Multi-Column Scanning Electron Microscopy System
US-2018358200-A1 · Dec 13, 2018 · US
for centering, aligning or positioning of ray or beam
for centering, aligning or positioning of ray or beam · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H01J37/1471 |
| Official title | {for centering, aligning or positioning of ray or beam} |
| Display label | for centering, aligning or positioning of ray or beam |
| Total patents | 386 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 19 |
| 2016 | 15 |
| 2017 | 17 |
| 2018 | 27 |
| 2019 | 45 |
| 2020 | 46 |
| 2021 | 42 |
| 2022 | 37 |
| 2023 | 44 |
| 2024 | 39 |
| 2025 | 47 |
| 2026 | 8 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Low profile extraction electrode assembly
US-10153127-B1 · Dec 11, 2018 · US
Wafer temperature control with consideration to beam power input
US-10128084-B1 · Nov 13, 2018 · US
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
US-10115568-B2 · Oct 30, 2018 · US
Charged particle beam apparatus
US-2018277333-A1 · Sep 27, 2018 · US
Multi charged particle beam writing apparatus and adjusting method for multi charged particle beam writing apparatus
US-2018247788-A1 · Aug 30, 2018 · US
Electron Source Architecture for a Scanning Electron Microscopy System
US-2018240640-A1 · Aug 23, 2018 · US
Multi-Column Scanning Electron Microscopy System
US-2018226219-A1 · Aug 9, 2018 · US
Charged Particle Beam Apparatus, Alignment Method of Charged Particle Beam Apparatus, Alignment Program, and Storage Medium
US-2018108512-A1 · Apr 19, 2018 · US
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring
US-9852889-B1 · Dec 26, 2017 · US
Multi charged particle beam exposure method, and multi charged particle beam exposure apparatus
US-2017352520-A1 · Dec 7, 2017 · US
Low profile extraction electrode assembly
US-9818575-B2 · Nov 14, 2017 · US
Blanking device for multi-beam of charged particle writing apparatus using multi-beam of charged particle and defective beam blocking method for multi-beam of charged particle
US-9805905-B2 · Oct 31, 2017 · US
Beam Alignment Method and Electron Microscope
US-2017301507-A1 · Oct 19, 2017 · US
Techniques and apparatus for manipulating an ion beam
US-9793087-B2 · Oct 17, 2017 · US
Electron emitter device with integrated multi-pole electrode structure
US-9793089-B2 · Oct 17, 2017 · US
Method and System for Charge Control for Imaging Floating Metal Structures on Non-Conducting Substrates
US-2017287675-A1 · Oct 5, 2017 · US
Method of Aberration Correction and Charged Particle Beam System
US-2017236681-A1 · Aug 17, 2017 · US
Multi charged particle beam writing method, and multi charged particle beam writing apparatus
US-9691585-B2 · Jun 27, 2017 · US
Charged particle optical apparatus for through-the lens detection of particles
US-2017154752-A1 · Jun 1, 2017 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC H01J37/1471?
- CPC H01J37/1471 is the Cooperative Patent Classification code for “for centering, aligning or positioning of ray or beam.”
- How many patents are filed under CPC H01J37/1471 (for centering, aligning or positioning of ray or beam)?
- Our database includes 386 publications tagged with this CPC code.
- Is patent activity under CPC H01J37/1471 growing?
- Publication counts under this code: 39 in 2024 vs 47 in 2025 (latest complete years).