Fixture unit, fixture apparatus, handler apparatus, and test apparatus

Patent metadata

Field	Value
Publication number	US-9506948-B2
Application number	US-201414472386-A
Country	US
Kind code	B2
Filing date	Aug 29, 2014
Priority date	Mar 25, 2014
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

A fixture unit assuredly fits a fixed unit including a gap portion including a first wall surface and a second wall surface opposing each other. Provided are a fixture unit and a fixture apparatus including a fitting pin fitting a gap portion of a fixed unit, the gap portion including a first wall surface and a second wall surface opposing each other, where the fitting pin includes: a fixed pin inserted to the gap portion to contact the first wall surface; a moving pin inserted to the gap portion to be pressed on the second wall surface; and a base to which the fixed pin is fixed, and the moving pin includes a bottom portion in an arc form with a center being a central axis of movement, and the bottom portion fitting slidably with respect to a concave portion provided for the base.

First claim

What is claimed is:

1. A fixture unit comprising a fitting pin fitting a gap portion of a fixed unit, the gap portion including a first wall surface and a second wall surface opposing each other, wherein
the fitting pin includes:
a fixed pin inserted to the gap portion to contact the first wall surface;
a moving pin inserted to the gap portion to be pressed on the second wall surface; and
a base to which the fixed pin is fixed, and
the moving pin includes a bottom portion in an arc form with a center being a central axis of movement, and the bottom portion fitting slidably with respect to a concave portion provided for the base.

2. The fixture unit according to claim 1 , wherein
the base includes a through hole whose opening nearer the gap portion is smaller than an opposite opening,
the moving pin includes a protruding portion whose cross-sectional area is smaller than a maximum cross-section of the bottom portion, and
the protruding portion is exposed through the opening nearer the gap portion in the through hole.

3. The fixture unit according to claim 2 , wherein
the bottom portion of the moving pin is wider than the protruding portion, and a portion of the bottom portion which is wider than the protruding portion contacts an inner wall of the through hole at the gap portion side, to restrict a moving range of the moving pin.

4. The fixture unit according to claim 2 , comprising
a holding member including the concave portion, and inserted from the opposite opening of the through hole farther from the gap portion and into the through hole.

5. The fixture unit according to claim 1 , comprising
a spring provided between the fixed pin and the moving pin, and biasing the moving pin in a direction apart from the fixed pin.

6. The fixture unit according to claim 1 , wherein
the height of the moving pin in a direction of the gap portion is smaller than that of the fixed pin.

7. A fixture apparatus comprising:
the fixture unit according to claim 1 ; and
a fixed unit including the first wall surface and the second wall surface opposing each other and including the gap portion fitting the fitting pin.

8. A handler apparatus that conveys a device under test to a test socket, comprising:
an actuator that, prior to fitting of a device holder holding the device under test to the test socket, fits the device holder, and adjusts a position of the device under test on the device holder; and
a conveyer that conveys the device holder in which a position of the device under test has been adjusted, to fit the test socket, wherein
the device holder includes a gap portion having the first wall surface and the second wall surface opposing each other, and
the actuator includes the fitting pin of the fixture unit according to claim 1 , and fits the gap portion of the device holder.

9. The handler apparatus according to claim 8 , comprising:
a socket for adjustment, prior to fitting of the device holder holding the device under test to the test socket, fitting the device holder; and
a socket-for-adjustment position detecting section that detects a relative position of the device under test with respect to the socket for adjustment, in a state in which the device holder fits the socket for adjustment, wherein
the socket for adjustment includes the fitting pin of the fixture unit according to claim 1 and fits the gap portion of the device holder, and
the actuator adjusts a position of the device under test on the device holder, based on the detected relative position of the device under test.

10. The handler apparatus according to claim 9 , comprising:
a socket fitting unit, prior to fitting of the device holder holding the device under test to the test socket, fitting the test socket; and
a test-socket position detecting section that detects a relative position of the socket fitting unit with respect to the test socket, in a state in which the socket fitting unit fits the test socket, wherein
the socket fitting unit includes a gap portion including the first wall surface and the second wall surface opposing each other, and
the actuator adjusts a position of the device under test on the device holder, based on the detected relative position of the socket fitting unit.

11. The handler apparatus according to claim 8 , further comprising
an actuator adjusting section that adjusts an amount of driving of the actuator by causing the actuator to fit an actuator fitting unit, wherein
the actuator fitting unit includes a gap portion including the first wall surface and the second wall surface opposing each other.

12. A test apparatus that comprises the handler apparatus according to claim 8 for conveying the device under test to the test socket, the test apparatus testing the device under test and further comprising:
a test head to be electrically connected to the device under test via the test socket; and
a test module testing the device under test via the test head, wherein
the test socket includes the fitting pin of the fixture unit, and fits the gap portion of the device holder.

13. A test apparatus that tests a device under test, comprising:
a test socket fitting a device holder holding the device under test;
a test head electrically connected to the device under test via the test socket; and
a test module testing the device under test via the test head, wherein
the device holder includes a gap portion including the first wall surface and the second wall surface opposing each other, and
the test socket includes the fitting pin of the fixture unit according to claim 1 and fits the gap portion of the device holder.

Assignees

• Advantest Corp

Inventors

• Yamada Yuya
• Aizawa Mitsunori

Classifications

• G01R1/0466

  concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding · CPC title

• G01R31/2867

  Handlers or transport devices, e.g. loaders, carriers, trays · CPC title

• G01R31/2601 Primary

  Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence) · CPC title

• G01R31/2863

  Contacting devices, e.g. sockets, burn-in boards or mounting fixtures (in general G01R1/04) · CPC title

• G01R31/2893 Primary

  Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00) · CPC title