Roll to roll light exposure system

Patent metadata

Field	Value
Publication number	US-2016209756-A1
Application number	US-201514933896-A
Country	US
Kind code	A1
Filing date	Nov 5, 2015
Priority date	Jan 15, 2015
Publication date	Jul 21, 2016
Grant date	—

Abstract

Embodiments of the present invention provide a roll-to-roll exposure system having a reference mark array and alignment scope units for precisely measuring the position and orientation of an object on a flexible multilayered circuit film. A roll-to-roll exposure system according to an exemplary embodiment of the present invention includes: a plurality of rolls configured to move a flexible multilayered circuit film having an object positioned thereon; alignment scope units positioned so as to be spaced apart from each other and proximate to the rolls; and at least one exposure unit positioned so as to be spaced proximate to the rolls and spaced apart from sides of the alignment scope units, in which one of the rolls has a reference mark array on its surface.

First claim

What is claimed is:

1 . A roll-to-roll exposure system comprising:
a plurality of rolls configured to move a flexible multilayered circuit film having an object positioned thereon; alignment scope units positioned so as to be spaced apart from each other and proximate to the rolls; and at least one exposure unit positioned so as to be spaced proximate to the rolls and spaced apart from sides of the alignment scope units, wherein one of the rolls has a reference mark array on its surface.

2 . The system of claim 1 , wherein:
the rolls have a degree of freedom in a rotational direction, and the alignment scope units have degrees of freedom in a longitudinal direction of the roll and the rotational direction.

3 . The system of claim 2 , wherein:
the alignment scope units are arranged along the longitudinal direction of the rolls.

4 . The system of claim 1 , wherein:
the reference mark array comprises engravings or reference marks affixed to the roll.

5 . A roll-to-roll exposure system comprising:
two rolls configured to move a flexible multilayered circuit film that has an object positioned thereon; a table disposed between the rolls and positioned so as to fix and support the flexible multilayered circuit film; alignment scope units disposed over the table; and at least one exposure unit spaced proximate to the table and apart from sides of the alignment scope units, wherein the table has at least one reference mark array on its surface.

6 . The system of claim 5 , wherein:
the reference mark array comprises engravings or reference marks affixed to the table.

7 . The system of claim 6 , wherein:
the table has a degree of freedom in a width direction (x-axis direction) of the flexible multilayered circuit film and a degree of freedom in a movement direction (y-axis direction) of the flexible multilayered circuit film, and the alignment scope units have a plurality of degrees of freedom in the width direction (x-axis direction) and the movement direction (y-axis direction).

8 . The system of claim 7 , wherein:
the rolls are configured to move substantially in synchronization with the table such that the table has the degree of freedom in the y-axis direction, and a y-axis directional stroke (Yst) of the table is determined according to Yst=rθ 2 , where r is a radius of the rolls and θ 2 is an angle of rotation of the rolls.

9 . The system of claim 8 , wherein:
the rolls and the table each have a degree of freedom in the x-axis direction and so that the rolls are configured to move substantially in synchronization with the table.

Assignees

• Samsung Display Co Ltd

Inventors

• Chang Jae Hyuk
• Yun Sang Hyun
• Lee Ki Beom
• Lee Hi Kuk

Classifications

• G03F7/70141 Primary

  Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system · CPC title

• G03F7/22 Primary

  Exposing sequentially with the same light pattern different positions of the same surface {(G03F7/70 takes precedence)} · CPC title

• G03F9/00

  Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F9/7003 Primary

  Alignment type or strategy, e.g. leveling, global alignment · CPC title

• G03F7/70791

  Large workpieces, e.g. glass substrates for flat panel displays or solar panels · CPC title