Deposition mask assembly for display devices

Patent metadata

Field	Value
Publication number	US-11545626-B2
Application number	US-201815867918-A
Country	US
Kind code	B2
Filing date	Jan 11, 2018
Priority date	Jan 12, 2017
Publication date	Jan 3, 2023
Grant date	Jan 3, 2023

Abstract

A deposition mask assembly for manufacturing a plurality of display devices includes a frame having an opening area, a first open mask disposed on the frame and having a first body portion defining a plurality of patterns overlapping the opening area, and a second open mask disposed on the first open mask and having a second body portion defining a plurality of opening portions overlapping the patterns of the first open mask, in which each of the patterns includes an auxiliary pattern spaced apart from the first body portion and a first bridge pattern connecting the first body portion and the auxiliary pattern.

First claim

What is claimed is:

1. A deposition mask assembly comprising:
a frame having an opening area;
a first open mask disposed on the frame, the first open mask having a first body portion defining a plurality of patterns, each of the patterns overlapping the opening area and having an opening through which a deposition material is configured to pass; and
a second open mask disposed on the first open mask, the second open mask having a second body portion defining a plurality of opening portions overlapping the patterns,
wherein each of the patterns comprises an auxiliary pattern within the corresponding opening and spaced apart from the first body portion, and a first bridge pattern connecting the first body portion and the auxiliary pattern,
wherein the first open mask is disposed between the frame and the second open mask, and
wherein a total opening area of the first open mask is less than a total opening area of the second open mask.

2. The deposition mask assembly of claim 1 , wherein the shapes of the first body portion and the second body portion are substantially the same.

3. The deposition mask assembly of claim 1 , wherein the auxiliary pattern has one of a circular shape, an elliptical shape, and a polygonal shape.

4. The deposition mask assembly of claim 1 , wherein the first bridge pattern comprises a plurality of lines.

5. The deposition mask assembly of claim 4 , wherein the lines connected to opposing sides of the auxiliary pattern are disposed along substantially the same imaginary straight line.

6. The deposition mask assembly of claim 5 , wherein each of the patterns further comprises a second bridge pattern parallel to the first bridge pattern.

7. The deposition mask assembly of claim 4 , wherein the lines of the first bridge pattern are substantially parallel to each other.

8. The deposition mask assembly of claim 4 , wherein the lines of the first bridge pattern extend longitudinally in directions that intersect each other.

9. The deposition mask assembly of claim 8 , wherein the first bridge pattern has a lattice shape.

10. The deposition mask assembly of claim 4 , wherein a ratio of a thickness of the second open mask to a width of the first bridge pattern is in a range from about 1:1 to about 1:10.

11. The deposition mask assembly of claim 10 , wherein the second open mask has a thickness in a range from about 50 μm to about 200 μm.

12. The deposition mask assembly of claim 1 , wherein the auxiliary pattern comprises a first auxiliary pattern and a second auxiliary pattern.

13. The deposition mask assembly of claim 12 , wherein the first auxiliary pattern has a size different from a size of the second auxiliary pattern when viewed in plan.

14. The deposition mask assembly of claim 1 , wherein each of the first open mask and the second open mask comprises one of stainless steel (SUS), a nickel steel alloy, nickel (Ni), cobalt (Co), a nickel alloy, and a nickel-cobalt alloy.

15. The deposition mask assembly of claim 14 , wherein the first open mask and the second open mask comprise substantially the same material.

16. The deposition mask assembly of claim 15 , wherein the first open mask and the second open mask are integrally formed.

17. The deposition mask assembly of claim 1 , wherein the auxiliary pattern and the first bridge pattern are formed on the same plane as the first open mask.

18. The deposition mask assembly of claim 1 , wherein the opening of each of the plurality of patterns defined by the first body portion has an area substantially the same in a plan view as an area of each corresponding one of the opening portions defined by the second body portion.

19. The deposition mask assembly of claim 1 , wherein a portion of the first body portion is disposed between the auxiliary patterns of adjacent patterns.

20. A deposition apparatus comprising:
a deposition source;
a deposition mask assembly; and
a display substrate to which the deposition source is deposited, the display substrate having a first area configured not to be deposited with material from the deposition source and a second area configured to be deposited with material from the deposition source,
wherein:
the deposition mask assembly comprises:
a frame having an opening area;
a first open mask disposed on the frame, the first open mask having a plurality of patterns overlapping the opening area and a first body portion surrounding the patterns, each of the patterns overlapping the opening area and having an opening through which the deposition source is configured to pass; and
a second open mask disposed on the first open mask, the second open mask having a plurality of opening portions overlapping the patterns of the first open mask and a second body portion surrounding the opening portions;

each of the patterns comprises:
an auxiliary pattern within the corresponding opening, spaced apart from the first body portion, and overlapping the first area; and
a first bridge pattern connecting the first body portion and the auxiliary pattern, and overlapping the second area;

the first open mask is disposed between the frame and the second open mask; and
a total opening area of the first open mask is less than a total opening area of the second open mask.

21. The deposition apparatus of claim 20 , wherein a ratio of a thickness of the second open mask to a width of the first bridge pattern is in a range from about 1:1 to about 1:10.

22. The deposition apparatus of claim 21 , wherein a portion of the display substrate overlapping the first bridge pattern is configured to be deposited with material from the deposition source.

23. The deposition apparatus of claim 20 , wherein the auxiliary pattern has a width greater than a width of the first bridge pattern.

24. A deposition mask assembly comprising:
a frame having an opening area;
a first open mask disposed on the frame, the first open mask having a first body portion defining a plurality of patterns, each of the patterns overlapping the opening area and having an opening through which a deposition material is configured to pass; and
a second open mask disposed on the first open mask, the second open mask having a second body portion defining a plurality of opening portions overlapping the patterns,
wherein each of the patterns comprises an auxiliary pattern within the corresponding opening and spaced apart from the first body portion, and a first bridge pattern connecting the first body portion and the auxiliary pattern,
wherein no opening is defined in the auxiliary pattern, and
wherein a total opening area of the first open mask is less than a total opening area of the second open mask.

25. The deposition mask assembly of claim 24 , wherein a width of the first bridge pattern is less than a width of the auxiliary pattern.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Jinyeong
• Jeon Haseok

Classifications

• C23C16/042

  using masks · CPC title

• H01L51/0011 Primary

  Electricity · mapped topic

• C23C14/042 Primary

  using masks · CPC title

• H01L51/56

  Electricity · mapped topic

• H10K71/40

  Thermal treatment, e.g. annealing in the presence of a solvent vapour · CPC title