Handler apparatus that conveys a device under test to a test socket and test apparatus including the handler apparatus

Patent metadata

Field	Value
Publication number	US-9784789-B2
Application number	US-201414472392-A
Country	US
Kind code	B2
Filing date	Aug 29, 2014
Priority date	Mar 25, 2014
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

Provided is a handler apparatus that conveys a device under test to a test socket, including: a socket for adjustment which, prior to fitting of a device holder holding the device under test to the test socket, fits the device holder; a socket-for-adjustment position detecting section that detects a relative position of the device under test with respect to the socket for adjustment, in a state in which the device holder fits the socket for adjustment; an actuator that adjusts a position of the device under test on the device holder, based on the detected relative position of the device under test; and a conveyer that conveys the device holder, in which a position of the device under test has been adjusted, to fit the test socket.

First claim

What is claimed is:

1. A handler apparatus that conveys a device under test to a test socket, comprising:
a socket for adjustment which, prior to a device holder holding the device under test being fit to the test socket, removably fits the device holder;
a socket-for-adjustment position detecting section that detects a relative position of the device under test with respect to the socket for adjustment, in a state in which the socket for adjustment fits the device holder;
an actuator that adjusts a position of the device under test on the device holder, based on the detected relative position of the device under test; and
a conveyer that conveys the device holder, in which a position of the device under test has been adjusted, to the test socket such that the device holder is fit to the test socket while removed from the socket for adjustment.

2. The handler apparatus according to claim 1 , further comprising
a device image-capturing section that captures an image of the socket for adjustment and the device under test in the state in which the socket for adjustment fits the device holder, wherein
the socket-for-adjustment position detecting section detects the relative position of the device under test with respect to the socket for adjustment, based on an image-capturing result of the device image-capturing section.

3. The handler apparatus according to claim 2 , wherein
the socket for adjustment has a reference mark observable from an opposite surface that is opposite to a surface fitting the device holder, and
the device image-capturing section captures an image of a region including the reference mark of the socket for adjustment and at least a part of the device holder, from the opposite surface of the socket for adjustment.

4. The handler apparatus according to claim 3 , wherein
the socket for adjustment includes an opening through which at least a part of electrodes of the device under test is observable from the opposite surface while fitting the device holder,
the device image-capturing section captures an image of a region including the reference mark of the socket for adjustment and at least a part of the electrodes of the device under test, and
the socket-for-adjustment position detecting section detects a relative position of the electrodes of the device under test with respect to the reference mark of the socket for adjustment.

5. The handler apparatus according to claim 4 , wherein
the actuator adjusts a position of the device under test on the device holder, further based on an amount of positional difference of the device holder between when the device holder is fit to the test socket and when the socket for adjustment fits the device holder.

6. The handler apparatus according to claim 5 , further comprising:
a socket fitting unit that sequentially fits the test socket and the socket for adjustment; and
a test-socket position detecting section that detects a positional difference of a relative position of the socket fitting unit with respect to the test socket in the state in which the socket fitting unit fits the test socket and a relative position of the socket fitting unit with respect to the socket for adjustment in the state in which the socket fitting unit fits the socket for adjustment, as the amount of positional difference between the test socket and the socket for adjustment.

7. The handler apparatus according to claim 6 , further comprising
a socket-for-adjustment image-capturing section that captures an image of the test socket and the socket fitting unit in the state in which the socket fitting unit fits the test socket, wherein
the device image-capturing section captures an image of the socket for adjustment and the socket fitting unit in the state in which the socket fitting unit fits the socket for adjustment, and
the test-socket position detecting section detects the amount of positional difference between the test socket and the socket for adjustment based on image-capturing results of the socket-for-adjustment image-capturing section and the device image-capturing section.

8. The handler apparatus according to claim 7 , wherein
the socket fitting unit includes a reference mark observable both from a surface fitting the test socket and the socket for adjustment and a surface opposite to the surface fitting the test socket and the socket for adjustment,
the socket-for-adjustment image-capturing section captures an image of a region including at least a part of the test socket and the reference mark of the socket fitting unit, from the socket fitting unit, in a state in which the socket fitting unit fits the test socket, and
the device image-capturing section captures an image of a region including at least a part of the socket for adjustment and the reference mark of the socket fitting unit from the socket for adjustment, in a state in which the socket fitting unit fits the socket for adjustment.

9. The handler apparatus according to claim 7 , further comprising:
an actuator fitting unit to fit the actuator; and
an actuator adjusting section that drives the actuator in a state in which the actuator fitting unit fits the actuator, and adjusts an amount of driving of the actuator when adjusting a position of the device under test on the device holder, based on a distance and a direction in which the actuator has actually moved.

10. The handler apparatus according to claim 9 , wherein
the actuator adjusting section adjusts the amount of driving of the actuator, further based on an amount of positional difference of the actuator fitting unit between when the actuator fitting unit fits the socket for adjustment and when the actuator fitting unit fits the actuator.

11. The handler apparatus according to claim 10 , further comprising
an actuator image-capturing section that captures an image of the actuator and the actuator fitting unit from the actuator fitting unit, in a state in which the actuator fitting unit fits the actuator, wherein
the device image-capturing section captures an image of the socket for adjustment and the actuator fitting unit from the socket for adjustment, in a state in which the actuator fitting unit fits the socket for adjustment, and
the actuator adjusting section adjusts an amount of driving of the actuator, based on image capturing results of the actuator image-capturing section and the device image-capturing section.

12. The handler apparatus according to claim 11 , further comprising
a tray for adjustment for mounting thereon a plurality of the actuator fitting units, wherein
the device image-capturing section sequentially captures images of the plurality of actuator fitting units fitting the socket for adjustment, from a front surface side of the tray for adjustment, and
the actuator image-capturing section sequentially captures images of the plurality of actuator fitting units fitting the actuator from a rear surface side of the tray for adjustment.

13. The handler apparatus according to claim 12 , wherein
a plurality of storages for storing therein the plurality of actuator fitting units are aligned in column formation on the tray for adjustment, and a through slit penetrating the tray for adjustment from the front surface to the rear surface is formed along the plurality of storages, and
the handler apparatus further comprises a link section that links the actuator image-capturing section to the device image-capturing section by passing through the through slit.

14. A test apparatus that comprises the handler apparatus according to claim 1 for conveying the device under test to the test socket, the test apparatus testing the devi

Assignees

• Advantest Corp

Inventors

• Kikuchi Aritomo
• Yamashita Tsuyoshi
• Aizawa Mitsunori
• Horino Hiromitsu
• Yamada Yuya
• Onozawa Masataka

Classifications

• G01R31/2891 Primary

  related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05) · CPC title

• G01R31/2893 Primary

  Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00) · CPC title

• G01R1/0441

  Details · CPC title

• G01C11/00

  Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying · CPC title

• G06T2207/30148

  Semiconductor; IC; Wafer · CPC title