Non-planar field effect transistor test structure and lateral dielectric breakdown testing method

Patent metadata

Field	Value
Publication number	US-9453873-B2
Application number	US-201414154505-A
Country	US
Kind code	B2
Filing date	Jan 14, 2014
Priority date	Jan 14, 2014
Publication date	Sep 27, 2016
Grant date	Sep 27, 2016

Abstract

Disclosed are test structures and methods for non-planar field effect transistors. The test structures comprise test device(s) on an insulator layer. Each device comprises semiconductor fin(s). Each fin has a first portion comprising a pseudo channel region at one end and a second portion comprising a diffusion region positioned laterally adjacent to the first portion. A gate with sidewall spacers can be adjacent to the first portion of the fin(s). A first contact can be on the insulator layer adjacent the end of the fin(s). A second contact can be on the second portion of the fin(s) such that the gate is positioned laterally between the contacts. Measurements taken when the first contact is biased against the gate are compared to measurements taken when the second contact is biased against the gate in order to assess lateral dielectric breakdown between the gate and first contact independent of gate dielectric breakdown.

First claim

What is claimed is:

1. A test structure comprising:
an insulator layer; and,
a test device on said insulator layer, said test device comprising:
a semiconductor fin on said insulator layer, said semiconductor fin comprising a first portion at an end of said semiconductor fin and a second portion positioned laterally adjacent to said first portion;
a gate on said first portion at said end;
a sidewall spacer on said gate and further positioned laterally immediately adjacent to said end such that said semiconductor fin does not extend laterally beyond said sidewall spacer;
a first contact to the insulator layer, said first contact having a first bottom surface immediately adjacent to said insulator layer and said first contact further being positioned laterally adjacent to said end such that said sidewall spacer is positioned laterally between said gate and said first contact; and,
a second contact to said second portion of said semiconductor fin, said second contact having a second bottom surface immediately adjacent to said second portion such that said gate is positioned laterally between said first contact and said second contact.

2. The test structure of claim 1 ,
said first contact being independently biasable against said gate to allow a first electrical property measurement to be acquired from said test device, and
said second contact being independently biasable against said gate to allow a second electrical property measurement to be acquired from said test device, said first electrical property measurement being comparable to said second electrical property measurement for assessment of lateral dielectric breakdown between said gate and said first contact independent of gate dielectric breakdown.

3. The test structure of claim 1 , said first contact being separated from said gate by a first distance, said second contact being separated from said gate by a second distance, and said first distance being different from said second distance.

4. The test structure of claim 1 , said first portion comprising a pseudo channel region and said second portion comprising a diffusion region, said pseudo channel region having a different dopant profile than said diffusion region.

5. The test structure of claim 1 , said semiconductor fin further comprising alternating additional first and second portions and an additional gate adjacent to each additional first portion.

6. The test structure of claim 1 , said first portion having a first height and said second portion having a second height that is greater than said first height.

7. The test structure of claim 1 , further comprising duplicate test devices on said insulator layer, said duplicate test devices having a same design as said test device with different size spaces between said gate and said first contact.

8. A test structure comprising:
an insulator layer; and,
a test device on said insulator layer, said test device comprising:
multiple semiconductor fins on said insulator layer, each of said multiple semiconductor fins comprising a first portion at an end of said multiple semiconductor fins and a second portion positioned laterally adjacent to said first portion;
a gate on said first portion of each of said multiple semiconductor fins at said end;
a sidewall spacer on said gate and further positioned laterally immediately adjacent to each of said multiple semiconductor fins at said end such that said semiconductor fins do not extend laterally beyond said sidewall spacer;
a first contact to said insulator layer, said first contact having a first bottom surface immediately adjacent said insulator layer and said first contact being positioned laterally adjacent to said end of said multiple semiconductor fins such that said sidewall spacer is positioned laterally between said gate and said first contact; and,
a second contact to said second portion of each of said multiple semiconductor fins, said second contact having a second bottom surface immediately adjacent to said second portion of each of said multiple semiconductor fins such that said gate is positioned laterally between said first contact and said second contact.

9. The test structure of claim 8 ,
said first contact being independently biasable against said gate to allow a first electrical property measurement to be acquired from said test device, and
said second contact being independently biasable against said gate to allow a second electrical property measurement to be acquired from said test device, said first electrical property measurement being comparable to said second electrical property measurement for assessment of lateral dielectric breakdown between said gate and said first contact independent of gate dielectric breakdown.

10. The test structure of claim 8 , said first contact being separated from said gate by a first distance, said second contact being separated from said gate by a second distance, and said first distance being different from said second distance.

11. The test structure of claim 8 , said first portion comprising a pseudo channel region and said second portion comprising a diffusion region, said pseudo channel region having a different dopant profile than said diffusion region.

12. The test structure of claim 8 , said multiple semiconductor fins each further comprising alternating additional first and second portions and said test structure further comprising an additional gate adjacent to an additional first portion of each of said multiple semiconductor fins.

13. The test structure of claim 8 , further comprising duplicate test devices on said insulator layer, said duplicate test devices having a same design as said test device with different size spaces between said gate and said first contact.

14. A test method comprising:
providing a test structure comprising a test device corresponding to a non-planar semiconductor device structure, said test device being on an insulator layer and comprising:
a semiconductor fin on said insulator layer, said semiconductor fin comprising a top a semiconductor fin on said insulator layer, said semiconductor fin comprising a first portion at one end and a second portion positioned laterally adjacent to said first portion;
a gate adjacent to said first portion at said end;
a sidewall spacer on said gate;
a first contact on said insulator layer adjacent to said end such that said sidewall spacer is positioned laterally between said gate and said first contact; and,
a second contact on said second portion such that said gate is positioned laterally between said first contact and said second contact; and,

testing said test device, said testing comprising:
independently biasing said first contact against said gate and, during said independently biasing of said first contact against said gate, acquiring a first electrical property measurement from said test device;
independently biasing said second contact against said gate and, during said independently biasing of said second contact against said gate, acquiring a second electrical property measurement from said test device; and,
comparing said first electrical property measurement to said second electrical property measurement in order to assess lateral dielectric breakdown between said gate and said first contact independent of gate dielectric breakdown.

15. The test method of claim 14 , said first electrical property measurement comprising a first breakdown voltage and said second electrical property measurement comprising a second breakdown voltage.

16. The test method of claim 14 , said first electrical property measurement comprising a fi

Assignees

• IBM
• Globalfoundries Inc

Inventors

• Chen Fen
• Dufresne Roger A
• Kolvenbach Kevin
• Shinosky Michael A

Classifications

• G01R31/2623 Primary

  for measuring break-down voltage therefor · CPC title