Methods and systems for cleaning deposition systems
US-2020354831-A1 · Nov 12, 2020 · US
Cleaning of reactor or reactor parts by using wet or mechanical methods
Cleaning of reactor or reactor parts by using wet or mechanical methods · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C23C16/4407 |
| Official title | {Cleaning of reactor or reactor parts by using wet or mechanical methods} |
| Display label | Cleaning of reactor or reactor parts by using wet or mechanical methods |
| Total patents | 169 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 11 |
| 2016 | 14 |
| 2017 | 5 |
| 2018 | 9 |
| 2019 | 9 |
| 2020 | 13 |
| 2021 | 19 |
| 2022 | 24 |
| 2023 | 19 |
| 2024 | 22 |
| 2025 | 19 |
| 2026 | 5 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Ex situ coating of chamber components for semiconductor processing
US-2020347497-A1 · Nov 5, 2020 · US
Reactor for Coating Particles in Stationary Chamber with Rotating Paddles
US-2020338517-A1 · Oct 29, 2020 · US
Method of performing a surface treatment on a mounting table, the mounting table and a plasma processing apparatus
US-10738374-B2 · Aug 11, 2020 · US
Apparatus and methods for exhaust cleaning
US-2020197987-A1 · Jun 25, 2020 · US
Component, Method Of Manufacturing The Component, And Method Of Cleaning The Component
US-2020185202-A1 · Jun 11, 2020 · US
Method and apparatus of preparing catalyst for fuel cell
US-2020179893-A1 · Jun 11, 2020 · US
Processing system and processing method
US-10669626-B2 · Jun 2, 2020 · US
Method for recycling substrate process components
US-10662520-B2 · May 26, 2020 · US
Cleaning device and cleaning method
US-2020122207-A1 · Apr 23, 2020 · US
Detoxifying device, method of replacing piping section of detoxifying device, and method of cleaning piping of detoxifying device
US-2020114402-A1 · Apr 16, 2020 · US
Apparatus and methods for exhaust cleaning
US-10618085-B2 · Apr 14, 2020 · US
Wet cleaning inside of gasline of semiconductor process equipment
US-2019352775-A1 · Nov 21, 2019 · US
Semiconductor processing apparatus and a method for processing a substrate
US-2019271078-A1 · Sep 5, 2019 · US
Exhaust system, semiconductor manufacturing equipment, and method for operating the exhaust system
US-10391529-B2 · Aug 27, 2019 · US
Method of removal of sharp corners from diffuser plate
US-2019193233-A1 · Jun 27, 2019 · US
Ex situ coating of chamber components for semiconductor processing
US-2019185999-A1 · Jun 20, 2019 · US
Adhered object removal method
US-2019160629-A1 · May 30, 2019 · US
Method of evaluating cleanliness, method of determining cleaning condition, and method of manufacturing silicon wafer
US-2019106810-A1 · Apr 11, 2019 · US
Automatic cleaning machine for cleaning process kits
US-2019070639-A1 · Mar 7, 2019 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC C23C16/4407?
- CPC C23C16/4407 is the Cooperative Patent Classification code for “Cleaning of reactor or reactor parts by using wet or mechanical methods.”
- How many patents are filed under CPC C23C16/4407 (Cleaning of reactor or reactor parts by using wet or mechanical methods)?
- Our database includes 169 publications tagged with this CPC code.
- Is patent activity under CPC C23C16/4407 growing?
- Publication counts under this code: 22 in 2024 vs 19 in 2025 (latest complete years).