Ion implantation for modification of thin film coatings on glass
US-9850570-B2 · Dec 26, 2017 · US
Silicon nitride
Silicon nitride · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C23C14/0652 |
| Official title | {Silicon nitride} |
| Display label | Silicon nitride |
| Total patents | 338 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is growing.
| Year | Patents |
|---|---|
| 2015 | 17 |
| 2016 | 23 |
| 2017 | 26 |
| 2018 | 42 |
| 2019 | 42 |
| 2020 | 44 |
| 2021 | 17 |
| 2022 | 34 |
| 2023 | 33 |
| 2024 | 27 |
| 2025 | 30 |
| 2026 | 3 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Silicon nitride film, and semiconductor device
US-9847355-B2 · Dec 19, 2017 · US
Air-gap top spacer and self-aligned metal gate for vertical fets
US-2017330951-A1 · Nov 16, 2017 · US
Coated article with IR reflecting layer and method of making same
US-9816316-B2 · Nov 14, 2017 · US
Tungsten gates for non-planar transistors
US-9812546-B2 · Nov 7, 2017 · US
Particle reduction in a physical vapor deposition chamber
US-9773665-B1 · Sep 26, 2017 · US
Blue colored heat treatabe coated article having low solar factor value
US-2017267578-A1 · Sep 21, 2017 · US
Hydrogen free amorphous silicon as insulating dielectric material for superconducting quantum bits
US-9741921-B2 · Aug 22, 2017 · US
Air-gap top spacer and self-aligned metal gate for vertical fets
US-9735246-B1 · Aug 15, 2017 · US
Semiconductor structure and fabricating method thereof
US-2017141185-A1 · May 18, 2017 · US
Pane with thermal radiation reflecting coating
US-9650291-B2 · May 16, 2017 · US
Tungsten gates for non-planar transistors
US-9637810-B2 · May 2, 2017 · US
Gas barrier film and electronic device
US-9610753-B2 · Apr 4, 2017 · US
Thin film encapsulation structure and organic light emitting device having the same
US-9608235-B2 · Mar 28, 2017 · US
Gas barrier film, method of producing a gas barrier film, and electronic device
US-9603268-B2 · Mar 21, 2017 · US
Method for manufacturing a micromechanical timepiece part and said micromechanical timepiece part
US-2017068215-A1 · Mar 9, 2017 · US
Hydrogen free amorphous silicon as insulating dielectric material for superconducting quantum bits
US-2017069819-A1 · Mar 9, 2017 · US
Particle removal during fabrication of electrochromic devices
US-2017038658-A1 · Feb 9, 2017 · US
Method And System For Producing Coated Steel Components
US-2017029956-A1 · Feb 2, 2017 · US
Ion implantation for modification of thin film coatings on glass
US-2017009337-A1 · Jan 12, 2017 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC C23C14/0652?
- CPC C23C14/0652 is the Cooperative Patent Classification code for “Silicon nitride.”
- How many patents are filed under CPC C23C14/0652 (Silicon nitride)?
- Our database includes 338 publications tagged with this CPC code.
- Is patent activity under CPC C23C14/0652 growing?
- Publication counts under this code: 27 in 2024 vs 30 in 2025 (latest complete years).