Replaceable electrostatic chuck outer ring for edge arcing mitigation
US-12562353-B2 · Feb 24, 2026 · US
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Babayan Steven E patents
Babayan Steven E is listed as an inventor on 53 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Babayan Steven E |
| Total patents | 53 |
| First publication | Jan 28, 2016 |
| Latest publication | Feb 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate carrier with array of independently controllable heater elements
US-12406865-B2 · Sep 2, 2025 · US
Tunable temperature controlled substrate support assembly
US-12334385-B2 · Jun 17, 2025 · US
Wafer edge ring lifting solution
US-2024429088-A1 · Dec 26, 2024 · US
Tunable temperature controlled substrate support assembly
US-2024321620-A1 · Sep 26, 2024 · US
Wafer edge ring lifting solution
US-12094752-B2 · Sep 17, 2024 · US
Tunable temperature controlled substrate support assembly
US-12009244-B2 · Jun 11, 2024 · US
In-situ apparatus for semiconductor process module
US-11887879-B2 · Jan 30, 2024 · US
In-situ optical chamber surface and process sensor
US-11735401-B2 · Aug 22, 2023 · US
Method and apparatus for determining a position of a ring within a process kit
US-11721569-B2 · Aug 8, 2023 · US
Recent patents
Latest publications not already listed above.
Replaceable electrostatic chuck outer ring for edge arcing mitigation
US-2023118651-A1 · Apr 20, 2023 · US
Azimuthally tunable multi-zone electrostatic chuck
US-11622419-B2 · Apr 4, 2023 · US
Semiconductor processing with cooled electrostatic chuck
US-11569114-B2 · Jan 31, 2023 · US
Method and apparatus for determining a position of a ring within a process kit
US-2022406635-A1 · Dec 22, 2022 · US
Thermal repeatability and in-situ showerhead temperature monitoring
US-11508558-B2 · Nov 22, 2022 · US
Wafer edge ring lifting solution
US-2022319904-A1 · Oct 6, 2022 · US
Cryogenic electrostatic chuck
US-11437261-B2 · Sep 6, 2022 · US
Semiconductor processing with cooled electrostatic chuck
US-2022262664-A1 · Aug 18, 2022 · US
Wafer edge ring lifting solution
US-11393710-B2 · Jul 19, 2022 · US
Cryogenic electrostatic chuck
US-11373893-B2 · Jun 28, 2022 · US
In-situ optical chamber surface and process sensor
US-2021398785-A1 · Dec 23, 2021 · US
In-situ apparatus for semiconductor process module
US-2021351063-A1 · Nov 11, 2021 · US
Substrate carrier with array of independently controllable heater elements
US-2021335631-A1 · Oct 28, 2021 · US
In-situ optical chamber surface and process sensor
US-11114286-B2 · Sep 7, 2021 · US
In-situ apparatus for semiconductor process module
US-11075105-B2 · Jul 27, 2021 · US
Cryogenic electrostatic chuck
US-2021082730-A1 · Mar 18, 2021 · US
In-situ optical chamber surface and process sensor
US-2020321201-A1 · Oct 8, 2020 · US
Thermal repeatability and in-situ showerhead temperature monitoring
US-2020227242-A1 · Jul 16, 2020 · US
Cryogenic electrostatic chuck
US-2020185248-A1 · Jun 11, 2020 · US
Tunable temperature controlled substrate support assembly
US-2020152500-A1 · May 14, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 53 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/72 | 34 |
| H10P72/722 | 26 |
| H10P72/0432 | 26 |
| H10P72/0602 | 23 |
| H01L21/6833 | 23 |