Structured Illumination for Contrast Enhancement in Overlay Metrology
US-2017307523-A1 · Oct 26, 2017 · US
Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00)
Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00) · Cooperative Patent Classification (CPC)
Computing, optics, measurement, and control technologies.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | G03F9/00 |
| Official title | Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00) |
| Display label | Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00) |
| Total patents | 234 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is declining.
| Year | Patents |
|---|---|
| 2015 | 32 |
| 2016 | 24 |
| 2017 | 32 |
| 2018 | 26 |
| 2019 | 27 |
| 2020 | 36 |
| 2021 | 12 |
| 2022 | 16 |
| 2023 | 10 |
| 2024 | 10 |
| 2025 | 6 |
| 2026 | 3 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Apparatus for processing a substrate on a support body
US-9701104-B2 · Jul 11, 2017 · US
Method and apparatus for an electromagnetic emission based imaging system
US-9697986-B2 · Jul 4, 2017 · US
Position Measurement with Illumination Profile having Regions Confined to Peripheral Portion of Pupil
US-2017160075-A1 · Jun 8, 2017 · US
Positioning apparatus, lithography apparatus, and article manufacturing method
US-9523569-B2 · Dec 20, 2016 · US
Method for manufacturing transistor
US-2016359114-A1 · Dec 8, 2016 · US
Measuring system
US-9482968-B2 · Nov 1, 2016 · US
Optical image capturing module, aligning method, and observing method
US-9459460-B2 · Oct 4, 2016 · US
Overlay sampling methodology
US-9442391-B2 · Sep 13, 2016 · US
Web longitudinal position sensor
US-9440812-B2 · Sep 13, 2016 · US
Exposure apparatus, method of controlling the same, and alignment method for exposure
US-9437818-B2 · Sep 6, 2016 · US
Alignment system
US-2016252753-A1 · Sep 1, 2016 · US
Maskless lithography for web based processing
US-2016238941-A1 · Aug 18, 2016 · US
Lithography apparatus, control method therefor, and method of manufacturing article
US-2016231648-A1 · Aug 11, 2016 · US
Roll to roll light exposure system
US-2016209756-A1 · Jul 21, 2016 · US
Position determination in a lithography system using a substrate having a partially reflective position mark
US-9395635-B2 · Jul 19, 2016 · US
Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer
US-9395636-B2 · Jul 19, 2016 · US
Image processing-based lithography system and method of coating target object
US-2016145744-A1 · May 26, 2016 · US
Method and device for active wedge error compensation between two objects that can be positioned substantially to parallel to each other
US-9329473-B2 · May 3, 2016 · US
Image processing-based lithography system and method of coating target object
US-9323159-B2 · Apr 26, 2016 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC G03F9/00?
- CPC G03F9/00 is the Cooperative Patent Classification code for “Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00).”
- How many patents are filed under CPC G03F9/00 (Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00))?
- Our database includes 234 publications tagged with this CPC code.
- Is patent activity under CPC G03F9/00 growing?
- Publication counts under this code: 10 in 2024 vs 6 in 2025 (latest complete years).