Optical image capturing module, aligning method, and observing method

Patent metadata

Field	Value
Publication number	US-9459460-B2
Application number	US-201414455240-A
Country	US
Kind code	B2
Filing date	Aug 8, 2014
Priority date	Aug 16, 2013
Publication date	Oct 4, 2016
Grant date	Oct 4, 2016

Abstract

A method of aligning an upper substrate and a lower substrate is provided. The upper and lower substrates are oppositely arranged, and the aligning method includes the following steps: providing an optical image capturing module; emitting light rays to a third surface of a first prism; filtering the light rays, so that the light rays are divided into light rays at the first wavelength range and light rays at the second wavelength range, wherein the light rays at the first wavelength range irradiate a pattern on the upper substrate, and light rays at the second wavelength range irradiate a pattern on the lower substrate; reflecting a pattern image on the upper substrate to an image capturing apparatus; reflecting a pattern image on the lower substrate to the image capturing apparatus; and determining locations of the patterns of the upper and lower substrate that are on the image capturing apparatus.

First claim

What is claimed is:

1. An optical image capturing module, comprising:
a first prism, having a first surface, a second surface, and a third surface, wherein section lengths of the first surface and the second surface of the first prism are equal;
a second prism, having a first surface, a second surface, and a third surface, wherein section lengths of the first surface and the second surface of the second prism are equal, and the second surface of the second prism is adjacent to the first surface of the first prism;
a third prism, having a first surface, a second surface, and a third surface, wherein section lengths of the first surface and the second surface of the third prism are equal, and the first surface of the third prism is adjacent to the second surface of the first prism;
a fourth prism, having a first surface and a second surface of which section lengths are equal, wherein the first surface of the fourth prism is adjacent to the second surface of the third prism, and the second surface of the fourth prism is adjacent to the first surface of the second prism;
a first wavelength-selective medium, arranged on the third surface of the second prism, wherein the first wavelength-selective medium permits light rays at a first wavelength range greater than a cut-off wavelength to penetrate, and light rays at a second wavelength range less than the cut-off wavelength to reflect;
a second wavelength-selective medium, arranged on the third surface of the third prism, wherein the second wavelength-selective medium permits light rays at the second wavelength range less than the cut-off wavelength to penetrate, and light rays at the first wavelength range greater than the cut-off wavelength to reflect;
a beam splitting coating film group, having a plurality of coating films, separately arranged between the first surface of the first prism and the second surface of the second prism, between the first surface of the second prism and the second surface of the fourth prism, between the first surface of the fourth prism and the second surface of the third prism, and between the first surface of the third prism and the second surface of the third prism;
a light source, emitting light rays to the third surface of the first prism; and
an image capturer, oppositely arranged with the third surface of the first prism.

2. The optical image capturing module according to claim 1 , further comprising:
a beam splitter, arranged between the first prism and the image capturer, and adjacent to the third surface of the first prism,
wherein, a direction in which the light rays of the light source enter the beam splitter is vertical to an image receiving direction of the image capturer.

3. The optical image capturing module according to claim 1 , wherein the light source emits light rays at the first wavelength range and at the second wavelength range.

4. The optical image capturing module according to claim 1 , wherein the light source emits white light.

5. The optical image capturing module according to claim 1 , wherein the light rays at the first wavelength range have a single wavelength being greater than the cut-off wavelength, and the light rays at the second wavelength range have a single wavelength being less than the cut-off wavelength.

6. The optical image capturing module according to claim 1 , wherein light rays at the first wavelength range have first wavelengths greater than the cut-off wavelength, the light rays at the second wavelength range have second wavelengths less than the cut-off wavelength, and light rays at the first wavelength range and at the second wavelength range are light rays that have a range of continuous wavelengths.

7. The optical image capturing module according to claim 1 , wherein the cut-off wavelength is an intersection of a transmittance curve of the first wavelength-selective medium and a transmittance curve of the second wavelength-selective medium.

8. The optical image capturing module according to claim 5 , wherein the cut-off wavelength is an intersection of a transmittance curve of the first wavelength-selective medium and a transmittance curve of the second wavelength-selective medium.

9. The optical image capturing module according to claim 6 , wherein the cut-off wavelength is an intersection of a transmittance curve of the first wavelength-selective medium and a transmittance curve of the second wavelength-selective medium.

10. The optical image capturing module according to claim 1 , wherein the first wavelength-selective medium is a coating film or a filter, and the second wavelength-selective medium is a coating film or a filter.

11. A method of aligning an upper substrate and a lower substrate, the upper substrate and the lower substrate oppositely arranged, the method comprising the following steps of:
providing an optical image capturing module, arranged between the upper substrate and the lower substrate, wherein the optical image capturing module comprises:
a first prism, having a first surface, a second surface, and a third surface, wherein section lengths of the first surface and the second surface of the first prism are equal;
a second prism, having a first surface, a second surface, and a third surface, wherein section lengths of the first surface and the second surface of the second prism are equal, and the second surface of the second prism is adjacent to the first surface of the first prism;
a third prism, having a first surface, a second surface, and a third surface, wherein section lengths of the first surface and the second surface of the third prism are equal, and the first surface of the third prism is adjacent to the second surface of the first prism;
a fourth prism, having a first surface and a second surface of which section lengths are equal, wherein the first surface of the fourth prism is adjacent to the second surface of the third prism, and the second surface of the fourth prism is adjacent to the first surface of the second prism;
a first wavelength-selective medium, arranged on the third surface of the second prism, wherein the first wavelength-selective medium permits light rays at a first wavelength range greater than a cut-off wavelength to penetrate, and light rays at a second wavelength range less than the cut-off wavelength to reflect;
a second wavelength-selective medium, arranged on the third surface of the third prism, wherein the second wavelength-selective medium permits light rays at the second wavelength range less than the cut-off wavelength to penetrate, and light rays at the first wavelength range greater than the cut-off wavelength to reflect;
a beam splitting coating film group, having a plurality of coating films, separately arranged between the first surface of the first prism and the second surface of the second prism, between the first surface of the second prism and the second surface of the fourth prism, between the first surface of the fourth prism and the second surface of the third prism, and between the first surface of the third prism and the second surface of the third prism;
a light source, emitting light rays to the third surface of the first prism; and
an image capturer, oppositely arranged with the third surface of the first prism

emitting, by the light source, light rays to the third surface of the first prism; and
irradiating, by light rays at the first wavelength range after leaving the optical image capturing module from the first wavelength-selective medium, a pattern of the upper substrate, and irradiating, by light rays at the second wavelength range after leaving the optical image capturing module from the second wavelength-selective medium, a pattern of the lower substrate;
reflectin

Assignees

• Metal Ind Res & Dev Ct

Inventors

• Lin Shi-Wei
• Yang chun-ming
• Wen Chih-Chin
• Lin Chorng-Tyan

Classifications

• H10P72/53

  using optical controlling means · CPC title

• G03F9/00

  Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F9/7007

  Alignment other than original with workpiece · CPC title

• G03F9/7088

  Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection · CPC title

• G03F9/7046

  Strategy, e.g. mark, sensor or wavelength selection · CPC title