation
US-2021238732-A1 · Aug 5, 2021 · US
Advanced sputter targets for ion generation
US-11008649-B2 · May 18, 2021 · US
Ion source with multiple configurations
US-10896799-B1 · Jan 19, 2021 · US
Apparatus and techniques for decelerated ion beam with no energy contamination
US-10692697-B2 · Jun 23, 2020 · US
Advanced Sputter Targets For Ion Generation
US-2020157675-A1 · May 21, 2020 · US
Ion source crucible for solid feed materials
US-10600611-B2 · Mar 24, 2020 · US
Insertable Target Holder For Solid Dopant Materials
US-2020090916-A1 · Mar 19, 2020 · US
Ion Source Crucible For Solid Feed Materials
US-2019180971-A1 · Jun 13, 2019 · US
Ion source for enhanced ionization
US-10290461-B1 · May 14, 2019 · US
Ion Source For Enhanced Ionization
US-2019122851-A1 · Apr 25, 2019 · US
Apparatus and techniques for decelerated ion beam with no energy contamination
US-2019051493-A1 · Feb 14, 2019 · US
Apparatus and techniques for decelerated ion beam with no energy contamination
US-10147584-B2 · Dec 4, 2018 · US
Apparatus and techniques for decelerated ion beam with no energy contamination
US-2018269033-A1 · Sep 20, 2018 · US
Ion source for multiple charged species
US-9818570-B2 · Nov 14, 2017 · US
Electrode, accelerator column and ion implantation apparatus including same
US-9807864-B1 · Oct 31, 2017 · US
Ion source for enhanced ionization
US-9691584-B1 · Jun 27, 2017 · US
Ion Source For Multiple Charged Species
US-2017117113-A1 · Apr 27, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 16 |
| Varian Semiconductor Equipment Ass Inc | 13 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/08 | 17 |
| H01J37/3171 | 15 |
| H01J2237/082 | 11 |
| H01J37/3435 | 8 |
| H01J27/08 | 6 |