Mask frame assembly and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-9982333-B2
Application number	US-201514637222-A
Country	US
Kind code	B2
Filing date	Mar 3, 2015
Priority date	Jun 23, 2014
Publication date	May 29, 2018
Grant date	May 29, 2018

Abstract

A mask frame assembly for manufacturing a display device, and a method of manufacturing the mask frame assembly are disclosed. In one aspect, the mask frame assembly includes a frame having at least one opening portion defined therein. The mask frame assembly further includes a polymer film having a plurality of slits defined therein and combined to the frame. In another aspect, the method includes coating a polymer solution on a glass and drying and hardening the polymer solution so as to form a polymer film. The method also includes combining a frame to the polymer film, desorbing the glass from the polymer film and processing a plurality of slits on the polymer film.

First claim

What is claimed is:

1. A method of manufacturing a mask frame assembly for a display device, the method comprising:
coating a polymer solution on a glass;
drying and hardening the polymer solution so as to form a polymer film;
combining a frame to the polymer film;
desorbing the glass from the polymer film; and
processing a plurality of slits on the polymer film.

2. The method of claim 1 , wherein the combining comprises coating an adhesive layer on the polymer film, and combining the frame to the adhesive layer.

3. The method of claim 1 , wherein the processing uses laser patterning and/or light exposure to process the slits.

4. The method of claim 1 , wherein the polymer film is formed before the polymer solution is completely dried and hardened, and wherein the polymer film is combined to the frame while the polymer solution is being dried and hardened.

5. The method of claim 1 , wherein the polymer film has a plurality of pattern portions defined therein, wherein the frame has a plurality of opening portions defined therein, and wherein the number of the pattern portions is the same as the number of the opening portions.

6. The method of claim 5 , wherein the lengths and widths of the opening portions are substantially the same.

7. The method of claim 5 , wherein the combining comprises aligning the frame with the polymer film such that each of the opening portions is formed substantially directly below the corresponding pattern portion.

8. The method of claim 1 , wherein the thickness of the polymer film is in the range from about 10 μm to about 50 μm.

Assignees

• Samsung Display Co Ltd

Inventors

• Nam Kie Hyun
• Kim Hye Dong
• An Sung Guk

Classifications

• G03F1/86

  by charged particle beam [CPB] · CPC title

• G03F1/68

  Preparation processes not covered by groups G03F1/20 - G03F1/50 · CPC title

• G03F1/64

  characterised by the frames, e.g. structure or material, including bonding means therefor · CPC title

• G03F1/62

  Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof · CPC title

• G03F1/60

  Substrates · CPC title