Mixed acid cleaning assemblies

Patent metadata

Field	Value
Publication number	US-9293305-B2
Application number	US-201213483566-A
Country	US
Kind code	B2
Filing date	May 30, 2012
Priority date	Oct 31, 2011
Publication date	Mar 22, 2016
Grant date	Mar 22, 2016

Abstract

In one embodiment, a cleaning assembly may include a modular electrode sealing housing, an acid injection inlet, and a fluid injection inlet. The modular electrode sealing housing may include a high pressure closure member that contains a first cleaning volume and a low pressure closure member that contains a second cleaning volume. The acid injection inlet can be in fluid communication with the first cleaning volume of the high pressure closure member. The fluid injection inlet can be in fluid communication with the second cleaning volume of the low pressure closure member. During normal operation, a showerhead electrode can be sealed within the modular electrode sealing housing such that the first cleaning volume is located on a first side and the second cleaning volume is located on a second side of the showerhead electrode.

First claim

What is claimed is:

1. A cleaning assembly comprising a modular electrode sealing housing, an acid injection inlet, and a fluid injection inlet wherein:
the modular electrode sealing housing comprises a high pressure closure member that contains a first cleaning volume and a low pressure closure member that contains a second cleaning volume;
the acid injection inlet is formed in the high pressure closure member and in fluid communication with the first cleaning volume of the high pressure closure member;
the acid injection inlet adapted to supply an acidic solution to the first cleaning volume of the high pressure closure member;
the fluid injection inlet is formed in the low pressure closure member and in fluid communication with the second cleaning volume of the low pressure closure member;
the fluid injection inlet adapted to supply purified water to the second cleaning volume of the low pressure closure member; and
an electrode carrier plate adapted to support a showerhead electrode so as to be sealed within the modular electrode sealing housing such that the high pressure closure member seals against one side of the showerhead electrode, the electrode carrier plate seals against an opposite side of the showerhead electrode and the low pressure closure member seals against the electrode carrier plate, the first cleaning volume is located on a first side of the showerhead electrode and the second cleaning volume is located on a second side of the showerhead electrode, and the first cleaning volume of the high pressure closure member adapted to operate at a relatively high pressure compared to the second cleaning volume of the high pressure closure member.

2. The cleaning assembly of claim 1 , wherein:
the low pressure closure member comprises a peripheral support region, a fluid collecting surface, and one or more protruding support members;
the peripheral support region is formed around the fluid collecting surface and the one or more protruding support members;
the fluid collecting surface is indented with respect to the peripheral support region;
the one or more protruding support members projects away from the fluid collecting surface.

3. The cleaning assembly of claim 2 , wherein the fluid injection inlet passes through the fluid collecting surface of the low pressure closure member.

4. The cleaning assembly of claim 1 , wherein:
the electrode carrier plate comprises a peripheral electrode contacting portion, one or more horizontal support members, and an annular electrode contacting ridge;
the peripheral electrode contacting portion is formed around one or more horizontal support members and the annular electrode contacting ridge;
each of the one or more horizontal support members extends from the annular electrode contacting ridge to the peripheral electrode contacting portion and is indented with respect to the peripheral electrode contacting portion; and
each of the one or more horizontal support members comprises an arcuate electrode contacting ridge that projects away from the one or more horizontal support members.

5. The cleaning assembly of claim 4 , wherein the annular electrode contacting ridge is formed around a central orifice.

6. The cleaning assembly of claim 5 , wherein the peripheral electrode contacting portion and the one or more horizontal support members demarcate a cut-out region in the electrode carrier plate.

7. The cleaning assembly of claim 6 , wherein the fluid injection inlet is aligned with the cutout region of the electrode carrier plate and supplies the purified water through the cut-out region of the electrode carrier plate.

8. The cleaning assembly of claim 1 , further comprising a gas injection inlet and a second fluid injection inlet, wherein the gas injection inlet and the second fluid injection inlet are formed in the high pressure closure member and in fluid communication with the first cleaning volume of the high pressure closure member.

9. The cleaning assembly of claim 8 , wherein the gas injection inlet adapted to supply clean dry air to the first cleaning volume of the high pressure closure member.

10. The cleaning assembly of claim 8 , wherein the second fluid injection inlet adapted to supply deionized water to the first cleaning volume of the high pressure closure member.

11. The cleaning assembly of claim 8 , wherein the gas injection inlet is in fluid communication with a gas dispersion member comprising a chamfered body having a substantially trapezoidally shaped cross-section and a plurality of gas outlets formed in the chamfered body.

12. The cleaning assembly of claim 11 , wherein the gas dispersion member comprises a central flow path aligned with a center line and in fluid communication with the plurality of gas outlets, wherein each of the plurality of gas outlets are oriented at an acute angle with respect to the center line of the central flow path.

13. The cleaning assembly of claim 8 , wherein the second fluid injection inlet is in fluid communication with a liquid dispersion member comprising a cylindrical body with a central flow path formed therein, and a plurality of liquid outlets formed in the cylindrical body, wherein each of the plurality of liquid outlets is a substantially linear conduit that travels radially outward from the central flow path.

14. The cleaning assembly of claim 1 , further comprising a pressure exhaust coupled to the high pressure closure member and in fluid communication with the first cleaning volume of the high pressure closure member.

15. The cleaning assembly of claim 1 , wherein the acid injection inlet is connected to a supply of a mixed acid solution comprising nitric acid, hydrofluoric acid, and acetic acid at a volume ratio of about 6 to about 1 to about 1.

16. The cleaning assembly of claim 1 , wherein the fluid injection inlet is connected to a supply of deionized water.

17. The cleaning assembly of claim 1 , wherein the fluid injection inlet is in fluid communication with a conoidal spray member comprising a cone shaped member having a base that is relatively large compared to a peak of the cone shaped member, and a plurality of apertures formed through the cone shaped member and arranged in a plurality of concentric rings.

18. The cleaning assembly of claim 17 , wherein the plurality of concentric rings is centered to the peak of the cone shaped member of the conoidal spray member.

19. The cleaning assembly of claim 1 further comprising a scalable chamber that surrounds an interior volume in fluid communication with an air inlet and an air outlet, wherein the modular electrode sealing housing is disposed within the scalable chamber and exposed to ambient conditions within the interior volume.

20. A cleaning assembly comprising a modular electrode sealing housing, an acid injection inlet, a fluid injection inlet, a second fluid injection inlet, a conoidal spray member, and a liquid dispersion member wherein:
the modular electrode sealing housing comprises a high pressure closure member that contains a first cleaning volume and a low pressure closure member that contains a second cleaning volume;
the acid injection inlet is formed in the high pressure closure member and in fluid communication with the first cleaning volume of the high pressure closure member;
the acid injection inlet adapted to supply an acidic solution to the first cleaning volume of the high pressure closure member;
the fluid injection inlet is formed in the low pressure closure member and in fluid communication with the second clea

Assignees

• Avoyan Armen
• La Croix Cliff
• Shih Hong
• Daugherty John
• Lam Res Corp

Inventors

• Avoyan Armen
• La Croix Cliff
• Shih Hong
• Daugherty John

Classifications

• H01J37/32889

  Connection or combination with other apparatus · CPC title

• H01J37/3244

  Gas supply means · CPC title

• C23C16/4407

  Cleaning of reactor or reactor parts by using wet or mechanical methods · CPC title

• B08B9/0323

  Arrangements specially designed for simultaneous and parallel cleaning of a plurality of conduits · CPC title

• B08B3/08

  the liquid having chemical or dissolving effect · CPC title