Semiconductor package having a laser-activatable mold compound

Patent metadata

Field	Value
Publication number	US-11289436-B2
Application number	US-202016886305-A
Country	US
Kind code	B2
Filing date	May 28, 2020
Priority date	May 31, 2019
Publication date	Mar 29, 2022
Grant date	Mar 29, 2022

Abstract

Embodiments of molded packages and corresponding methods of manufacture are provided. In an embodiment of a molded package, the molded package includes a laser-activatable mold compound having a plurality of laser-activated regions which are plated with an electrically conductive material to form metal pads and/or metal traces at a first side of the laser-activatable mold compound. A semiconductor die embedded in the laser-activatable mold compound has a plurality of die pads. An interconnect electrically connects the plurality of die pads of the semiconductor die to the metal pads and/or metal traces at the first side of the laser-activatable mold compound.

First claim

The invention claimed is:

1. A molded package, comprising:
a laser-activatable mold compound having a plurality of laser-activated regions which are plated with an electrically conductive material to form metal pads and/or metal traces at a first side of the laser-activatable mold compound;
a semiconductor die embedded in the laser-activatable mold compound and having a plurality of die pads; and
an interconnect electrically connecting the plurality of die pads of the semiconductor die to the metal pads and/or metal traces at the first side of the laser-activatable mold compound,
wherein the laser-activatable mold compound is a multiple layer mold compound,
wherein the interconnect comprises a plurality of wire stud bumps or metal pillars or vertical bond wires attached at a first end to the plurality of die pads of the semiconductor die and attached at a second end opposite the first end to first layer metal structures of a first layer of the laser-activatable mold compound,
wherein the first layer of the laser-activatable mold compound has a plurality of laser-activated regions which are plated with an electrically conductive material to form the first layer metal structures.

2. The molded package of claim 1 , wherein a second layer of the laser-activatable mold compound has a plurality of laser-activated regions which are plated with an electrically conductive material to form second layer metal structures of the second layer of the laser-activatable mold compound, and wherein the first layer metal structures of the first layer of the laser-activatable mold compound are electrically connected to the second layer metal structures of the second layer of the laser-activatable mold compound.

3. The molded package of claim 1 , wherein the plurality of die pads is disposed at a first side of the semiconductor die, wherein a second side of the semiconductor die opposite the first side is not covered by the laser-activatable mold compound, and wherein the molded package further comprises either a glob top covering the second side of the semiconductor die or a heat sink metal plate covering the second side of the semiconductor die.

4. The molded package of claim 1 , wherein the semiconductor die comprises a power transistor, an RF front end circuit, logic devices, or is a controller.

5. The molded package of claim 1 , wherein a first one of the metal pads at the first side of the laser-activatable mold compound is electrically connected to a first one of the die pads of the semiconductor die by the interconnect, and wherein in a vertical projection of a footprint of the first die pad onto the first side of the laser-activatable mold compound, the first metal pad is positioned outside the footprint of the first die pad.

6. The molded package of claim 5 , wherein the first metal pad is connected to a first one of the metal traces at the first side of the laser-activatable mold compound, and wherein in the vertical projection, the first metal trace is positioned inside the footprint of the first die pad and vertically aligned with the first die pad.

7. A method of manufacturing a molded package, the method comprising:
placing a semiconductor die on a carrier, the semiconductor die having a plurality of die pads facing away from the carrier;
attaching at least an initial part of an interconnect to the plurality of die pads of the semiconductor die before or after placing the semiconductor die on the carrier;
embedding the semiconductor die and the interconnect in a laser-activatable mold compound;
directing a laser at a first side of the laser-activatable mold compound to laser-activate a plurality of regions of the laser-activatable mold compound; and
plating an electrically conductive material on the plurality of laser-activated regions of the laser-activatable mold compound to form metal pads and/or metal traces at the first side of the laser-activatable mold compound,
wherein the interconnect electrically connects the plurality of die pads of the semiconductor die to the metal pads and/or metal traces at the first side of the laser-activatable mold compound,
wherein embedding the semiconductor die and the interconnect in the laser-activatable mold compound comprises thinning the laser-activatable mold compound or drilling holes in the laser-activatable mold compound to expose the at least initial part of the interconnect at the side facing away from the carrier,
wherein the laser-activatable mold compound comprises a first layer and a second layer,
wherein thinning or drilling holes is applied to the first layer of the laser-activatable mold compound.

8. The method of claim 7 , wherein embedding the semiconductor die and the interconnect in a laser-activatable mold compound comprises:
embedding the semiconductor die and the initial part of the interconnect in the first layer of the laser-activatable mold compound;
directing a laser at the first layer of the laser-activatable mold compound to laser-activate a plurality of regions of the first layer of the laser-activatable mold compound;
plating an electrically conductive material on the plurality of laser-activated regions of the first layer of the laser-activatable mold compound to form first layer metal structures at a surface of the first layer of the laser-activatable mold compound; and
applying the second layer of the laser-activatable mold compound over the surface of the first layer of the laser-activatable mold compound.

9. The method of claim 8 , wherein attaching at least the initial part of the interconnect to the plurality of die pads of the semiconductor die comprises attaching a plurality of wire stud bumps or pillars or vertical bond wires to the plurality of die pads of the semiconductor die.

10. The method of claim 7 , wherein the at least initial part of the interconnect protrudes from the first layer of the laser-activatable mold compound at a side facing away from the carrier.

11. A method of manufacturing a molded package, the method comprising:
placing a semiconductor die on a carrier, the semiconductor die having a plurality of die pads facing away from the carrier;
attaching at least an initial part of an interconnect to the plurality of die pads of the semiconductor die before or after placing the semiconductor die on the carrier;
embedding the semiconductor die and the interconnect in a laser-activatable mold compound;
directing a laser at a first side of the laser-activatable mold compound to laser-activate a plurality of regions of the laser-activatable mold compound; and
plating an electrically conductive material on the plurality of laser-activated regions of the laser-activatable mold compound to form metal pads and/or metal traces at the first side of the laser-activatable mold compound,
wherein the interconnect electrically connects the plurality of die pads of the semiconductor die to the metal pads and/or metal traces at the first side of the laser-activatable mold compound,
wherein the at least initial part of the interconnect protrudes from the laser-activatable mold compound or, if the laser-activatable mold compound comprises a first layer and a second layer, from the first layer of the laser-activatable mold compound at a side facing away from the carrier.

12. The method of claim 11 , wherein embedding the semiconductor die and the interconnect in a laser-activatable mold compound comprises:
embedding the semiconductor die and the initial part of the interconnect in a first layer of the laser-activatable mold compound;
directing a laser at the first layer of the laser-activatable mold compound to laser-activate a plurality of regions of the first layer of the laser-act

Assignees

• Infineon Technologies Austria Ag

Inventors

• Lee Chee Hong
• Chua Kok Yau
• Hong Chii Shang
• Lee Swee Kah
• Ng Chee Yang
• Schiess Klaus

Classifications

• H10W74/142

  the encapsulations exposing the passive side of the semiconductor body · CPC title

• H10W70/099

  Connecting interconnections to insulating or insulated package substrates, interposers or redistribution layers · CPC title

• H10W72/073

  of die-attach connectors · CPC title

• H10W72/0198

  batch processes · CPC title

• H10W72/874

  On different surfaces · CPC title