Handler apparatus, adjustment method of handler apparatus, and test apparatus

Patent metadata

Field	Value
Publication number	US-9658287-B2
Application number	US-201414472388-A
Country	US
Kind code	B2
Filing date	Aug 29, 2014
Priority date	Mar 25, 2014
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

A handler apparatus adjusts a position of an actuator and enhances positional accuracy of a device under test. Provided is a handler apparatus that conveys a device under test to a test socket, including: an actuator that, prior to fitting of a device holder holding the device under test to the test socket, fits the device holder, and adjusts a position of the device under test on the device holder; and an actuator adjusting section that adjusts an amount of driving of the actuator by causing the actuator to fit an actuator fitting unit.

First claim

What is claimed is:

1. A handler apparatus that conveys a device under test to a test socket, comprising:
an actuator that, prior to fitting of a device holder holding the device under test to the test socket, fits the device holder, and adjusts a position of the device under test on the device holder;
an actuator adjusting section that adjusts an amount of driving of the actuator by causing the actuator to fit an actuator fitting unit;
an actuator image-capturing section that captures an image of the actuator; and
an actuator position detecting section that detects a distance and a direction in which the actuator moves, based on an image capturing result of the actuator captured by the actuator image-capturing section, wherein
the actuator adjusting section drives the actuator in a state fitting the actuator fitting unit, and adjusts an amount of driving based on a distance and a direction in which the actuator actually moved.

2. The handler apparatus according to claim 1 , wherein
the actuator image-capturing section captures an image of the actuator and the actuator fitting unit from a side of the actuator fitting unit opposite to the actuator, in a state in which the actuator fits the actuator fitting unit, and
the actuator position detecting section detects a relative position of the actuator and the actuator fitting unit based on an image-capturing result.

3. The handler apparatus according to claim 1 , wherein
the actuator fitting unit has a shape that is the same as a shape of at least a portion of the device holder that holds the device under test.

4. The handler apparatus according to claim 1 , wherein
the device holder includes:
an inner unit mounting the device under test; and
an outer unit that holds the inner unit to be movable.

5. The handler apparatus according to claim 4 , wherein
the actuator includes:
an outer catch section that grasps the outer unit; and
an inner catch section that grasps the inner unit, and releases a lock provided in the inner unit while grasping the inner unit, to cause the inner unit to be relatively movable with respect to the outer unit.

6. An adjustment method of the handler apparatus according to claim 1 , comprising:
adjusting, by the actuator, a position of the device under test on the device holder, the actuator fitting the device holder prior to fitting of the device holder holding the device under test to the test socket; and
adjusting an amount of driving of the actuator by causing the actuator to fit the actuator fitting unit.

7. A test apparatus that comprises the handler apparatus according to claim 1 for conveying the device under test to the test socket, the test apparatus testing the device under test and further comprising:
a test head to be electrically connected to the device under test via the test socket; and
a test module testing the device under test via the test head.

8. A handler apparatus that conveys a device under test to a test socket, comprising:
an actuator that, prior to fitting of a device holder holding the device under test to the test socket, fits the device holder, and adjusts a position of the device under test on the device holder;
an actuator adjusting section that adjusts an amount of driving of the actuator by causing the actuator to fit an actuator fitting unit;
a socket for adjustment that fits the device holder and the actuator fitting unit; and
a socket-for-adjustment position detecting section that detects a relative position of a reference position of the actuator and the socket for adjustment in a state in which the socket for adjustment fits the actuator fitting unit, wherein
the actuator adjusting section drives the actuator in a state fitting the actuator fitting unit, and adjusts an amount of driving based on a distance and a direction in which the actuator actually moved.

9. The handler apparatus according to claim 8 , wherein
the socket-for-adjustment position detecting section detects a relative position of a reference position of the device holder and the socket for adjustment in a state in which the socket for adjustment fits the device holder, and
the actuator adjusting section obtains positional correlation between the actuator fitting unit and the device holder, from a detection result of the socket-for-adjustment position detecting section.

10. The handler apparatus according to claim 8 , wherein
the actuator fitting unit is mounted on a tray for adjustment having a shape that is the same as a shape of a device tray mounting the device holder.

11. The handler apparatus according to claim 10 , comprising
a socket-for-adjustment image-capturing section that captures an image of the device holder and the socket for adjustment from a side in which the device holder of the device tray is stored, and captures an image of the actuator fitting unit and the socket for adjustment from a side in which the actuator fitting unit of the tray for adjustment is held, wherein
the socket-for-adjustment position detecting section detects a relative position based on an image-capturing result of the socket-for-adjustment image-capturing section.

12. The handler apparatus according to claim 11 , wherein
the tray for adjustment mounts a plurality of the actuator fitting units, and
the handler apparatus comprising
a control section that moves the actuator so that the socket-for-adjustment position detecting section detects respective relative positons between at least one of the actuator fitting units and a plurality of the device holders.

13. The handler apparatus according to claim 11 , wherein
the tray for adjustment mounts a plurality of the actuator fitting units, and
the handler apparatus comprising
a conveyer that moves the device tray and the tray for adjustment so that the socket-for-adjustment position detecting section detects respective relative positons between at least one of the actuator fitting units and a plurality of the device holders.

14. The handler apparatus according to claim 12 , wherein
the socket-for-adjustment image-capturing section is integral with the actuator,
the control section sequentially moves the actuator so as to position the actuator to respective positions corresponding to respective ones of a plurality of the device holders, and
the actuator adjusts respective positions of the plurality of devices under test held by the plurality of device holders.

15. The handler apparatus according to claim 8 , wherein
the actuator fitting unit has a shape that is the same as a shape of at least a portion of the device holder that holds the device under test.

16. The handler apparatus according to claim 8 , wherein
the device holder includes:
an inner unit mounting the device under test; and
an outer unit that holds the inner unit to be movable.

17. The handler apparatus according to claim 16 , wherein
the actuator includes:
an outer catch section that grasps the outer unit; and
an inner catch section that grasps the inner unit, and releases a lock provided in the inner unit while grasping the inner unit, to cause the inner unit to be relatively movable with respect to the outer unit.

18. An adjustment method of the handler apparatus according to claim 8 , comprising:
adjusting, by the actuator, a position of the device under test on the device holder, the actuator fitting the device holder prior to fitting of the device holder holding the device under test to the test socket; and
adjusting an amount of driving of the actuator by causing the actuator to fit the actuator fitt

Assignees

• Advantest Corp

Inventors

• Yamashita Tsuyoshi
• Aizawa Mitsunori
• Horino Hiromitsu
• Yamada Yuya
• Onozawa Masataka

Classifications

• G01C11/00

  Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying · CPC title

• G01R31/2893 Primary

  Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00) · CPC title

• G01R31/2891 Primary

  related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05) · CPC title

• G01R1/0441

  Details · CPC title

• G01R1/0433

  Sockets for IC's or transistors · CPC title