Advanced sputter targets for ion generation

Patent metadata

Field	Value
Publication number	US-11008649-B2
Application number	US-201816191526-A
Country	US
Kind code	B2
Filing date	Nov 15, 2018
Priority date	Nov 15, 2018
Publication date	May 18, 2021
Grant date	May 18, 2021

Abstract

An advanced sputter target is disclosed. The advanced sputter target comprises two components, a porous carrier, and a metal material disposed within that porous carrier. The porous carrier is designed to be a high porosity, open cell structure such that molten material may flow through the carrier. The porous carrier also provides structural support for the metal material. The cell sizes of the porous carrier are dimensioned such that the capillary action and surface tension prohibits the metal material from spilling, dripping, or otherwise exiting the porous carrier. In some embodiments, the porous carrier is an open cell foam, a weave of strands or stacked meshes.

First claim

What is claimed is:

1. An ion source for generating an ion beam comprising a metal material, comprising:
an arc chamber having a first end, an opposite second end and walls connecting the first end and the second end, wherein one of the walls comprises an extraction aperture;
a cathode disposed at the first end; and
a sputter target disposed within the arc chamber, the sputter target comprising a porous carrier, and a metal material disposed within the porous carrier.

2. The ion source of claim 1 , wherein the sputter target is disposed against the second end.

3. The ion source of claim 2 , wherein the sputter target functions as a repeller.

4. The ion source of claim 1 , wherein the sputter target is disposed against one of the walls.

5. The ion source of claim 1 , wherein the sputter target serves as a liner and is disposed against at least one of the walls.

6. The ion source of claim 1 , further comprising a target holder, wherein the sputter target is retained by the target holder.

7. The ion source of claim 1 , wherein the porous carrier comprises an open cell foam, a weave of strands or stacked meshes.

8. A physical vapor deposition apparatus, comprising:
a physical vapor deposition (PVD) chamber;
a cathode disposed in the PVD chamber, wherein the cathode is biased using a cathode power supply; and
a sputter target disposed within the PVD chamber, the sputter target comprising a porous carrier, and a metal material disposed within the porous carrier, and in communication with the cathode power supply.

9. The physical vapor deposition apparatus of claim 8 , wherein the porous carrier comprises an open cell foam, a weave of strands or stacked meshes.

Assignees

• Applied Materials Inc

Inventors

• Wright Graham
• Becker Klaus

Classifications

• H01J37/3429

  Plural materials · CPC title

• H01J37/3435

  Target holders (includes backing plates and endblocks) · CPC title

• C23C14/3428

  using liquid targets · CPC title

• H01J37/3426 Primary

  Material · CPC title

• C23C14/3414 Primary

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title