Scanning probe microscope and method for examining a surface with a high aspect ratio

Patent metadata

Field	Value
Publication number	US-2017102407-A1
Application number	US-201615386203-A
Country	US
Kind code	A1
Filing date	Dec 21, 2016
Priority date	Jun 26, 2014
Publication date	Apr 13, 2017
Grant date	—

Abstract

The invention relates to a scanning probe microscope, having: (a) a scanning device for scanning a measurement tip over a surface; (b) a cantilever for the measurement tip, wherein the cantilever has a torsion region; (c) wherein the torsion region is configured such that it undergoes torsion when a control signal is applied and thereby pivots the measurement tip; and (d) a control device for outputting the control signal when the measurement tip scans a region of the surface that can be examined more closely with a pivoted measurement tip than with-out pivoting the measurement tip.

First claim

What is claimed is:

1 . A scanning probe microscope, having:
a. a scanning device for scanning a measurement tip over a surface; b. a cantilever for the measurement tip, wherein the cantilever has a torsion region; c. wherein the torsion region is configured such that it undergoes torsion when a control signal is applied and thereby pivots the measurement tip; and d. a control device for outputting the control signal when the measurement tip scans a region of the surface that can be examined more closely with a pivoted measurement tip than without pivoting the measurement tip, wherein the scanning device is configured to extend a distance feedback loop for the z-movement to a z-x-movement, wherein the x-direction indicates a fast scan direction.

2 . The scanning probe microscope as claimed in claim 1 , wherein the torsion region comprises at least in a partial region at least two material layers that are connected to one another and have different coefficients of thermal expansion.

3 . The scanning probe microscope as claimed in claim 1 , wherein at least a partial region of the torsion region comprises implanted material such that the partial region and the torsion region have different coefficients of thermal expansion.

4 . The scanning probe microscope as claimed in claim 2 , wherein the torsion region comprises at least a first region having at least two first material layers, which are connected to one another, for setting a rough pivoting movement of the measurement tip, and at least a second region having at least two second material layers, which are connected to one another, for setting a fine pivoting movement of the measurement tip, or wherein the torsion region comprises at least 2 partial regions with implanted material for setting a rough pivoting movement and a fine pivoting movement of the measurement tip.

5 . The scanning probe microscope as claimed in claim 2 , wherein the region of the at least two material layers, which are connected to one another, or the at least one partial region of implanted material extends over the entire cantilever.

6 . The scanning probe microscope as claimed in claim 1 , wherein the torsion region has a material in an arrangement that is configured to, when the control signal is applied, keep a first part of the arrangement substantially at a first temperature, and to keep a second part of the arrangement substantially at a second temperature, wherein the first and second temperatures differ.

7 . The scanning probe microscope as claimed in claim 1 , furthermore having a laser system which is configured to locally heat the torsion region when the control signal is applied.

8 . The scanning probe microscope as claimed in claim 1 , furthermore having a heating apparatus which is configured to locally heat the torsion region when the control signal is applied.

9 . The scanning probe microscope as claimed in claim 2 , wherein at least one of the at least two material layers, which are connected to one another, or at least a partial region of implanted material comprises a heating resistor.

10 . The scanning probe microscope as claimed in claim 1 , wherein the torsion region comprises at least one piezo actuator.

11 . The scanning probe microscope as claimed in claim 1 , wherein the control device is configured to modulate the control signal to excite the measurement tip to oscillate.

12 . The scanning probe microscope as claimed in claim 1 , wherein the torsion region is configured to pivot the measurement tip at an angle range of ±5°, preferably ±10°, with stronger preference ±15°, and with strongest preference by ±20°.

13 . The scanning probe microscope as claimed in claim 1 , wherein the cantilever and the measurement tip have a resonant frequency in the range of 100 Hz-5 MHz, preferably 500 Hz-1 MHz, with stronger preference 1 kHz-500 kHz, and with strongest preference 2 kHz-200 kHz.

14 . The scanning probe microscope as claimed in claim 1 , wherein the scanning device is configured to add a signal of the z-movement to a signal for the x-movement.

15 . The scanning probe microscope as claimed in claim 1 , wherein the cantilever has an attachment unit in which electrical connections are integrated that lead to the torsion region.

16 . The scanning probe microscope as claimed in claim 1 , wherein the cantilever has at least one sensor for determining the pivoting of the measurement tip.

17 . A method for examining a surface with a high aspect ratio, including:
a. scanning a measurement tip over the surface, wherein the measurement tip is attached to a cantilever, and the cantilever has a torsion region; b. applying a control signal when the measurement tip scans a region of the surface which can be examined more accurately with a pivoted measurement tip than without pivoting the measurement tip, wherein the decision as to whether a region of the surface can be examined more accurately with a pivoted measurement tip than without pivoting the measurement tip is made on the basis of a comparison of a just detected topography of a sample surface with a contour of the measurement tip; and c. subjecting the torsion region to torsion for pivoting the measurement tip.

18 . The method as claimed in claim 17 , also including the step of: on the basis of a detected topography of the surface, deciding whether the measurement tip is pivoted.

19 . The method as claimed in claim 17 , wherein a scanning probe microscope as claimed in claim 1 is used for carrying out at least one of the method steps.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Baur Christof
• Edinger Klaus

Classifications

• G01Q10/06

  Circuits or algorithms therefor · CPC title

• G01Q10/065

  Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself · CPC title

• G01Q10/045 Primary

  Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe · CPC title

• G01Q10/00

  Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe · CPC title

• G01Q70/14

  Particular materials · CPC title