Exposure apparatus, method of controlling the same, and alignment method for exposure

Patent metadata

Field	Value
Publication number	US-9437818-B2
Application number	US-201313907792-A
Country	US
Kind code	B2
Filing date	May 31, 2013
Priority date	Dec 14, 2012
Publication date	Sep 6, 2016
Grant date	Sep 6, 2016

Abstract

An exposure apparatus capable of preventing a reduction in its accuracy due to, for example, the influence of aging or the influence of heat is disclosed. Also disclosed is a method of controlling the same, and an alignment method for exposure. In one aspect, the exposure apparatus includes a main stage for adjusting a position of a substrate, a beam irradiation unit for irradiating a beam onto a mask, and a beam monitoring unit having a position fixed with respect to the main stage, and for recognizing the beam emitted from the beam irradiation unit and passed through one pattern of the mask.

First claim

What is claimed is:

1. An exposure apparatus, comprising:
a main stage configured to adjust the position of a substrate, the substrate having an alignment key;
a mask stage configured to adjust the position of a mask, the mask having an alignment mark;
an alignment configured to check the position of the alignment key;
an alignment mark monitoring unit configured to check the position of the alignment mark;
a beam irradiation unit configured to irradiate a beam of light onto a mask;
a beam monitoring unit having a position fixed with respect to the main stage, and configured to recognize the beam emitted from the beam irradiation unit and passed through openings in the mask so as to form a particular pattern, the beam monitoring unit being separated from the alignment mark monitoring unit; and
a control unit configured to output a substrate position adjustment signal indicative of the position of the main stage so as to adjust the position of the substrate to account for changes in alignment of an optical unit in the beam irradiation unit or transformation of a frame due to heat generated during exposure, even though the substrate is accurately positioned with respect to the alignment key monitoring unit and the mask is accurately positioned with respect to the alignment mark monitoring unit.

2. The exposure apparatus of claim 1 , wherein the control unit outputs the substrate position adjustment signal based on information about the beam obtained by the beam monitoring unit.

3. The exposure apparatus of claim 2 , wherein the control unit is configured to check a monitored position of the beam incident on the beam monitoring unit, wherein the monitored position is based on the information about the beam obtained by the beam monitoring unit, and wherein the control unit outputs the substrate position adjustment signal based on the difference between the monitored position and a preset reference position.

4. The exposure apparatus of claim 3 , wherein the substrate position adjustment signal output from the control unit comprises:
a first position adjustment signal used to permit the alignment key of the substrate to be disposed at a preset alignment position with respect to the alignment key monitoring unit; and
a second position adjustment signal corresponding to an adjustment vector having the preset reference position as a start point and having the monitored position as an end point.

5. The exposure apparatus of claim 3 , wherein the substrate position adjustment signal output from the control unit corresponds to a sum of a base vector having a detected position of the alignment key of the substrate, which is obtained by the alignment key monitoring unit, as a start point and having the preset alignment position with respect to the beam irradiation unit as an end point, and an adjustment vector having the preset reference position as a start point and having the monitored position as an end point.

6. The exposure apparatus of claim 1 , further comprising a mask stage for adjusting the position of the mask, wherein the control unit outputs a mask position adjustment signal indicative of the position of the mask stage so as to adjust the position of the mask based on information about the beam obtained by the beam monitoring unit.

7. The exposure apparatus of claim 6 , wherein the control unit is configured to check a monitored position of the beam incident on the beam monitoring unit based on the information about the beam obtained by the beam monitoring unit, and wherein the control unit outputs the mask position adjustment signal based on a difference between the monitored position and a preset reference position.

8. The exposure apparatus of claim 1 , wherein the control unit outputs an alignment key monitoring unit position adjustment signal configured to adjust the position of the alignment key monitoring unit.

9. The exposure apparatus of claim 8 , wherein the control unit outputs the alignment key monitoring unit position adjustment signal based on information about the beam obtained by the beam monitoring unit.

10. The exposure apparatus of claim 9 , wherein the control unit is configured to check a monitored position of the beam incident on the beam monitoring unit based on the information about the beam obtained by the beam monitoring unit, and wherein the control unit outputs the alignment key monitoring unit position adjustment signal based on the difference between the monitored position and a preset reference position.

11. The exposure apparatus of claim 10 , wherein the alignment key monitoring unit position adjustment signal output from the control unit corresponds to an adjustment vector having the preset reference position as a start point and having the monitored position as an end point.

12. A method of controlling an exposure apparatus, the method comprising:
mounting a substrate on either of a main stage or a substrate mounting unit having a position that is adjustable by the main stage;
obtaining information about the position of an alignment key on the substrate by an alignment key monitoring unit;
adjusting the position of the substrate such that the alignment key is placed at a preset position;
obtaining information about the position of an alignment mark on a mask by an alignment mark monitoring unit;
adjusting the position of the mask such that the alignment mark is placed at a preset position;
obtaining information about a beam of light emitted from a beam irradiation unit and passed through openings in a mask so as to form a particular pattern, by a beam monitoring unit having a position fixed with respect to the main stage, the beam monitoring unit being separated from the alignment mark monitoring unit;
checking a monitored position of the beam incident on the beam monitoring unit based on the information about the beam obtained by the beam monitoring unit, and checking the difference between the monitored position and a preset reference position; and
additionally adjusting the position of the substrate by outputting a substrate position adjustment signal to the main stage based on the difference between the monitored position and the preset reference position to account for changes in alignment of an optical unit in the beam irradiation unit or transformation of a frame due to heat generated during exposure, even though the substrate is accurately positioned with respect to the alignment key monitoring unit and the mask is accurately positioned with respect to the alignment mark monitoring unit.

13. The method of claim 12 , wherein the additionally adjusting of the position of the substrate comprises:
additionally adjusting the position of the substrate by an adjustment vector having the preset reference position as a start point and having the monitored position as an end point.

14. The method of claim 12 , wherein the additionally adjusting of the position of the substrate comprises additionally adjusting the position of the substrate based on an ultimate vector corresponding to the sum of a base vector having a detected position of the alignment key of the substrate as a start point and having the preset alignment position with respect to the beam irradiation unit as an end point, and an adjustment vector having the preset reference position as a start point and having the monitored position as an end point.

15. A method of controlling an exposure apparatus, the method comprising:
mounting a mask on a mask stage;
obtaining information about the position of an alignment key on a substrate by an alignment key monitoring unit;
adjusting the position of the substrate suc

Assignees

• Samsung Display Co Ltd

Inventors

• Jeun Jin-Hong
• Lee Seok-Joo
• Yeon Jung-Hun

Classifications

• H01L51/0013 Primary

  Electricity · mapped topic

• G03F9/7019

  Calibration · CPC title

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F9/00

  Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00) · CPC title

• H10K71/18 Primary

  using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet · CPC title