Tunable temperature controlled substrate support assembly

Patent metadata

Field	Value
Publication number	US-12009244-B2
Application number	US-202016741330-A
Country	US
Kind code	B2
Filing date	Jan 13, 2020
Priority date	Jul 23, 2014
Publication date	Jun 11, 2024
Grant date	Jun 11, 2024

Abstract

Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heating assembly. The substrate support assembly comprises a body having a substrate support surface and a lower surface, one or more main resistive heaters disposed in the body, a plurality of spatially tunable heaters disposed in the body, and a spatially tunable heater controller coupled to the plurality of spatially tunable heaters, the spatially tunable heater controller configured to independently control an output one of the plurality of spatially tunable heaters relative to another of the plurality of spatially tunable heaters.

First claim

We claim:

1. A method for controlling a temperature of a support surface on a substrate support assembly, the method comprising:
applying power to a main resistive heater formed in a substrate support wherein the power is supplied to achieve a desired temperature profile for the support surface;
measuring the temperature profile of the substrate support surface with one or more temperature sensors;
comparing the temperature profile to a desired temperature profile;
creating a temperature profile map for the support surface in response to the comparison of the temperature profile to the desired temperature map; and
controlling power to a plurality of spatially tunable heaters in accordance with the temperature profile map, wherein the spatially tunable heaters are coupled through a tuning heater controller to a single power supply, the single power supply providing power to each combination of spatially tunable heaters, wherein each combination of spatially tunable heaters are individually and independently controlled with respect to every other spatially tunable heater by the tuning heater controller.

2. The method of claim 1 wherein the one or more temperature sensors provides temperature feedback information to the tuning heater controller.

3. The method of claim 2 further comprising:
controlling the power applied by the main heater power source to the main resistive heater, the operations of a cooling base, and the power applied by a tuning heater power source to the spatially tunable heaters with the tuning heater controller.

4. The method of claim 1 wherein the spatially tunable heaters provide localized adjustments to the temperature profile of the substrate support surface.

5. The method of claim 4 wherein the spatially tunable heaters reduce variations in the temperature profile to about +/−0.3 degrees Celsius.

6. The method of claim 1 , wherein the tuning heater controller simultaneously provides power to two or more spatially tunable heaters at different overlapping time intervals.

7. The method of claim 1 wherein the temperature profile map correlates the temperature to the power distribution curve for each spatially tunable heater.

8. The method of claim 7 wherein the tuning heater controller comprises:
an electrical controller, wherein the electrical controller is configured to provide individually controllable power to each spatially tunable heater; and
an optical controller optically connected to an external controller and configured to transmit instructions to the electrical controller for powering each spatially tunable heater.

9. The method of claim 8 wherein the logic is in the optical controller of the tuning heater controller.

10. The method of claim 8 wherein a fiber optic interface coupling the optical controller to the electrical controller wherein the optical interface is not subject to electromagnetic interference or radio frequency (RF) energy.

11. The method of claim 10 , wherein fiber optic interface is a fiber optic cable.

12. The method of claim 8 , wherein the electrical controller further has an optical converter is coupled to the optical controller, wherein the optical converter is configured to provide signals controlling the function of the spatially tunable heaters from the optical controller.

13. The method of claim 12 , wherein the electrical controller further has a plurality of switches, wherein each switch accepts a positive power lead to control individual spatially tunable heaters.

14. The method of claim 13 further comprising:
managing the switches by the optical controller via a fiber optic interface to the electrical controller.

15. The method of claim 1 wherein, wherein the tuning heater controller has an RF filter isolating the controller from the tunable heaters.

Assignees

• Applied Materials Inc

Inventors

• Parkhe Vijay D
• Babayan Steven E
• Makhratchev Konstantin
• Guo Zhiqiang
• Sommer Phillip R
• Marohl Dan A

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H05B1/0233

  for semiconductors manufacturing · CPC title