Mask plate and method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-10787729-B2
Application number	US-201715576524-A
Country	US
Kind code	B2
Filing date	May 10, 2017
Priority date	Jun 29, 2016
Publication date	Sep 29, 2020
Grant date	Sep 29, 2020

Abstract

A mask plate and a method for manufacturing the same are provided. The mask plate comprises a first sub-mask plate and a second sub-mask plate stacked with each other, the first sub-mask plate is provided with at least one first opening therein, a size and a shape of the first opening correspond to those of a target display panel; the second sub-mask plate is provided with a second opening region, which covers at least one of the at least one first opening and includes a plurality of second openings. Since it is only required to ensure that the sizes and shapes of the first openings are the same as those of the target display panels respectively, and it is unnecessary to further manufacture openings for forming pixel patterns, comparing with the existing mask plate, the manufacturing process of the present disclosure is more simple and the manufacturing cost is lower.

First claim

The invention claimed is:

1. A mask plate comprising a first sub-mask plate and a second sub-mask plate stacked with each other, wherein
the first sub-mask plate is provided with a plurality of first openings therein, a size and a shape of each of the plurality of first openings are the same as those of a target display panel;
the second sub-mask plate is provided with a plurality of second opening regions, each of which covers a plurality of first openings and comprises a plurality of second openings, and
the second sub-mask plate comprises a plurality of parts each with a same strip shape and a same size, the plurality of parts are separate and spliced together to form the second sub-mask plate, each of the plurality of parts comprises at least one of the plurality of second opening regions; and
each of the plurality of parts is bonded to the first sub-mask at two opposite sides thereof.

2. The mask plate of claim 1 , wherein the shape of the first opening is the same as that of the target display panel, and an area of the first opening is larger than that of the target display panel.

3. The mask plate of claim 2 , wherein a distance from an edge of an orthographic projection of the first opening on a backboard glass to a closest edge of the target display panel on the backboard glass corresponding to the first opening ranges from 75 μm to 150 μm.

4. The mask plate of claim 1 , wherein the shape of each of the plurality of first openings is circular and a shape of each of the plurality of second opening regions is a rectangle.

5. The mask plate of claim 1 , wherein the second sub-mask plate is provided with a plurality of second opening regions, and shapes of the second opening regions are the same with each other.

6. The mask plate of claim 5 , wherein sizes of the second opening regions are the same with each other.

7. The mask plate of claim 1 , wherein the second sub-mask plate is stacked on the first sub-mask plate.

8. The mask plate of claim 1 , wherein outline dimensions of the first sub-mask plate and the second sub-mask plate are the same with each other, and shapes of the first sub-mask plate and the second sub-mask plate are the same with each other.

9. The mask plate of claim 1 , further comprising a frame, wherein the first sub-mask plate is welded to the frame through first weld spots, the parts forming the second sub-mask plate are welded to the first sub-mask plate through second weld spots.

10. The mask plate of claim 9 , wherein the first weld spots are arranged at positions on a periphery of the first sub-mask plate, the second weld spots are arranged at first sides and second sides of the parts forming the second sub-mask plate, and wherein the first sides and the second sides are sides of the parts of the second sub-mask plate, which are not used for splicing.

11. The mask plate of claim 10 , wherein a distance between the first weld spot and the second weld spot closest to the first weld spot is larger than 2 mm.

12. The mask plate of claim 1 , wherein the first sub-mask plate and the second sub-mask plate comprise metal-invar alloy material.

13. The mask plate of claim 2 , wherein the first sub-mask plate and the second sub-mask plate comprise metal-invar alloy material.

14. The mask plate of claim 1 , wherein a thickness of the first sub-mask plate ranges from 100 μm to 150 μm, and a thickness of the second sub-mask plate ranges from 20 μm to 40 μm.

15. A method for manufacturing mask plate, comprising:
forming a first sub-mask plate, wherein the first sub-mask plate is provided with a plurality of first openings therein, a size and a shape of each of the plurality of first openings are the same as those of a target display panel;
forming a second sub-mask plate, wherein the second sub-mask plate is provided with a plurality of second opening regions, each of which covers a plurality of first opening and comprises a plurality of second openings;
bonding the first sub-mask plate to a frame; and
bonding the second sub-mask plate to the first sub-mask plate, wherein
the second sub-mask plate comprises a plurality of parts each with a same strip shape and a same size, the plurality of parts are separate and spliced together to form the second sub-mask plate, each of the plurality of parts comprises at least one of the plurality of second opening regions; and
each of the plurality of parts is bonded to the first sub-mask at two opposite sides thereof.

16. The method of claim 15 , wherein bonding the first sub-mask plate to the frame further comprises:
bonding the first sub-mask plate to the frame, and
bonding the second sub-mask plate to the first sub-mask plate comprises:
aligning the second sub-mask plate to the first sub-mask plate; and
welding the second sub-mask plate to the first sub-mask plate.

17. The method of claim 16 , wherein aligning the second sub-mask plate to the first sub-mask plate further comprises:
aligning first alignment holes at edges and corners of the first opening in the first sub-mask plate to second alignment holes in the second opening region of the second sub-mask plate.

18. The method of claim 15 , wherein forming the second sub-mask plate further comprises:
splicing a plurality of parts with same sizes and same shapes together to form the second sub-mask plate.

19. The method of claim 15 , wherein the shape of the first opening is circular and the shape of the second opening region is a rectangle.

Assignees

• Boe Technology Group Co Ltd
• Ordos Yuansheng Optoelectronics Co Ltd

Inventors

• Bai Shanshan

Classifications

• B05C21/005

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• C23C14/042 Primary

  using masks · CPC title

• H01L51/0011

  Electricity · mapped topic

• H10K71/166

  using selective deposition, e.g. using a mask · CPC title