Controlling alignment during a thermal cycle

Patent metadata

Field	Value
Publication number	US-9625521-B2
Application number	US-201414583545-A
Country	US
Kind code	B2
Filing date	Dec 26, 2014
Priority date	Mar 25, 2009
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.

First claim

What is claimed is:

1. A method of testing an integrated circuit of a device, comprising:
holding the device against a surface of a holder;
moving a contactor support structure relative to the holder to bring terminals of the contactor support structure into contact with contacts on the device; and
providing signals through the terminals and contacts to the integrated circuit, wherein the contactor support structure includes a contactor substrate connected to a distribution board substrate with a first connecting arrangement, the first connecting arrangement including first and second connecting pieces with complementary interengaging formations that allow for movement of the contactor substrate relative to the distribution board substrate in a first radial direction and restricts movement of the contactor substrate relative to the distribution board substrate in a first tangential direction transverse to the first radial direction and with a second connecting arrangement, the second connecting arrangement including first and second connecting pieces with complementary interengaging formations that allow for movement of the contactor substrate relative to the distribution board substrate in a second radial direction and restricts movement of the contactor substrate relative to the distribution board substrate in a second tangential direction transverse to the second radial direction, wherein the second radial direction is at an angle relative to the first radial direction.

2. The method of claim 1 , wherein the second radial direction is at an angle relative to the first radial direction.

3. The method of claim 1 , wherein lines from the first and second connecting arrangements respectively in the first and second radial directions intersect within a central area of the distribution board substrate.

4. The method of claim 1 , further comprising:
actuating first and second components of an actuator to move the contactor support structure relative to an apparatus frame and urge terminals on the contactor support structure against contacts on the device.

5. The method of claim 1 , further comprising:
removably mounting a cartridge frame of a cartridge to the apparatus frame, the contactor support structure forming part of the cartridge; and
connecting a surface of a connector interface to a surface of a contactor interface.

Assignees

• Aehr Test Systems

Inventors

• Lindsey Scott E
• Yeh Junjye
• Jovanovic Jovan
• Malathong Seang P

Classifications

• G01R1/0441 Primary

  Details · CPC title

• G01R1/0491

  for testing integrated circuits on wafers, e.g. wafer-level test cartridge · CPC title

• G01R1/0416

  Connectors, terminals (G01R1/0425 and G01R1/0433 take precedence; with measurement function for battery poles G01R31/364) · CPC title

• G01R31/2887 Primary

  involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392) · CPC title

• G01R31/2601

  Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence) · CPC title