Handler apparatus that conveys a device under test to a test socket and test apparatus that comprises the handler apparatus

Patent metadata

Field	Value
Publication number	US-9606170-B2
Application number	US-201414472394-A
Country	US
Kind code	B2
Filing date	Aug 29, 2014
Priority date	Mar 25, 2014
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

Provided is a handler apparatus that conveys a device under test to a test socket, including: a socket fitting unit which the test socket fits, prior to fitting of a device holder holding the device under test to the test socket; a test-socket position detecting section that detects a relative position of the socket fitting unit with respect to the test socket in a state in which the socket fitting unit fits the test socket; an actuator that adjusts a position of the device under test on the device holder, based on the detected relative position of the socket fitting unit; and a conveyer that conveys the device holder in which the position of the device under test has been adjusted, to fit the test socket.

First claim

What is claimed is:

1. A handler apparatus that conveys a device under test to a first test socket from among a plurality of test sockets, comprising:
a socket fitting unit to which the first test socket is removably fit prior to a device holder holding the device under test being fit to the first test socket;
a test-socket position detecting section that detects a relative position of the socket fitting unit with respect to the first test socket in a state in which the first test socket is fit to the socket fitting unit;
an actuator that adjusts a position of the device under test on the device holder, based on the detected relative position of the socket fitting unit;
a conveyer that conveys the device holder, in which the position of the device under test has been adjusted, to the first test socket such that the device holder is fit to the first test socket in a state in which the first test socket is removed from the socket fitting unit; and
a tray for adjustment on which the socket fitting unit is mounted, wherein
the conveyer conveys the tray for adjustment so as to sequentially fit the plurality of test sockets to the socket fitting unit.

2. The handler apparatus according to claim 1 , further comprising
a socket image-capturing section that captures an image of the first test socket and the socket fitting unit in the state in which the first test socket is fit to the socket fitting unit, wherein
the test-socket position detecting section detects the relative position of the socket fitting unit with respect to the first test socket, based on an image-capturing result of the socket image-capturing section.

3. The handler apparatus according to claim 2 , wherein
the socket fitting unit has a reference mark observable from an opposite surface that is opposite to a surface to which the first test socket is fit, and
the socket image-capturing section captures an image of a region including the reference mark of the socket fitting unit and at least a part of the first test socket, from the opposite surface of the socket fitting unit.

4. The handler apparatus according to claim 3 , wherein
the socket fitting unit includes an opening through which at least a part of electrodes of the first test socket is observable from the opposite surface in the state in which the first test socket is fit to the socket fitting unit,
the socket image-capturing section captures an image of a region including the reference mark of the socket fitting unit and at least a part of the electrodes of the first test socket, and
the test-socket position detecting section detects a relative position of the electrodes of the first test socket with respect to the reference mark of the socket fitting unit.

5. The handler apparatus according to claim 4 , further comprising
a socket for adjustment to which the device holder and the socket fitting unit are sequentially fit, wherein
the actuator adjusts a position of the device under test on the device holder, further based on a relative position of the device holder with respect to the socket for adjustment in a state in which the device holder is fit to the socket for adjustment and a relative position of the socket fitting unit with respect to the socket for adjustment in a state in which the socket fitting unit is fit to the socket for adjustment.

6. The handler apparatus according to claim 5 , wherein
the reference mark of the socket fitting unit is also observable from a surface to which the socket for adjustment is fit, and is provided in a position not covered by the socket for adjustment in a state in which the socket for adjustment is fit to the socket fitting unit.

7. The handler apparatus according to claim 5 , wherein
the socket fitting unit is one of a plurality of socket fitting units mounted on the tray for adjustment, and
the handler apparatus comprises a control section that moves the socket for adjustment so as to sequentially fit the plurality of socket fitting units to the socket for adjustment.

8. The handler apparatus according to claim 5 , wherein
the socket fitting unit is one of a plurality of socket fitting units mounted on the tray for adjustment, and
the conveyer conveys the tray for adjustment so as to sequentially fit the plurality of socket fitting units to the socket for adjustment.

9. A test apparatus that comprises the handler apparatus according to claim 1 for conveying the device under test to the first test socket from among the plurality of test sockets, the test apparatus testing the device under test and further comprising:
a test head to be electrically connected to the device under test via the first test socket; and
a test module testing the device under test via the test head.

Assignees

• Advantest Corp

Inventors

• Yamashita Tsuyoshi
• Aizawa Mitsunori
• Horino Hiromitsu
• Yamada Yuya
• Onozawa Masataka

Classifications

• G01R31/2893

  Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00) · CPC title

• G01C11/00

  Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying · CPC title

• G01R31/2863

  Contacting devices, e.g. sockets, burn-in boards or mounting fixtures (in general G01R1/04) · CPC title

• G01R31/2887

  involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392) · CPC title

• G01R31/2891 Primary

  related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05) · CPC title