Evaluation system and a method for evaluating a substrate

Patent metadata

Field	Value
Publication number	US-9835563-B2
Application number	US-201514946693-A
Country	US
Kind code	B2
Filing date	Nov 19, 2015
Priority date	May 23, 2013
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.

First claim

What is claimed is:

1. An evaluation system, comprising:
a solid immersion lens;
a plurality of spatial sensors, each spatial sensor in the plurality of spatial sensors being arranged to generate spatial relationship information indicative of a spatial relationship between a respective location of a plurality of locations on the solid immersion lens and a substrate, wherein the plurality of spatial sensors comprises multiple atomic force microscopes (AFMs);
at least one location correction element;
a controller arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the plurality of locations on the solid immersion lens and the substrate; and
a supporting structure coupled to the spatial sensors, the solid immersion lens and the at least one location correction element.

2. The evaluation system according to claim 1 wherein each AFM comprises a cantilever, a tip, a cantilever holder, a cantilever illuminator that is arranged to illuminate the cantilever and a detector that is arranged to sense light deflected from the cantilever.

3. The evaluation system according to claim 1 wherein the multiple AFMs comprise at least three non-collinear AFMs.

4. The evaluation system according to claim 1 wherein the multiple AFMs comprise at least four non-collinear AFMs.

5. The evaluation system according to claim 1 wherein each AFM comprises an oscillator for oscillating a cantilever.

6. The evaluation system according to claim 1 wherein each AFM comprises a tip that exceeds 10 nanometers.

7. The evaluation system according to claim 1 wherein each AFM comprises a tip that exceeds 50 nanometers.

8. The evaluation system according to claim 1 wherein each AFM comprises a tip that exceeds 100 nanometers.

9. The evaluation system according to claim 1 wherein the AFMs are arranged to perform a coarse scanning of the substrate.

10. The evaluation system according to claim 1 wherein the AFMs are arranged to scan the substrate without contacting the substrate.

11. The evaluation system according to claim 1 wherein the AFMs are arranged to scan the substrate while contacting the substrate.

12. The evaluation system according to claim 1 further comprising a calibration station for calibrating the multiple AFM.

13. The evaluation system according to claim 1 wherein the supporting structure is arranged to place the solid immersion lens at a distance of less than 100 nanometers from the substrate.

14. The evaluation system according to claim 1 wherein the supporting structure is arranged to place the solid immersion lens at a distance of less than 50 nanometers from the substrate.

15. The evaluation system according to claim 1 comprising location correction elements that are arranged to elevate at least one of the plurality of spatial sensors in relation to the solid immersion lens.

16. The evaluation system according to claim 1 further comprising a mechanical movement module arranged to introduce a movement between the supporting structure and the substrate.

17. The evaluation system according to claim 16 wherein the mechanical movement module is arranged to introduce a movement of at least 50 millimeter per second between the supporting structure and the substrate.

18. The evaluation system according to claim 1 wherein at least one spatial sensor is a capacitance sensor.

19. A method for evaluating a substrate, the method comprising:
scanning by a solid immersion lens a substrate while attempting to maintain a desired spatial relationship between a plurality of locations on the solid immersion lens and the substrate by:
generating, by a plurality of spatial sensors, spatial relationship information that is indicative of a spatial relationship between the plurality of locations on the solid immersion lens and the substrate, the plurality of spatial sensors comprising multiple atomic force microscopes (AFMs); and
receiving, by a controller, the spatial relationship information and sending correction signals to at least one location correction element for attempting to introduce the desired spatial relationship between the plurality of locations on the solid immersion lens and the substrate;

wherein a supporting structure is connected to the plurality of spatial sensors, to the solid immersion lens and to the at least one location correction element.

20. The method according to claim 19 wherein each AFM comprises a cantilever, a tip, a cantilever holder, a cantilever illuminator that is arranged to illuminate the cantilever and a detector that is arranged to sense light deflected from the cantilever.

Assignees

• Applied Materials Israel Ltd

Inventors

• Uziel Yoram
• Naftali Ron
• Adan Ofer
• Feldman Haim
• Shneyour Ofer
• Bar-Or Ron
• Korngut Doron

Classifications

• G01Q60/06

  SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy] · CPC title

• G01Q70/06

  Probe tip arrays · CPC title

• G01Q20/02

  by optical means · CPC title

• G01Q60/24

  AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes · CPC title

• G01Q10/065 Primary

  Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself · CPC title