Flexible element for a substrate processing chamber
US-2026062809-A1 · Mar 5, 2026 · US
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Ummethala Upendra patents
Ummethala Upendra is listed as an inventor on 53 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ummethala Upendra |
| Total patents | 53 |
| First publication | Mar 29, 2016 |
| Latest publication | Mar 5, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Adjusting chamber performance by equipment constant updates
US-12560916-B2 · Feb 24, 2026 · US
Physically-informed multi-system hardware operating windows
US-12510878-B2 · Dec 30, 2025 · US
Determining equipment constant updates by machine learning
US-12504726-B2 · Dec 23, 2025 · US
Splitter circuit for wafer processing system
US-2025385075-A1 · Dec 18, 2025 · US
Chamber matching by equipment constant updates
US-12498705-B2 · Dec 16, 2025 · US
Smart camera substrate
US-12432461-B2 · Sep 30, 2025 · US
High throughput substrate processing cluster tool
US-2025136386-A1 · May 1, 2025 · US
High Throughput Substrate Processing Cluster Tool With Factory Interface Centering
US-2025038021-A1 · Jan 30, 2025 · US
Swapper for a cluster tool
US-2025033156-A1 · Jan 30, 2025 · US
Recent patents
Latest publications not already listed above.
Performing radio frequency matching control using a model-based digital twin
US-12211670-B2 · Jan 28, 2025 · US
Smart camera substrate
US-2024365013-A1 · Oct 31, 2024 · US
Smart camera substrate
US-12114083-B2 · Oct 8, 2024 · US
Adjustable achromatic collimator assembly for endpoint detection systems
US-12066639-B2 · Aug 20, 2024 · US
Adjusting chamber performance by equipment constant updates
US-2024176334-A1 · May 30, 2024 · US
Determining equipment constant updates by machine learning
US-2024176312-A1 · May 30, 2024 · US
Chamber matching by equipment constant updates
US-2024176336-A1 · May 30, 2024 · US
Performing radio frequency matching control using a model-based digital twin
US-2024162009-A1 · May 16, 2024 · US
Concentration sensor for precursor delivery system
US-2024019410-A1 · Jan 18, 2024 · US
Monitoring of acoustic events on a substrate
US-2023390886-A1 · Dec 7, 2023 · US
Physically-informed multi-system hardware operating windows
US-2023367288-A1 · Nov 16, 2023 · US
Concentration sensor for precursor delivery system
US-11808746-B2 · Nov 7, 2023 · US
Adjustable achromatic collimator assembly for endpoint detection systems
US-2023341699-A1 · Oct 26, 2023 · US
Smart camera substrate
US-2023345137-A1 · Oct 26, 2023 · US
Performing radio frequency matching control using a model-based digital twin
US-11784028-B2 · Oct 10, 2023 · US
Smart camera substrate
US-11736818-B2 · Aug 22, 2023 · US
In-situ optical chamber surface and process sensor
US-11735401-B2 · Aug 22, 2023 · US
Adjustable achromatic collimator assembly for endpoint detection systems
US-11719952-B2 · Aug 8, 2023 · US
Methods and mechanisms for coupling sensors to transfer chamber robot
US-2023089982-A1 · Mar 23, 2023 · US
Concentration sensor for precursor delivery system
US-2023003704-A1 · Jan 5, 2023 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 49 |
| Bose Corp | 2 |
| Ummethala Upendra | 2 |
| Hale Layton | 2 |
| Kla Tencor Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0604 | 11 |
| H10P74/203 | 9 |
| H10P74/277 | 8 |
| H01L22/12 | 8 |
| H01L22/34 | 8 |