In-situ etch rate and etch rate uniformity detection system
US-12489022-B2 · Dec 2, 2025 · US
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Berding Keith patents
Berding Keith is listed as an inventor on 21 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Berding Keith |
| Total patents | 21 |
| First publication | Feb 17, 2022 |
| Latest publication | Dec 2, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Smart camera substrate
US-12432461-B2 · Sep 30, 2025 · US
Spatial optical emission spectroscopy for etch uniformity
US-12405164-B2 · Sep 2, 2025 · US
Smart camera substrate
US-2024365013-A1 · Oct 31, 2024 · US
Smart camera substrate
US-12114083-B2 · Oct 8, 2024 · US
In-situ etch material selectivity detection system
US-2024096715-A1 · Mar 21, 2024 · US
Multiple reflectometry for measuring etch parameters
US-11927543-B2 · Mar 12, 2024 · US
In-situ etch material selectivity detection system
US-11830779-B2 · Nov 28, 2023 · US
Smart camera substrate
US-2023345137-A1 · Oct 26, 2023 · US
Smart camera substrate
US-11736818-B2 · Aug 22, 2023 · US
Recent patents
Latest publications not already listed above.
Spatial optical emission spectroscopy for etch uniformity
US-2023258500-A1 · Aug 17, 2023 · US
Spatial optical emission spectroscopy for etch uniformity
US-11668602-B2 · Jun 6, 2023 · US
Multiple reflectometry for measuring etch parameters
US-2023168210-A1 · Jun 1, 2023 · US
Multiple reflectometry for measuring etch parameters
US-11619594-B2 · Apr 4, 2023 · US
Multiple reflectometry for measuring etch parameters
US-2022349833-A1 · Nov 3, 2022 · US
Spatial optical emission spectroscopy for etch uniformity
US-2022333989-A1 · Oct 20, 2022 · US
Smart camera substrate
US-2022272278-A1 · Aug 25, 2022 · US
Smart camera substrate
US-11284018-B1 · Mar 22, 2022 · US
Smart camera substrate
US-2022086364-A1 · Mar 17, 2022 · US
In-situ etch material selectivity detection system
US-2022051954-A1 · Feb 17, 2022 · US
In-situ etch rate and etch rate uniformity detection system
US-2022051953-A1 · Feb 17, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 21 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/238 | 9 |
| H10P72/0612 | 8 |
| H10P72/0602 | 8 |
| H10P72/0604 | 8 |
| H04N23/555 | 8 |