Scanning probe microscope
US-2016356810-A1 · Dec 8, 2016 · US
Closed Loop Controller and Method for Fast Scanning Probe Microscopy
US2016266166A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016266166-A1 |
| Application number | US-201615006974-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 26, 2016 |
| Priority date | May 7, 2007 |
| Publication date | Sep 15, 2016 |
| Grant date | — |
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- Title
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Abstract
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A method of operating a metrology instrument includes generating relative motion between a probe and a sample at a scan frequency using an actuator. The method also includes detecting motion of the actuator using a position sensor that exhibits noise in the detected motion, and controlling the position of the actuator using a feedback loop and a feed forward algorithm. In this embodiment, the controlling step attenuates noise in the actuator position compared to noise exhibited by the position sensor in a bandwidth of about seven times the scan frequency. Scan frequencies up to a third of the first scanner resonance frequency or greater than 300 Hz are possible.
First claim
Opening claim text (preview).
What is claimed is: 1 . A method of operating a metrology instrument, comprising: generating, with an actuator, relative motion between a probe and a sample at a scan frequency greater than ⅓ rd the fundamental resonance of the actuator over a selected scan size; controlling the XY position of the actuator using both a feedback loop and a feed forward algorithm, wherein the bandwidth of the feedback loop is different than a bandwidth associated with operation of the feedforward algorithm; and repeating the generating and the controlling steps to zoom to a second scan size smaller than the selected scan size while maintaining XY position error at less than about 1% of the selected scan size.
Assignees
Inventors
Classifications
- G01Q10/065Primary
Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself · CPC title
AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes · CPC title
Fine scanning or positioning · CPC title
- G01Q40/00Primary
Calibration, e.g. of probes · CPC title
- G01Q10/06Primary
Circuits or algorithms therefor · CPC title
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- What does patent US2016266166A1 cover?
- A method of operating a metrology instrument includes generating relative motion between a probe and a sample at a scan frequency using an actuator. The method also includes detecting motion of the actuator using a position sensor that exhibits noise in the detected motion, and controlling the position of the actuator using a feedback loop and a feed forward algorithm. In this embodiment, the c…
- Who is the assignee on this patent?
- Bruker Nano Inc
- What technology area does this patent fall under?
- Primary CPC classification G01Q10/065. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Sep 15 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).