Formaldehyde free electroless copper plating compositions and methods
US-9809883-B2 · Nov 7, 2017 · US
US2021262096A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021262096-A1 |
| Application number | US-202017254741-A |
| Country | US |
| Kind code | A1 |
| Filing date | Feb 13, 2020 |
| Priority date | Jul 17, 2019 |
| Publication date | Aug 26, 2021 |
| Grant date | — |
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An electroless copper plating bath is an electroless copper plating bath with a pH of 5 to 10 containing a hydrazine compound as a reducing agent and not containing formaldehyde. The electroless copper plating bath comprises at least: an amine-based complexing agent or an amine compound; and an aminocarboxylic acid-based complexing agent.
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1 - 6 . (canceled) 7 . An electroless copper plating bath with a pH of 5 to 10 containing a hydrazine compound as a reducing agent and not containing formaldehyde, the electroless copper plating bath comprising at least: an amine-based complexing agent or ammonia; and an aminocarboxylic acid-based complexing agent, wherein the amine-based complexing agent is at least one selected from the group consisting of a diamine compound, a triamine compound, or an aromatic amine compound. 8 . The electroless copper plating bath of claim 7 , wherein the aminocarboxylic acid-based complexing agent is at least one selected from the group consisting of ethylene diamine tetraacetic acid, nitrilotriacetic acid, diethylene triamine pentaacetic acid, hydroxyethyl ethylenediamine triacetic acid, triethylenetetramine hexaacetic acid, 1,3-propanediamine tetraacetic acid, 1,3-diamino-2-hydroxypropane tetraacetic acid, hydroxyethylimino diacetic acid, dihydroxyethyl glycine, glycol ether diamino tetraacetic acid, dicarboxymethyl glutamic acid, ethylenediamine-N,N′-disuccinic acid, or N,N,N′,N′-tetrakis-(2-hydroxypropyl)ethylenediamine. 9 . The electroless copper plating bath of claim 7 , further comprising a carboxylic acid-based complexing agent. 10 . The electroless copper plating bath of claim 9 , wherein the carboxylic acid-based complexing agent is at least one selected from the group consisting of monocarboxylic acid, dicarboxylic acid, or oxycarboxylic acid.
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