Mask assembly and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-12358080-B2
Application number	US-202117392558-A
Country	US
Kind code	B2
Filing date	Aug 3, 2021
Priority date	Nov 18, 2020
Publication date	Jul 15, 2025
Grant date	Jul 15, 2025

Abstract

A mask assembly includes: a mask frame provided with a first opening defined through a center portion thereof and including an outer frame surrounding the first opening and provided with at least one concave portion defined therein; a mask body disposed to correspond to the first opening and provided with second openings defined therethrough and having an area smaller than the first opening; a first sub-mask disposed on the mask body, provided with third openings defined therethrough over an entire area thereof and having an area smaller than each of the second openings, and including a metal material; a second sub-mask disposed on the first sub-mask, provided with fourth openings defined therethrough over an entire area thereof and having an area smaller than each of the third openings in a plane, and including a polymer material; and a welding portion disposed on the second sub-mask in the concave portion.

First claim

What is claimed is:

1. A mask assembly comprising:
a mask frame provided with a first opening defined through a center portion thereof and comprising an outer frame surrounding the first opening and provided with at least one concave portion defined therein;
a mask body disposed to correspond to the first opening and provided with a plurality of second openings defined therethrough and having an area smaller than the first opening in a plan view;
a first sub-mask disposed on the mask body, provided with a plurality of third openings defined therethrough over an entire area thereof, and comprising a metal material, wherein each of the plurality of third openings has an area smaller than each of the second openings in the plan view;
a second sub-mask disposed on the first sub-mask, provided with a plurality of fourth openings defined therethrough over an entire area thereof, and comprising a polymer material, wherein each of the plurality of fourth openings has an area smaller than each of the third openings in the plan view; and
a welding portion disposed on the second sub-mask and in each of the at least one concave portion.

2. The mask assembly of claim 1 , wherein the second sub-mask comprises polyimide.

3. The mask assembly of claim 1 , wherein the second sub-mask has a thermal expansion coefficient equal to or smaller than about 2 parts per million per degree in Celsius (ppm/° C.).

4. The mask assembly of claim 1 , wherein the fourth openings are defined to correspond to the third openings, respectively.

5. The mask assembly of claim 1 , wherein the second openings overlap the third openings in the plan view.

6. The mask assembly of claim 1 , wherein the first sub-mask comprises:
a plurality of first metal lines extending in a first direction and arranged in a second direction perpendicular to the first direction; and
a plurality of second metal lines extending in the second direction and arranged in the first direction, and
each of the first metal lines crosses each of the second metal lines.

7. The mask assembly of claim 6 , wherein each of the first metal lines is interlaced with the second metal lines by alternately passing over and under, and each of the second metal lines is interlaced with the first metal lines by alternately passing over and under.

8. The mask assembly of claim 1 , wherein each of the third openings has an area equal to or greater than an area of each of the fourth openings in the plan view.

9. The mask assembly of claim 1 , wherein the first sub-mask has a thickness equal to or greater than about 2 μm and equal to or smaller than about 5 μm.

10. The mask assembly of claim 1 , wherein the second sub-mask has a thickness equal to or greater than about 5 μm and equal to or smaller than about 30 μm.

11. The mask assembly of claim 1 , wherein each of the at least one concave portion has a depth which is greater than a sum of a thickness of the first sub-mask, a thickness of the second sub-mask, and a thickness of the welding portion in a thickness direction of the outer frame.

12. The mask assembly of claim 1 , wherein each of the at least one concave portion comprises a curved surface portion in a cross-section.

13. A mask assembly comprising:
a mask frame provided with a first opening defined through a center portion thereof and comprising an outer frame surrounding the first opening and provided with at least one concave portion defined therein;
a mask body disposed to correspond to the first opening and provided with a plurality of second openings defined therethrough and having an area smaller than the first opening in a plan view;
a first sub-mask disposed on the mask body, provided with a plurality of third openings defined therethrough over an entire area thereof, and comprising a metal material, wherein each of the plurality of third openings has an area smaller than each of the second openings in the plan view;
a second sub-mask disposed on the first sub-mask, provided with a plurality of fourth openings defined therethrough over an entire area thereof, and comprising a polymer material, wherein each of the plurality of fourth openings has an area smaller than each of the third openings in the plan view; and
at least one welding portion disposed on the second sub-mask,
wherein the outer frame comprises:
a first portion which overlaps the first sub-mask, the second sub-mask, and the welding portion in the plan view; and
a second portion which overlaps the first sub-mask and the second sub-mask and does not overlap the welding portion in the plan view,
wherein the first portion has a thickness smaller than a thickness of the second portion.

14. The mask assembly of claim 13 , wherein the at least one concave portion is provided with plural, the first portion is provided with the plurality of concave portions recessed in a thickness direction, the welding portion is provided in plural, and the welding portions correspond to the plurality of concave portions, respectively.

15. The mask assembly of claim 13 , wherein the second sub-mask comprises polyimide.

16. The mask assembly of claim 13 , wherein the mask frame and the mask body comprise a same metal material.

17. The mask assembly of claim 16 , wherein the metal material is Invar.

Assignees

• Samsung Display Co Ltd

Inventors

• Moon Minho
• Moon Youngmin
• Song Seungyong
• Im Sungsoon

Classifications

• B05C21/005

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title

• C03C2218/33

  by etching · CPC title

• B23K2101/24

  Frameworks · CPC title

• C03C2218/34

  Masking · CPC title

• B23K2103/02

  Iron or ferrous alloys · CPC title