Scanning probe microscopy utilizing separable components

Patent metadata

Field	Value
Publication number	US-2018299481-A1
Application number	US-201815952368-A
Country	US
Kind code	A1
Filing date	Apr 13, 2018
Priority date	Apr 13, 2017
Publication date	Oct 18, 2018
Grant date	—

Abstract

According to embodiments, a cantilever probe for use with an atomic force microscope (AFM) or scanning probe microscope (SPM) has a pad of conformable material that facilitates non-permanent adhesion through van der Waals interactions. Such removable probes and probe tips facilitate use of multiple tips or probes, while reducing the need for recalibration or repositioning.

First claim

What is claimed is:

1 . A cantilever probe system comprising:
a cantilever having a proximal end and a distal end, the distal end having a bottom surface; a handle mechanically coupled to the proximal end of the cantilever, the handle having an upper surface; a tip mechanically coupled to the bottom surface of the cantilever; and a pad arranged on the upper surface and configured to reversibly mechanically couple the upper surface to an adjacent driver.

2 . The cantilever probe system of claim 1 , wherein the pad is configured to mechanically couple the upper surface to an adjacent driver via van der Waals interactions.

3 . The cantilever probe system of claim 1 , wherein the pad is a conformable polymer.

4 . The cantilever probe system of claim 1 , wherein the pad comprises polydimethylsiloxane.

5 . The cantilever probe system of claim 1 , wherein the pad is configured to removably adhere the handle and the adjacent driver such that the handle, cantilever, and tip can be removed and replaced in a non-destructive manner.

6 . The cantilever probe system of claim 1 , wherein the tip and the cantilever are integrally formed with one another.

7 . The cantilever probe system of claim 6 , wherein the handle and the cantilever are integrally formed with one another.

8 . A cantilever probe system comprising:
a cantilever having a proximal end and a distal end, the distal end having a bottom surface; a handle mechanically coupled to the proximal end of the cantilever, the handle having an upper surface; a tip mechanically having a base coupled to the bottom surface of the cantilever; and a pad arranged on the bottom surface and configured to reversibly mechanically couple the bottom surface to the base surface.

9 . The cantilever probe system of claim 8 , wherein the pad is configured to mechanically couple the bottom surface to the base surface via van der Waals interactions.

10 . The cantilever probe system of claim 8 , wherein the pad is a conformable polymer.

11 . The cantilever probe system of claim 8 , wherein the pad comprises polydimethylsiloxane.

12 . The cantilever probe system of claim 8 , wherein the pad is configured to removably adhere the bottom surface and the base surface such that the tip can be removed from the cantilever and replaced in a non-destructive manner.

13 . The cantilever probe system of claim 8 , wherein the handle and the cantilever are integrally formed with one another.

14 . A scanning probe microscope (SPM) or atomic force microscope (AFM) system comprising:
an actuator system configured to impart relative motion between a cantilever probe system and a sample, the cantilever probe system including:
a handle defining an upper surface;
a cantilever extending from a proximal end at the handle to a distal end, the distal end defining a bottom surface; and
a tip that includes a base surface and an apex opposite the base surface;
a controller system electrically coupled with the actuator system and configured to control motion and positioning of the actuator system; a driver coupled to the actuator system and having a driver surface mechanically coupled to the handle; and a monitor system electrically coupled with the controller system and arranged to monitor deflection of the cantilever; and a pad arranged to permit for mechanical decoupling at a location between the tip and the driver surface.

15 . The system of claim 14 , the pad is arranged between the base surface of the tip and the bottom surface of the cantilever.

16 . The system of claim 14 , wherein the pad is arranged between the top surface of the handle and the driver surface.

17 . The system of claim 14 , wherein the pad is a conformable polymer.

18 . The cantilever probe system of claim 14 , wherein the pad comprises polydimethylsiloxane.

19 . The cantilever probe system of claim 15 , wherein the pad is configured to removably adhere the bottom surface and the base surface such that the tip can be removed from the cantilever and replaced in a non-destructive manner.

20 . The cantilever probe system of claim 16 , wherein the pad is configured to removably adhere the top surface and the driver surface such that the handle can be removed from the actuator system and replaced in a non-destructive manner.

Assignees

• Bruker Nano Inc

Inventors

• Su Chanmin
• Medalsy Izhar
• Wang Weijie

Classifications

• G01Q70/14 Primary

  Particular materials · CPC title

• G01Q20/02

  by optical means · CPC title

• G01Q70/02

  Probe holders · CPC title

• G01Q60/38

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• G01Q10/06

  Circuits or algorithms therefor · CPC title