Apparatus and method for wafer alignment

Patent metadata

Field	Value
Publication number	US-12512356-B2
Application number	US-202218085354-A
Country	US
Kind code	B2
Filing date	Dec 20, 2022
Priority date	Dec 20, 2022
Publication date	Dec 30, 2025
Grant date	Dec 30, 2025

Abstract

A method includes providing a carrier substrate having a die bonded thereto, where the die includes a first alignment mark on a first surface. The method includes positioning a target substrate with a second surface on a substrate stage, where the target substrate includes a second alignment mark on the second surface. The method includes positioning the carrier substrate with respect to a die handler, where the die handler includes a third alignment mark. The method includes coupling the die to the die handler, where the step of coupling includes aligning the first alignment mark with the third alignment mark. The method includes positioning the coupled die and the die handler over the target substrate, where the step of positioning includes aligning the second alignment mark with at least one of the first alignment mark and the third alignment mark. The method includes bonding the first surface with the second surface.

First claim

What is claimed is:

1 . A method, comprising:
positioning a target substrate on a substrate stage, the target substrate having a first alignment mark; providing a die with a second alignment mark; positioning the die with respect to a die handler, wherein the die handler includes a third alignment mark, and wherein the die is aligned with the die handler using the second alignment mark on the die and the third alignment mark on the die handler; transporting the die to the target substrate using the die handler, wherein the die and the die handler are aligned with the target substrate using the first alignment mark on the target substrate and at least one of the second alignment mark on the die or the third alignment mark on the die handler; and bonding the die with the target substrate.

2 . The method of claim 1 , comprising aligning the second alignment mark with the third alignment mark, wherein the aligning the second alignment mark with the third alignment mark comprises:
measuring a first position of the second alignment mark; measuring a second position of the third alignment mark; and aligning the die with the die handler based on the measured first position and second position.

3 . The method of claim 1 , further comprising performing at least one of an optical analysis, a diffraction analysis, and a scatterometry analysis for aligning the second alignment mark with the third alignment mark or aligning the first alignment mark with at least one of the second alignment mark or the third alignment mark.

4 . The method of claim 1 , wherein the substrate stage includes a fourth alignment mark, and wherein positioning the target substrate includes aligning the first alignment mark with the fourth alignment mark.

5 . The method of claim 1 , wherein the die further includes a fifth alignment mark, and wherein coupling the die to the die handler includes aligning the fifth alignment mark with the third alignment mark.

6 . The method of claim 1 , wherein the die further includes a fifth alignment mark, and wherein positioning the coupled die and the die handler over the target substrate includes aligning the first alignment mark with one or combinations of: the third alignment mark, the second alignment mark, and the fifth alignment mark.

7 . The method of claim 1 , wherein the die further includes a fifth alignment mark positioned diagonally from the second alignment mark, such that coupling the die to the die handler results in the fifth alignment mark to be offset from the third alignment mark.

8 . The method of claim 1 , wherein a surface of the target substrate includes a region configured to receive the die, and wherein the first alignment mark is positioned at a corner of the region.

9 . A method, comprising:
loading a target substrate onto a substrate stage, wherein the target substrate includes a first alignment mark; providing a die having a second alignment mark; coupling the die with a die handler, wherein the die handler includes a third alignment mark, and wherein the die is aligned with the die handler using the second alignment mark on the die and the third alignment mark on the die handler; transporting the die to the target substrate using the die handler, wherein the die and the die handler are aligned with the target substrate using the first alignment mark on the target substrate and at least one of the second alignment mark on the die or the third alignment mark on the die handler; and performing a bonding process to fuse the target substrate with the die.

10 . The method of claim 9 , wherein the substrate stage includes a fourth alignment mark, and wherein the step of loading the target substrate includes performing a third alignment process to align the target substrate with the substrate stage using the first alignment mark and the fourth alignment mark.

11 . The method of claim 9 , comprising performing an alignment process to align the die with the die handler using the second alignment mark and the third alignment mark, wherein the performing the alignment process comprises:
measuring a first position of the second alignment mark; measuring a second position of the third alignment mark; and aligning the die with the die handler based on the measured first position and second position.

12 . The method of claim 9 , further comprising performing at least one of an optical analysis, a diffraction analysis, and a scatterometry analysis for performing one or more alignment processes.

13 . The method of claim 9 , wherein the die further includes a fifth alignment mark positioned diagonally from the second alignment mark, such that performing a first alignment process results in the fifth alignment mark to be offset from the third alignment mark.

14 . The method of claim 9 , wherein the die further includes a fifth alignment mark, and wherein performing a first alignment process results in an alignment between the fifth alignment mark and the third alignment mark.

15 . The method of claim 9 , wherein the die further includes a fifth alignment mark, and wherein performing a second alignment process results in an alignment between the first alignment mark and one or combinations of: the second alignment mark, the third alignment mark, and the fifth alignment mark.

16 . The method of claim 9 , wherein a first surface of the target substrate includes a region configured to receive the die, and wherein the first alignment mark is positioned at a corner of the region.

17 . An apparatus, comprising:
a substrate stage configured to receive and move a target substrate, wherein the substrate stage includes a first alignment mark; an alignment detection module configured to facilitate an alignment process of the target substrate; a die handler configured to transport a die having a second alignment mark to the target substrate, wherein the die handler includes a third alignment mark, wherein the die is aligned with the die handler using the second alignment mark on the die and the third alignment mark on the die handler, and wherein the die and the die handler are aligned with the target substrate using the first alignment mark on the target substrate and at least one of the second alignment mark on the die or the third alignment mark on the die handler.

18 . The apparatus of claim 17 , wherein the alignment detection module is configured to detect alignment of the target substrate by optical inspection, diffraction, scatterometry, interferometry, or combinations thereof.

19 . The apparatus of claim 17 , wherein the die handler includes a first straight portion connected to a second straight portion by a curved portion to form a U-shape, and wherein the third alignment mark is disposed on one of the first straight portion or the second straight portion of the die handler.

20 . The apparatus of claim 17 , wherein the substrate stage is a first substrate stage, wherein the apparatus further comprises a second substrate stage coupled to the first substrate stage, and wherein the second substrate stage is configured to bond the die to the target substrate.

Assignees

• Tokyo Electron Ltd

Inventors

• Power David
• Conklin David
• Schepis Anthony
• Weloth Andrew
• Devilliers Anton

Classifications

• H10W46/607

  Located on parts of packages, e.g. on encapsulations or on package substrates · CPC title

• H10W46/101

  characterised by the type of information, e.g. logos or symbols · CPC title

• H10P72/7432

  used in a transfer process involving transfer directly from an origin substrate to a target substrate without use of an intermediate handle substrate · CPC title

• H10P72/0608

  of substrates stored in a container, a magazine, a carrier, a boat or the like · CPC title

• H10P72/74

  using temporarily an auxiliary support · CPC title