Chamber component with wear indicator

Patent metadata

Field	Value
Publication number	US-2016336149-A1
Application number	US-201514714022-A
Country	US
Kind code	A1
Filing date	May 15, 2015
Priority date	May 15, 2015
Publication date	Nov 17, 2016
Grant date	—

Abstract

A method and apparatus for monitoring wear of a chamber component is disclosed herein. In one embodiment, a chamber component is provided. The chamber component includes a body including a first material, a second material disposed on the first material, the second material having an exposed surface defining an interior surface of the chamber component, and a wear surface disposed at a wear depth below the exposed surface of the second material, the wear surface comprising a third material having a composition that is different than a composition of the first material and the second material.

First claim

1 . A chamber component, comprising:
a body comprising a first material; a second material disposed on the first material, the second material having an exposed surface defining an interior surface of the chamber component; and a wear surface disposed at a wear depth below the exposed surface of the second material, the wear surface comprising a third material having a composition that is different than a composition of the first material and the second material.

2 . The component of claim 1 , wherein the body comprises a component of a plasma chamber.

3 . The component of claim 2 , wherein the third material comprises a plurality of nanoparticles detectable to provide a positive optical and/or chemical identification of the component.

4 . The component of claim 1 , wherein the wear surface is disposed within the second material.

5 . The component of claim 1 , wherein the third material comprises nanoparticles.

6 . The component of claim 5 , wherein the nanoparticles are dispersed on about 1 percent to about 10 percent of the wear surface.

7 . The component of claim 5 , wherein the nanoparticles comprise an inorganic material.

8 . The component of claim 1 , wherein the first material and the second material are the same.

9 . The component of claim 1 , wherein the first material and the second material are different.

10 . The component of claim 1 , further comprising:
a plurality of wear surfaces disposed at a respective wear depth below surfaces of the second material, wherein each of the wear surfaces comprise the third material.

11 . The component of claim 10 , wherein the third material comprises a nanoparticle layer.

12 . The component of claim 11 , wherein the nanoparticle layer for each of the wear surfaces is the same.

13 . The component of claim 11 , wherein the nanoparticle layer for each of the wear surfaces is different.

14 . A chamber component, comprising:
a body comprising a first material and a second material disposed on the first material; and a wear surface disposed at a wear depth within the second material, the wear surface comprising a plurality of nanoparticles having a composition that is different than a composition of the first material and the second material.

15 . The component of claim 14 , wherein the body comprises a gas distribution plate, a support ring, a focus ring, a support body, an alignment ring, or a substrate support.

16 . The component of claim 14 , wherein the composition of the nanoparticles are detectable to provide a positive optical and/or chemical identification of the component.

17 . The component of claim 14 , wherein the first material and the second material are different.

18 . The component of claim 14 , wherein the nanoparticles are dispersed on about 1 percent to about 10 percent of the wear surface.

19 . The component of claim 14 , wherein the nanoparticles comprise an inorganic material.

20 . A plasma processing system, comprising:
a chamber component comprising a first material and a second material disposed on the first material, the second material having an exposed surface defining an interior surface of the chamber component; and a wear surface disposed at a wear depth below the exposed surface of the second material, the wear surface comprising a plurality of nanoparticles having a composition that is different than a composition of the first material and the second material.

Assignees

• Applied Materials Inc

Inventors

• Larsson Mats
• Yau Wai-Fan

Classifications

• H10P72/0616

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• H10P72/0618 Primary

  using identification means, e.g. labels on substrates or labels on containers · CPC title

• H01J37/32651

  Shields, e.g. dark space shields, Faraday shields · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• H01J37/32935

  Monitoring and controlling tubes by information coming from the object and/or discharge · CPC title