Smart camera substrate

Patent metadata

Field	Value
Publication number	US-11736818-B2
Application number	US-202217668363-A
Country	US
Kind code	B2
Filing date	Feb 9, 2022
Priority date	Sep 15, 2020
Publication date	Aug 22, 2023
Grant date	Aug 22, 2023

Abstract

Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.

First claim

What is claimed is:

1. A diagnostic substrate, comprising:
a baseplate, the baseplate having a global plane; and
a plurality of image sensors on the baseplate, wherein the plurality of image sensors comprises circumferentially alternating first image sensors and second image sensors, each of the first image sensors having a field of view in a direction at a first angle with respect to the global plane of the baseplate, and each of the second image sensors having a field of view in a direction at a second angle with respect to the global plane of the baseplate, the second angle different than the first angle.

2. The diagnostic substrate of claim 1 , further comprising:
a printed circuit board (PCB) on the baseplate.

3. The diagnostic substrate of claim 2 , further comprising:
a controller on the baseplate, wherein the PCB electrically couples the controller to the plurality of image sensors.

4. The diagnostic substrate of claim 1 , further comprising:
a light source.

5. The diagnostic substrate of claim 4 , wherein the light source comprises a plurality of light emitting diodes (LEDs).

6. The diagnostic substrate of claim 5 , wherein the plurality of LEDs are individually controllable or controllable in groups.

7. The diagnostic substrate of claim 1 , further comprising:
a battery.

8. The diagnostic substrate of claim 7 , wherein the battery is housed within a hermetically sealed enclosure.

9. The diagnostic substrate of claim 8 , further comprising:
a pressure sensor or a volatile organic compound (VOC) sensor within the hermetically sealed enclosure.

10. The diagnostic substrate of claim 1 , further comprising:
a temperature sensor or a vibration sensor.

11. The diagnostic substrate of claim 3 , further comprising:
a diffuser cover over the baseplate, the PCB, and the controller.

12. The diagnostic substrate of claim 1 , wherein a thickness of the diagnostic substrate is less than 10 mm.

13. The diagnostic substrate of claim 1 , wherein the image sensors allow for imaging in the visible spectrum and thermal imaging.

14. A method of imaging the interior of a chamber, comprising:
providing a diagnostic substrate, wherein the diagnostic substrate comprises a plurality of image sensors and a light source, the image sensors on a base plate having a global plane, wherein the plurality of image sensors comprises circumferentially alternating first image sensors and second image sensors, each of the first image sensors having a field of view in a direction at a first angle with respect to the global plane of the baseplate, and each of the second image sensors having a field of view in a direction at a second angle with respect to the global plane of the baseplate, the second angle different than the first angle;
inserting the diagnostic substrate into the chamber, wherein the chamber is maintained at a sub-atmospheric pressure;
turning on the light source; and
obtaining images of an interior of the chamber with the plurality of image sensors.

15. The method of claim 14 , wherein a multiplexer architecture is used to obtain images from each of the image sensors.

16. The method of claim 14 , further comprising:
stitching two or more of the obtained images together to provide a stitched image.

17. The method of claim 14 , further comprising:
logging temperature levels at given times to predict failure of a battery or conditions that trigger replacement of the battery.

18. The method of claim 14 , wherein machine learning is applied to image data from the interior of the chamber to recognize chamber drift over time and/or to trigger cleaning or other maintenance items.

Assignees

• Applied Materials Inc

Inventors

• Ummethala Upendra
• Kraus Philip
• Berding Keith
• Erickson Blake
• Tae Patrick
• Holeyannavar Devendra Channappa
• Nara Shivaraj Manjunath
• Parameshwarappa Anandakumar
• Nagarajan Sivasankar
• Kumar Dhirendra

Classifications

• H10P72/0612

  Production flow monitoring, e.g. for increasing throughput · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0604 Primary

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H04N23/90 Primary

  Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums · CPC title

• H01L21/67276

  Electricity · mapped topic