Tunable temperature controlled substrate support assembly

Patent metadata

Field	Value
Publication number	US-12334385-B2
Application number	US-202418679357-A
Country	US
Kind code	B2
Filing date	May 30, 2024
Priority date	Jul 23, 2014
Publication date	Jun 17, 2025
Grant date	Jun 17, 2025

Abstract

Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heating assembly. The substrate support assembly comprises a body having a substrate support surface and a lower surface, one or more main resistive heaters disposed in the body, a plurality of spatially tunable heaters disposed in the body, and a spatially tunable heater controller coupled to the plurality of spatially tunable heaters, the spatially tunable heater controller configured to independently control an output one of the plurality of spatially tunable heaters relative to another of the plurality of spatially tunable heaters.

First claim

We claim:

1. A substrate support assembly, comprising:
a body having a substrate support surface and a lower surface;
a cooling base coupled to the lower surface of the body and having a slot formed therethrough;
a plurality of main resistive heaters disposed in the body;
a plurality of spatially tunable heaters disposed in the body between the substrate support surface and the plurality of main resistive heaters, wherein the plurality of spatially tunable heaters includes thirty or more independently controlled spatially tunable heaters and are configured to provide a lower power output than the main resistive heaters, and wherein each of the plurality of spatially tunable heaters are coupled to a common negative power lead;
a power cable having a plurality of high density conductors, the power cable coupled to each of the plurality of spatially tunable heaters, the power cable extending through the slot formed through the cooling base;
a control cable, wherein the control cable extends through the slot formed through the cooling base and is coupled to the spatially tunable heaters to manage an on/off state for each spatially tunable heater; and
a spatially tunable heater controller coupled by the power cable and the control cable to each of the spatially tunable heaters, the spatially tunable heater controller configured to independently control an output of one of the plurality of spatially tunable heaters relative to another one of the plurality of spatially tunable heaters.

2. The substrate support assembly of claim 1 further comprising:
a single RF filter coupled to the power cable between the spatially tunable heater controller and the plurality of spatially tunable heaters.

3. The substrate support assembly of claim 1 , wherein the negative power lead is coupled to the plurality of the main resistive heaters.

4. The substrate support assembly of claim 1 , wherein the negative power lead is disposed in the power cable.

5. The substrate support assembly of claim 1 , wherein the negative power lead is separate from the power cable.

6. The substrate support assembly of claim 1 , further comprising:
one or more temperature sensors spatially tunable heater controller, wherein the temperature sensors are configured to provide a temperature profile of the substrate support surface to the spatially tunable heater controller.

7. The substrate support assembly of claim 1 , further comprising:
a switch operable by the control cable, wherein the switch operates the on/off state for power to each of the plurality of spatially tunable heaters; and
an optical converter coupling the spatially tunable heater controller to an outside controller, wherein the optical converter is configured to decouple the outside controller from RF energy.

8. The substrate support assembly of claim 7 , wherein the control cable provide signals to control the state of the switch.

9. The substrate support assembly of claim 7 , wherein the control cable provides signals to instruct the switch to allow 90% of the power to pass therethrough.

10. The substrate support assembly of claim 7 wherein the control cable includes a second control cable having a separate optical controller for managing a set number of spatially tunable heaters individually.

Assignees

• Applied Materials Inc

Inventors

• Parkhe Vijay D
• Babayan Steven E
• Makhratchev Konstantin
• Guo Zhiqiang
• Sommer Phillip R
• Marohl Dan A

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H05B1/0233

  for semiconductors manufacturing · CPC title