Methods for mixed acid cleaning of showerhead electrodes

Patent metadata

Field	Value
Publication number	US-9396912-B2
Application number	US-201213483597-A
Country	US
Kind code	B2
Filing date	May 30, 2012
Priority date	Oct 31, 2011
Publication date	Jul 19, 2016
Grant date	Jul 19, 2016

Abstract

In one embodiment, a method for cleaning a showerhead electrode my include sealing a showerhead electrode within a cleaning assembly such that a first cleaning volume is formed on a first side of the showerhead electrode and a second cleaning volume is formed on a second side of the showerhead electrode. An acidic solution can be loaded into the first cleaning volume on the first side of the showerhead electrode. The first cleaning volume on the first side of the showerhead electrode can be pressurized such that at least a portion of the acidic solution flows through one or more of the plurality of gas passages of the showerhead electrode. An amount of purified water can be propelled through the second cleaning volume on the second side of the showerhead electrode, and into contact with the second side of the showerhead electrode.

First claim

What is claimed is:

1. A method for cleaning a showerhead electrode, comprising:
sealing a showerhead electrode within a cleaning assembly such that a first cleaning volume is formed on a first side of the showerhead electrode within a high pressure closure member sealed to the showerhead electrode and a second cleaning volume is formed on a second side of the showerhead electrode within a low pressure closure member sealed to the showerhead electrode, wherein the showerhead electrode comprises a plurality of gas passages that extend through the showerhead electrode from the first side of the showerhead electrode to the second side of the showerhead electrode;
loading an acidic solution into the first cleaning volume on the first side of the showerhead electrode;
after the loading, pressurizing the first cleaning volume on the first side of the showerhead electrode such that at least a portion of the acidic solution flows through one or more of the plurality of gas passages of the showerhead electrode; and
propelling an amount of purified water through a fluid injection inlet coupled to the low pressure closure member and in fluid communication with the second cleaning volume on the second side of the showerhead electrode, and into contact with the second side of the showerhead electrode.

2. The method of claim 1 , further comprising venting the first cleaning volume on the first side of the showerhead electrode, while the acidic solution is loaded.

3. The method of claim 1 , further comprising propelling a quantity of purified water through the first cleaning volume on the first side of the showerhead electrode and into contact with the first side of the showerhead electrode before the amount of purified water is propelled into contact with the second side of the showerhead electrode.

4. The method of claim 3 , further comprising propelling a second quantity of purified water through the first cleaning volume on the first side of the showerhead electrode and into contact with the first side of the showerhead electrode after the amount of purified water contacts the second side of the showerhead electrode.

5. The method of claim 4 , injecting an amount of air into the first cleaning volume on the first side of the showerhead electrode after the second quantity of purified water contacts the first side of the showerhead electrode, wherein at least a portion of the amount of air is forced through one or more of the plurality of gas passages of the showerhead electrode.

6. The method of claim 3 , wherein the quantity of purified water is propelled by a liquid dispersion member comprising a cylindrical body with a central flow path formed therein, and a plurality of liquid outlets formed in the cylindrical body, wherein each of the plurality of liquid outlets is a substantially linear conduit that travels radially outward from the central flow path.

7. The method of claim 1 , further comprising propelling a quantity of purified water through the first cleaning volume on the first side of the showerhead electrode and into contact with the first side of the showerhead electrode before the acidic solution is loaded into the first cleaning volume.

8. The method of claim 7 , injecting an amount of air into the first cleaning volume on the first side of the showerhead electrode after the quantity of purified water contacts the first side of the showerhead electrode and before the acidic solution is loaded into the first cleaning volume.

9. The method of claim 1 , wherein the cleaning assembly is sealed to the showerhead electrode via one or more O-rings, the low pressure closure member further including a spray member in fluid communication with the fluid injection inlet which sprays the purified water in the second cleaning volume, and the low pressure closure member including an outlet passage in fluid communication with the second cleaning volume through which the purified water from the second cleaning volume is drained during cleaning of the showerhead electrode.

10. The method of claim 9 , wherein the high pressure closure member has a flange member and a horizontal actuator coupled to a clamping fork that is contoured to receive the flange member of the high pressure closure member, and wherein the horizontal actuator translates the clamping fork laterally into contact with the flange member to provide a clamping pressure to compress the one or more O-rings.

11. The method of claim 9 , wherein the cleaning assembly comprises a vertical actuator provides a clamping pressure to compress the one or more O-rings.

12. The method of claim 1 , wherein the cleaning assembly comprises an outlet passage in fluid communication with the second cleaning volume on the second side of the showerhead electrode, the method further comprising maintaining the outlet passage closed while the acidic solution is loaded into the first cleaning volume on the first side of the showerhead electrode and maintaining the outlet passage open while the first cleaning volume on the first side of the showerhead electrode is pressurized.

13. The method of claim 1 , wherein the cleaning assembly comprises a plurality of arcuate electrode contacting ridges that are in contact with the second side of the showerhead electrode such that the plurality of gas passages of the showerhead electrode are unobstructed.

14. The method of claim 1 , wherein the acidic solution comprises nitric acid.

15. The method of claim 1 , wherein the acidic solution comprises hydrofluoric acid.

16. The method of claim 1 , wherein the acidic solution comprises acetic acid.

17. The method of claim 1 , wherein the acidic solution is a mixed acid solution comprising nitric acid, hydrofluoric acid, and acetic acid at a volume ratio of about 6 to about 1 to about 1.

18. The method of claim 1 , wherein the first cleaning volume on the first side of the showerhead electrode is pressurized with a gas supplied with a gas dispersion member comprising a chamfered body having a substantially trapezoidally shaped cross-section and a plurality of gas outlets formed in the chamfered body.

19. The method of claim 1 , wherein the amount of purified water is propelled through the second cleaning volume on the second side of the showerhead electrode with a conoidal spray member comprising a cone shaped member having a base that tapers toward a peak of the cone shaped member, and a plurality of apertures formed through the cone shaped member and arranged in a plurality of concentric rings.

20. A method for cleaning a showerhead electrode, comprising:
sealing a showerhead electrode within a cleaning assembly such that a first cleaning volume is formed on a first side of the showerhead electrode within a high pressure closure member sealed to the showerhead electrode and a second cleaning volume is formed on a second side of the showerhead electrode within a low pressure closure member sealed to the showerhead electrode, wherein the showerhead electrode comprises a plurality of gas passages that extend through the showerhead electrode from the first side of the showerhead electrode to the second side of the showerhead electrode;
loading an acidic solution into the first cleaning volume on the first side of the showerhead electrode;
after the loading, pressurizing the first cleaning volume on the first side of the showerhead electrode a gas supplied with a gas dispersion member, such that at least a portion of the acidic solution flows through one or more of the plurality of gas passages of the showerhead electrode, wh

Assignees

• Avoyan Armen
• La Croix Cliff
• Shih Hong
• Daugherty John
• Lam Res Corp

Inventors

• Avoyan Armen
• La Croix Cliff
• Shih Hong
• Daugherty John

Classifications

• B08B3/04

  Cleaning involving contact with liquid · CPC title

• B08B3/08

  the liquid having chemical or dissolving effect · CPC title

• H01J37/32889

  Connection or combination with other apparatus · CPC title

• B08B9/0328

  by purging the pipe with a gas or a mixture of gas and liquid · CPC title

• B08B9/0323

  Arrangements specially designed for simultaneous and parallel cleaning of a plurality of conduits · CPC title