Electron emitter device with integrated multi-pole electrode structure

Patent metadata

Field	Value
Publication number	US-9793089-B2
Application number	US-201414485588-A
Country	US
Kind code	B2
Filing date	Sep 12, 2014
Priority date	Sep 16, 2013
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

A field emission device comprises one or more emitter elements, each having a high aspect ratio structure with a nanometer scaled cross section; and one or more segmented electrodes, each surrounding one of the one or more emitters. Each of the one or more segmented electrodes has multiple electrode plates. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

First claim

What is claimed is:

1. A field emission device, comprising:
one or more emitter elements formed on a substrate, each element having a high aspect ratio structure with a nanometer scale cross section; and
one or more segmented electrodes formed on the substrate, each electrode surrounding a corresponding one of the one or more emitter elements, wherein each of the one or more segmented electrodes includes multiple electrode plates in a number twice that is a number of multipole moments to be corrected, wherein independent voltages are applied to each of the multiple electrode plates through conductive vias formed through the substrate and isolated from the substrate and from other conductive vias by an insulating material and, wherein the one or more segmented electrodes are configured as a steering element to provide beam steering control.

2. The device of claim 1 , wherein the one or more segmented electrodes are provided behind tips of corresponding emitters.

3. The device of claim 1 , wherein the one or more segmented electrodes are provided proximate to tips of corresponding emitters within a distance of two emitter lengths.

4. The device of claim 1 , wherein each of the one or more emitters are in a length between about 100 nanometers and about 1 millimeter and a cross-sectional dimension between about 10 nanometers (nm) and about 1 micron (μm).

5. The device of claim 1 , wherein the one or more emitter elements are nanotubes.

6. The device of claim 1 , wherein the electrode plates are electrically isolated from each other.

7. The device of claim 1 , wherein the one or more segmented electrodes have 4, 8, 12 or 16 electrode plates.

8. The device of claim 1 , wherein each of the one or more emitter elements is formed in a cavity of the substrate and the corresponding one of the one or more segmented electrodes is formed on a top surface of the substrate.

9. A method, comprising:
forming one or more emitter elements on a substrate, wherein each of the one or more emitter elements has a high aspect ratio structure with a nanometer scale cross section; and
forming one or more segmented electrodes on the substrate, each surrounding one of the one or more emitter elements, wherein each of the one or more segmented electrodes has multiple electrode plate in a number twice a number of multipole moments to be corrected, wherein independent voltages are applied to the multiple electrode plates through conductive vias formed through the substrate and isolated from the substrate and from other conductive vias by an insulating material and, wherein the one or more segmented electrodes are configured as a steering element to provide beam steering control.

10. The method of claim 9 , wherein the one or more segmented electrodes are formed behind tips of the one or more emitter elements.

11. The method of claim 9 , wherein forming the one or more segmented electrodes proximate to tips of corresponding emitters within a distance of two emitter lengths.

12. The method of claim 9 , wherein each of the one or more emitter elements is formed in a cavity of the substrate and the corresponding one of the one or more segmented electrodes is formed on a top surface of the substrate.

13. The method of claim 9 , further comprising forming a barrier layer at locations of the one or more emitter elements between the one or more emitter elements and the substrate.

14. A system comprising:
a field emission device comprising:
one or more emitter elements formed on a substrate, each element having a high aspect ratio structure with a nanometer scale cross section; and
one or more segmented electrodes formed on the substrate, each electrode surrounding a corresponding one of the one or more emitter elements, wherein each of the one or more segmented electrodes includes multiple electrode plates in a number twice a number of multipole moments to be corrected, wherein independent voltages are applied to the multiple electrode plates through conductive vias formed through the substrate and isolated from the substrate and from other conductive vias by an insulating material and, wherein the one or more segmented electrodes are configured as a steering element to provide beam steering control; and

an electron optical column configured to form electrons emerging from the one or more emitter elements into one or more electron beams and image the one or more electron beams onto a target.

15. The system of claim 14 , wherein the one or more segmented electrodes are provided behind tips of corresponding emitters, whereby the tips of the corresponding emitters are located between the one or more segmented electrodes and one or more electron optics elements of the electron optical column downstream of the tips.

16. The system of claim 14 , further comprising a secondary particle detector configured to detect secondary particles generated as a result of an interaction between the target and the one or more electron beams and generate a signal corresponding to a flux of the secondary particles at the secondary particle detector.

17. The system of claim 16 , further comprising an image generator configured to generate one or more images of the target from the signal corresponding to the flux of the secondary particles at the secondary particle detector.

18. The system of claim 16 , wherein the system is configured to operate as a scanning electron microscope.

19. The system of claim 16 , wherein system is configured to perform a line scan of a primary beam of electrons across the sample in a first direction in conjunction with translation of the sample in a second direction that is different from the first direction.

20. The system of claim 19 , further comprising an image generator configured to produce an image of the sample from the signal produced by the secondary particle detector in conjunction with translation of the sample in a second direction that is different from the first direction.

21. The system of claim 14 , wherein the one or more emitter elements are nanotubes.

22. The system of claim 14 , wherein the one or more segmented electrodes have 4, 8, 12 or 16 electrode plates.

23. The system of claim 14 , wherein the one or more segmented electrodes have four or more electrode plates, wherein each electrode plate of the four or more electrode plates is configured such that separate voltages may be applied independently to each electrode plate.

24. The method of claim 14 , wherein each of the one or more emitter elements is formed in a cavity of the substrate and the corresponding one of the one or more segmented electrodes is formed on a top surface of the substrate.

Assignees

• Kla Tencor Corp

Inventors

• Plettner Thomas
• Nasser-Ghodsi Mehran

Classifications

• H01J2237/06375

  Arrangement of electrodes · CPC title

• H01J2203/0216

  characterised by the form or structure · CPC title

• H01J37/285

  Emission microscopes, e.g. field-emission microscopes · CPC title

• Y10S977/842

  for carbon nanotubes or fullerenes · CPC title

• H01J37/1471

  for centering, aligning or positioning of ray or beam · CPC title