Maintenance device

Patent metadata

Field	Value
Publication number	US-11532467-B2
Application number	US-202017009908-A
Country	US
Kind code	B2
Filing date	Sep 2, 2020
Priority date	Jun 25, 2018
Publication date	Dec 20, 2022
Grant date	Dec 20, 2022

Abstract

A maintenance device has a cover and a fixing member. The cover is in a vacuum atmosphere during substrate processing, is formed to have a size corresponding to a boundary line between a first part and a second part of a processing container, which can be separated into the first part and the second part, or an opening surface separating the first part and the second part, and has airtightness, and visual transparency at least in a part. The fixing member fixes in an airtight manner the cover along the boundary line between the first part and the second part of the processing container or to the opening surface separating the first part and the second part.

First claim

The invention claimed is:

1. A maintenance device comprising:
a first cover that is in a vacuum atmosphere during substrate processing, is formed to have a size corresponding to a boundary line between a first part and a second part of a processing container, which is separable into the first part and the second part, and has airtightness, and visual transparency at least in a part; and
first fixing members that fix in an airtight manner the first cover along the boundary line between the first part and the second part of the processing container, wherein
the first cover is a bag body in which an opening having a size corresponding to the boundary line between the first part and the second part is formed, is provided with a zipper portion which enables to maintain airtightness by closing, at a part of the opening, and the first cover covers the boundary line between the first part and the second part to close the zipper portion,
the first fixing members fix in an airtight manner the first cover at positions above and below the boundary line between the first part and the second part.

2. The maintenance device according to claim 1 , further comprising a maintenance tool and a second fixing member wherein the maintenance tool is provided with a second cover, the second cover is formed to have a size corresponding to opening surfaces of the first part and the second part, the second fixing member fixes in an airtight manner the second cover to an edge of an opening surface of the first part or the second part.

3. The maintenance device according to claim 2 , wherein
the second cover is provided with gloves.

4. The maintenance device according to claim 2 , wherein
the second cover is provided with a first fastener having airtightness, and communicates with an airtight container, via the first fastener.

5. The maintenance device according to claim 4 , wherein
the container is provided with a valve or joint that connects an inside and an outside of the container, and a second fastener having airtightness.

6. The maintenance device according to claim 4 , wherein
the container is attachable and detachable to and from the second cover.

7. The maintenance device according to claim 1 , wherein the first fixing members are provided with a valve or joint that connects an inside covered with the first cover and an outside.

8. The maintenance device according to claim 1 , wherein
the first part includes an upper electrode, and
the second part includes a lower electrode.

Assignees

• Tokyo Electron Ltd

Inventors

• Ueda Takehiro
• Hirose Jun
• Tezuka Kazuyuki

Classifications

• H10P72/0421

  for drying etching · CPC title

• H01J37/3288 Primary

  Maintenance · CPC title

• H01J37/32532

  Electrodes · CPC title

• H01J37/32513 Primary

  Sealing means, e.g. sealing between different parts of the vessel · CPC title

• H01J37/32642

  Focus rings · CPC title