Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system

Patent metadata

Field	Value
Publication number	US-12249478-B2
Application number	US-202117546952-A
Country	US
Kind code	B2
Filing date	Dec 9, 2021
Priority date	Jun 13, 2019
Publication date	Mar 11, 2025
Grant date	Mar 11, 2025

Abstract

A particle beam system includes a multi-beam particle source and a magnetic multi-deflector array. The magnetic multi-deflector array includes a coil that is arranged such that, during use of the particle beam system, a multiplicity of individual particle beams substantially passes through the first coil so that they are deflected in an azimuthal direction to correct an azimuthal telecentricity error of the particle beam system so that the individual particle beams telecentrically impinge on an object plane of the particle beam system.

First claim

What is claimed is:

1. A particle beam system, comprising:
a multi-beam particle source configured to generate a multiplicity of charged individual particle beams; and
a magnetic multi-deflector array:
a magnetically conductive multi-aperture plate comprising a multiplicity of openings, the multi-aperture plate being in a beam path of the individual particle beams so that different individual particle beams substantially pass through different openings in the multi-aperture plate;
a magnetically conductive first aperture plate comprising an individual opening, the first aperture plate being in the beam path of the individual particle beams so that a multiplicity of the individual particle beams substantially pass through the individual opening in the first aperture plate; and
a first coil configured to generate a magnetic field,

wherein:
the multi-aperture plate and the first aperture plate are connected to each other to define a first cavity therebetween;
the first cavity comprises an interior and inner sidewalls that define an outer boundary of the interior of the first cavity in a direction perpendicular to an optical axis of the particle beam system; and
the first coil is disposed on the inner sidewalls of the first cavity so that the first coil is rotationally symmetric around an optical axis of the particle beam system;
during use of the particle beam system, the multiplicity of individual particle beams substantially passes through the first coil so that the individual particle beams are deflected in an azimuthal direction to correct an azimuthal telecentricity error of the particle beam system so that the individual particle beams telecentrically impinge on an object plane of the particle beam system.

2. The particle beam system of claim 1 , wherein the individual opening in the first aperture plate comprises a midpoint that coincides with an optical axis of the particle beam system.

3. The particle beam system of claim 1 , wherein the multi-aperture plate is upstream of the first aperture plate along the beam path of the individual particle beams.

4. The particle beam system of claim 1 , wherein the multi-aperture plate is downstream of the first aperture plate along the beam path of the individual particle beams.

5. The particle beam system of claim 1 , wherein the multi-deflector array further comprises:
a magnetically conductive second aperture plate comprising an individual opening, the second aperture plate being in the beam path of the individual particle beams so that the individual particle beams substantially pass through the individual opening of the second aperture plate; and
a second coil configured to generate a magnetic field,
wherein:
the multi-aperture plate and the second aperture plate are connected to each other to define a second cavity therebetween;
the second coil is in the second cavity so that the individual particle beams substantially pass through the second coil, and
a winding direction of the second coil runs counter to a winding direction of the first coil.

6. The particle beam system of claim 1 , wherein at least one of the following holds:
a magnetic permeability of at least one plate selected from the group consisting of the multi-aperture plate and the first aperture plate is at least 500; and
a magnetically conductive coating of at least one plate selected from the group consisting of the multi-aperture plate and the first aperture plate has a magnetic permeability of at least 500.

7. The particle beam system of claim 1 , wherein at least one plate selected from the group consisting of the multi-aperture plate and the first aperture plate comprises at least one material selected from the group consisting of iron, nickel, cobalt, ferrite, mu-metal, and nanocrystalline metal.

8. The particle beam system of claim 1 , wherein at least one plate selected from the group consisting of the multi-aperture plate and the first aperture plate has a thickness of at least 30 μm.

9. The particle beam system of claim 1 , wherein at least one plate selected from the group consisting of the multi-aperture plate and the first aperture plate comprises a coating having a thickness of least 30 μm.

10. The particle beam system of claim 1 , wherein at least one of the following holds:
the openings of the multi-aperture plate are circular; and
the individual opening of the first aperture plate is circular.

11. The particle beam system of claim 1 , wherein a diameter of the openings in the multi-aperture plate is at most ≤150 μm.

12. The particle beam system of claim 1 , wherein an arrangement of the openings in the multi-aperture plate is hexagonal.

13. The particle beam system of claim 1 , wherein the first coil is configured to generate a strength of a magnetic field of at most 5 mT.

14. The particle beam system of claim 1 , further comprising a multi-coil array configured to locally individually set a magnetic field near the openings of the multi-aperture plate, wherein the multi-coil array is outside the first cavity so that the individual particle beams pass through the coils of the multi-coil array.

15. The particle beam system of claim 1 , wherein:
the individual opening in the first aperture plate comprises a midpoint that coincides with an optical axis of the particle beam system; and
the multi-aperture plate is upstream of the first aperture plate along the beam path of the individual particle beams.

16. The particle beam system of claim 1 , wherein:
the individual opening in the first aperture plate comprises a midpoint that coincides with an optical axis of the particle beam system; and
the multi-aperture plate is downstream of the first aperture plate along the beam path of the individual particle beams.

17. The particle beam system of claim 1 , wherein:
the individual opening in the first aperture plate comprises a midpoint that coincides with an optical axis of the particle beam system;
the multi-deflector array further comprises:
a magnetically conductive second aperture plate comprising an individual opening, the second aperture plate being in the beam path of the individual particle beams so that the individual particle beams substantially pass through the individual opening of the second aperture plate; and
a second coil configured to generate a magnetic field,

the multi-aperture plate and the second aperture plate are connected to each other to define a second cavity therebetween;
the second coil is in the second cavity so that the individual particle beams substantially pass through the second coil; and
a winding direction of the second coil runs counter to a winding direction of the first coil.

18. The particle beam system of claim 1 , wherein:
the individual opening in the first aperture plate comprises a midpoint that coincides with an optical axis of the particle beam system; and
at least one of the following holds:
a magnetic permeability of at least one plate selected from the group consisting of the multi-aperture plate and the first aperture plate is at least 500; and
a magnetically conductive coating of at least one plate selected from the group consisting of the multi-aperture plate and the first aperture plate has a magnetic permeability of at least 500.

19. The particle beam system of claim 1 , wherein:
the individual opening in the first aperture plate comprises a midpoint that coincides with an optical axis of the particle beam system; and
at least one plate selected from the group consisting of the multi-aperture plate and the

Assignees

• Carl Zeiss Multisem Gmbh

Inventors

• Fritz Hans
• Major András G
• Zeidler Dirk
• Thoma Arne
• Jacobi Joerg

Classifications

• H01J2237/152

  Magnetic means · CPC title

• H01J2237/0453

  multiple apertures · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/09

  Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields · CPC title

• H01J2237/2817

  Pattern inspection · CPC title